Abstract: Disclosed herein are approaches for in-situ verification and correction of a wafer position. In one approach, a method may include illuminating an underside of a platen positioned within a processing chamber, and detecting a perimeter edge of the platen using an imaging device positioned external to the processing chamber, above the platen. The method may further include determining, via a controller, position data for the platen based on the detected perimeter edge of the platen, and positioning a wafer atop the platen based on the position data of the platen, wherein the wafer comprises a positioning notch.

Abstract: A flow control valve includes a housing forming internal passages in fluid communication with a port of the valve, and an internal cavity. A flow direction block is disposed in the internal cavity and forms at least one flow passage extending through a portion thereof. The flow direction block is moveable within the internal cavity such that the free ends of the least one flow passage can be selectively aligned with a respective internal passage along an interface as the flow direction block is moved from a first, closed position to a second, open position. A seal is disposed around each interface and includes an internal face, which presses against an outer surface of the flow direction block, and an external face, which presses against the housing. Sealing function is improved, at least in part, by a differential fluid pressure that acts on the seal.

Abstract: A robot calibration method which aligns the coordinate system of a gantry module with the coordinate system of a camera system is disclosed. The method includes using an alignment tool, which allows the operator to place workpieces in locations known by the gantry module. An image is then captured of these workpieces by the camera system. A controller uses the information from the gantry module and the camera system to determine the relationship between the two coordinate systems. It then determines a transformation equation to convert from one coordinate system to the other.

Abstract: A flow control valve includes a housing forming internal passages in fluid communication with a port of the valve, and an internal cavity. A flow direction block is disposed in the internal cavity and forms at least one flow passage extending through a portion thereof. The flow direction block is moveable within the internal cavity such that the free ends of the least one flow passage can be selectively aligned with a respective internal passage along an interface as the flow direction block is moved from a first, closed position to a second, open position. A seal is disposed around each interface and includes an internal face, which presses against an outer surface of the flow direction block, and an external face, which presses against the housing. Sealing function is improved, at least in part, by a differential fluid pressure that acts on the seal.

Abstract: A robot calibration method which aligns the coordinate system of a gantry module with the coordinate system of a camera system is disclosed. The method includes using an alignment tool, which allows the operator to place workpieces in locations known by the gantry module. An image is then captured of these workpieces by the camera system. A controller uses the information from the gantry module and the camera system to determine the relationship between the two coordinate systems. It then determines a transformation equation to convert from one coordinate system to the other.

Abstract: A method and computer program product for performing a latency analysis to determine one or more latency statistics for one or more network links within a distributed computing network. The one or more latency statistics are compared to one or more benchmark latency criteria to determine if at least one of the network links is a latency-compatible network link. If at least one of the network links is a latency-compatible network link, at least one additional network analysis is performed on at least one of the latency-compatible network links.

Abstract: A method and computer program product for allowing one or more clients to define a real estate listing for each of a plurality of available properties, thus defining a plurality of available real estate listings. Each of the plurality of available real estate listings includes one or more data items. A user is allowed to define one or more real estate preferences. At least one compatible real estate listing is identified for the user based upon the one or more real estate preferences. The at least one compatible real estate listing is chosen from the plurality of available real estate listings. Review is effectuated, on a handheld electronic device of the user, of at least a portion of the one or more data items of the at least one compatible real estate listing.

Abstract: An ion implanter includes a source of a stationary, planar ion beam, a set of beamline components that steer the ion beam along a normal beam path as determined by first operating parameter values, an end station that mechanically scans the wafer across the normal beam path, and control circuitry that responds to a glitch in the ion beam during implantation pass to (1) immediately alter an operating parameter of at least one of the beamline components to a second value to direct the ion beam away from the normal beam path and thereby cease implantation at an implantation transition location on the wafer, (2) subsequently move the wafer to an implantation-resuming position in which the implantation transition location on the wafer lies directly on the normal path of the ion beam, and (3) return the operating parameter to its first value to direct the ion beam along the normal beam path and resume ion implantation at the implantation transition location on the wafer.

Abstract: A system includes a transfer arm defining a retaining plane, and at least three sensors are disposed on the transfer arm and configured to detect a position of a mask relative to the retaining plane. The at least three sensors may be used to determine if the mask is properly positioned on the transfer arm and to determine if the mask is properly positioned in a masking position. The mask may be used in an ion implanter to shield portions of a workpiece from ion implantation.

Abstract: A system and method for handling substrates in a vacuum chamber. The system includes a first robot configured for transferring substrates from a first set of load locks to a preprocessing station, and for transferring substrates from a process platen to the first set of load locks; a second robot configured for transferring substrates from a second set of load locks to the preprocessing station, and for transferring substrates from the process platen to the second set of load locks; and a transfer mechanism for transferring substrates from the preprocessing station to the process platen.

Abstract: A flow control valve for selectively routing a coolant in a dual-zone heater system is provided. The flow control valve includes a housing and a flow control device. The housing includes an inlet port, a bypass outlet, a front heater outlet, and a rear heater outlet communicating through an internal cavity. The flow control device, which can be a cylinder, sphere, etc., is rotatably positioned in the internal cavity. The flow control device has an axial channel and generally radial aperture. The axial channel transports the coolant received from the inlet port through the flow control device, and the aperture delivers the coolant to one or more of the bypass outlet, the front heater outlet, and the rear heater outlet as the flow control device is rotated. In this way the circuit is not deadheaded.