Patents by Inventor R. William Killam

R. William Killam has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mask analysis
    Patent number: 4218142
    Abstract: Masks used in the production of integrated circuits are analyzed and tested by a scanning spot from a laser beam comparing the position signal of the scan from a mask against a data base representing another mask which may be selected at random. Apparatus includes a laser, means to form and scan a minute spot from said laser, an x-y stage to move a mask under the scan, a detector, and means to compare scan results.
    Type: Grant
    Filed: March 8, 1978
    Date of Patent: August 19, 1980
    Assignee: Aerodyne Research, Inc.
    Inventors: David L. Kryger, R. William Killam