Patents by Inventor Radim Šejnoha

Radim Šejnoha has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for determining beam position
    Patent number: 12380596
    Abstract: Methods and systems to determine positions of multiple beamlets includes performing a first scan by scanning the beamlets over a first sample region and acquiring multiple cell images; and performing a second scan by scanning the beamlets over a second sample region and acquiring multiple cell images. Each cell image corresponds to a beamlet, and at least a part of an overlapped region between the first sample region and the second sample region is scanned by multiple beamlets during both the first scan and the second scan. Position of each beamlet may then be determined based on the corresponding cell images acquired during the first scan and the second scan.
    Type: Grant
    Filed: December 23, 2021
    Date of Patent: August 5, 2025
    Assignee: FEI Company
    Inventors: Jan Stopka, Bohuslav Sed'a, Radovan Vašina, Radim Šejnoha