Abstract: A MEMS sensor with improved overload resistance for metrological registering of a measured variable comprises a plurality of layers, especially silicon layers, arranged on one another. The layers include at least one inner layer, which is arranged between a first layer and a second layer, and in the inner layer there is provided extending perpendicularly to the plane of the inner layer through the inner layer at least one cavity, on which borders externally at least sectionally and forming a connecting element, a region of the inner layer, which is connected with the first layer and the second layer. A lateral surface of the connecting element externally at least sectionally bordering the cavity has in an end region facing the first layer a rounding decreasing the cross sectional area of the cavity in the direction of the first layer, and has in an end region facing the second layer a rounding decreasing the cross sectional area of the cavity in the direction of the second layer.

Abstract: A pressure difference sensor for providing a pressure measurement signal, comprising: a pressure difference measuring cell, which is suppliable with first and second pressures and which outputs the pressure measurement signal; first and second ceramic stiffening elements, each of which is joined with the pressure difference measuring cell and has a duct, via which the first, respectively the second, pressure is suppliable to the pressure difference measuring cell; a platform with first and second pressure input openings, each of which extends from a first surface to a second surface of the platform, wherein the pressure input openings are sealed on the first surface, each with its own isolating diaphragm, and first and second pressures tubes, which are arranged between the stiffening elements and the platform, and wherein each of the first pressure tube and the second pressure tube has at least one bend in a region between the platform and a first, respectively second, connecting area of the corresponding pre

Abstract: A simply composed, cost effectively manufacturable, pressure sensor is described, comprising a platform, an electrically conductive measuring membrane connected with the platform to enclose a pressure chamber and contactable with a pressure to be measured, and an electrode spaced from the measuring membrane and electrically insulated from the measuring membrane to form together with the measuring membrane a capacitor with a capacitance variable as a function of a deflection of the measuring membrane dependent on the pressure acting on the measuring membrane, wherein the platform has an inner surface bounding the pressure chamber and lying opposite the measuring membrane, wherein an insulating layer is provided on the inner surface, especially an insulating layer of silicon dioxide, and the electrode is a conductive coating, especially a coating of doped polysilicon, applied on the inner surface on the insulating layer.

Abstract: A pressure difference sensor includes first and second counterelectrodes, a conductive disk between the counterelectrodes, a first insulating layer connecting an outer edge of the disk with an outer edge of the first counterelectrode forming a first pressure chamber, a second insulating layer connecting an outer edge of the disk with an outer edge of the second counterelectrode forming a second pressure chamber, an opening in the first counterelectrode, via which the first pressure chamber is contactable with a first pressure, and an opening in the second counterelectrode, via which the second pressure chamber is contactable with a second pressure. The disk is divided into inner and outer regions, the inner region includes a measuring membrane arranged between the two pressure chambers and an edge region, the inner region forms with each of the counterelectrodes a capacitor having a capacitance dependent on a pressure difference acting on the measuring membrane.

Abstract: A high-precision pressure sensor, having a first base body that has two electrically conductive layers and an insulation layer arranged between the two layers and electrically insulating the two layers from one another, an electrically conductive measurement membrane arranged on the first base body with inclusion of a pressure chamber, which measurement membrane can be charged with a pressure to be measured, and an electrode provided in the membrane-facing layer and spaced apart from the measurement membrane, which electrode together with the measurement membrane forms a capacitor having a capacitance that varies according to the pressure acting upon the measurement membrane.

Abstract: A pressure sensor includes a sensor body with a sensor chamber in the interior, at least a first separating membrane, forming a first separating membrane chamber connected with the sensor body. A measuring membrane divides the sensor chamber into two chamber portions. A pressure transfer liquid, with which the first separating membrane chamber, the first chamber portion and a channel therebetween are filled, in order to transfer a pressure to the measuring membrane; wherein the pressure sensor is specified for a temperature range between a minimum temperature and a maximum temperature, as well as for a pressure range.

Abstract: A pressure difference sensor, comprising a pressure difference measuring cell having a measuring membrane, two platforms, between which the measuring membrane is arranged, and a transducer, as well as an elastic clamping apparatus, which has two clamping areas, each of which acts on a respective rear side of the platform facing away from the measuring membrane. The clamping apparatus has at least one elastic element, via which the clamping areas are mechanically coupled, in order to clamp the pressure difference measuring cell with an axial clamping force. The clamping areas are rigid, wherein the clamping apparatus comprises a clamp with two clamping bodies, each of which has one of the clamping areas. At least one of the clamping bodies has an elastic element, the clamping bodies are connected with one another under stress, in order to exert a clamping force on the pressure difference measuring cell, wherein the two clamping bodies have a central, form retaining section, which includes the clamping areas.

Abstract: A differential pressure sensor comprises a measuring diaphragm made of an electrically conductive material, two electrically insulating mating bodies, and at least one capacitive transducer. The measuring diaphragm is connected to the mating bodies in a pressure-tight manner with the formation of a measuring chamber in each case along a circumferential edge. The mating bodies each have a diaphragm bed which is concave in the center, wherein the mating bodies each have a pressure channel which extends through the mating body into the measuring chamber. The capacitive transducer has at least one mating body electrode which is formed by a metallic coating of the surface of the mating body in the region of the diaphragm bed and with which contact can be made by a metallic coating of the wall of the pressure channel.

Abstract: A MEMS sensor with improved overload resistance for metrological registering of a measured variable comprises a plurality of layers, especially silicon layers, arranged on one another. The layers include at least one inner layer, which is arranged between a first layer and a second layer, and in the inner layer there is provided extending perpendicularly to the plane of the inner layer through the inner layer at least one cavity, on which borders externally at least sectionally and forming a connecting element, a region of the inner layer, which is connected with the first layer and the second layer. A lateral surface of the connecting element externally at least sectionally bordering the cavity has in an end region facing the first layer a rounding decreasing the cross sectional area of the cavity in the direction of the first layer, and has in an end region facing the second layer a rounding decreasing the cross sectional area of the cavity in the direction of the second layer.

Abstract: A pressure difference sensor for providing a pressure measurement signal, comprising: a pressure difference measuring cell, which is suppliable with first and second pressures and which outputs the pressure measurement signal; first and second ceramic stiffening elements, each of which is joined with the pressure difference measuring cell and has a duct, via which the first, respectively the second, pressure is suppliable to the pressure difference measuring cell; a platform with first and second pressure input openings, each of which extends from a first surface to a second surface of the platform, wherein the pressure input openings are sealed on the first surface, each with its own isolating diaphragm, and first and second pressures tubes, which are arranged between the stiffening elements and the platform, and wherein each of the first pressure tube and the second pressure tube has at least one bend in a region between the platform and a first, respectively second, connecting area of the corresponding pre

Abstract: A high-precision pressure sensor, having a first base body that has two electrically conductive layers and an insulation layer arranged between the two layers and electrically insulating the two layers from one another, an electrically conductive measurement membrane arranged on the first base body with inclusion of a pressure chamber, which measurement membrane can be charged with a pressure to be measured, and an electrode provided in the membrane-facing layer and spaced apart from the measurement membrane, which electrode together with the measurement membrane forms a capacitor having a capacitance that varies according to the pressure acting upon the measurement membrane.

Abstract: A hydraulic measuring mechanism for registering pressure differences, comprising a measuring mechanism platform having a process connection surface and two pressure input openings, in which, in each case, a pressure tube is arranged, which protrudes from a rear side of the measuring mechanism platform to support a pressure difference measuring cell, wherein the pressure tubes are connected pressure-tightly with the measuring mechanism platform from the process connection surface.

Abstract: A pressure difference sensor includes a pressure difference measuring cell, which has a measuring cell platform with pressure contactable measuring chambers in its interior, a first mounting surface and a second mounting surface. The mounting surfaces have a variable separation under pressure loading of the measuring chambers. A first reinforcement element with a first planar reinforcement area and a second reinforcement element with a second planar reinforcement area.

Abstract: A differential pressure sensor comprises a measuring diaphragm made of an electrically conductive material, two electrically insulating mating bodies, and at least one capacitive transducer. The measuring diaphragm is connected to the mating bodies in a pressure-tight manner with the formation of a measuring chamber in each case along a circumferential edge. The mating bodies each have a diaphragm bed which is concave in the center, wherein the mating bodies each have a pressure channel which extends through the mating body into the measuring chamber. The capacitive transducer has at least one mating body electrode which is formed by a metallic coating of the surface of the mating body in the region of the diaphragm bed and with which contact can be made by a metallic coating of the wall of the pressure channel.

Abstract: A simply constructed and cost effectively manufacturable pressure difference sensor, comprising first and second counterelectrodes, a conductive disk arranged between the two counterelectrodes, a first insulating layer, via which an outer edge of the disk is connected with an outer edge of the first counterelectrode to form a first pressure chamber, a second insulating layer, via which an outer edge of the disk is connected with an outer edge of the second counterelectrode to form a second pressure chamber, an opening provided in the first counterelectrode, via which opening the first pressure chamber is contactable with a first pressure, and an opening provided in the second counterelectrode, via which opening the second pressure chamber is contactable with a second pressure.

Abstract: A pressure difference sensor, comprising a pressure difference measuring cell having a measuring membrane, two platforms, between which the measuring membrane is arranged, and a transducer, as well as an elastic clamping apparatus, which has two clamping areas, each of which acts on a respective rear side of the platform facing away from the measuring membrane. The clamping apparatus has at least one elastic element, via which the clamping areas are mechanically coupled, in order to clamp the pressure difference measuring cell with an axial clamping force. The clamping areas are rigid, wherein the clamping apparatus comprises a clamp with two clamping bodies, each of which has one of the clamping areas. At least one of the clamping bodies has an elastic element, the clamping bodies are connected with one another under stress, in order to exert a clamping force on the pressure difference measuring cell, wherein the two clamping bodies have a central, form retaining section, which includes the clamping areas.

Abstract: A pressure difference sensor includes a measuring membrane, which is arranged between two platforms and connected pressure-tightly with the platforms, in each case, via a first insulating layer for forming pressure chambers between the platforms and the measuring membrane. The insulating layer is especially silicon oxide, wherein the pressure difference sensor further includes an electrical transducer for registering a pressure dependent deflection of the measuring membrane. The platforms have support positions, against which the measuring membrane lies at least partially in the case of overload, wherein the support positions have position dependent heights, characterized in that the support positions are formed in the first insulating layer by isotropic etching, and the particular height h of a support position, in each case, is a function of a distance from a base of the support position in the reference plane.

Abstract: A pressure difference sensor includes a pressure difference measuring cell, which has a measuring cell platform with pressure contactable measuring chambers in its interior, a first mounting surface and a second mounting surface. The mounting surfaces have a variable separation under pressure loading of the measuring chambers. A first reinforcement element with a first planar reinforcement area and a second reinforcement element with a second planar reinforcement area.

Abstract: A hydraulic measuring mechanism for registering pressure differences, comprising a measuring mechanism platform 10 having a process connection surface 16 and two pressure input openings, in which, in each case, a pressure tube 20, 22 is arranged, which protrudes from a rear side of the measuring mechanism platform 10 to support a pressure difference measuring cell 40, wherein the pressure tubes 20, 22 are connected pressure-tightly with the measuring mechanism platform 10 from the process connection surface 16.

Abstract: A pressure difference sensor includes a measuring membrane, which is arranged between two platforms and connected pressure-tightly with the platforms, in each case, via a first insulating layer for forming pressure chambers between the platforms and the measuring membrane. The insulating layer is especially silicon oxide, wherein the pressure difference sensor further includes an electrical transducer for registering a pressure dependent deflection of the measuring membrane. The platforms have support positions, against which the measuring membrane lies at least partially in the case of overload, wherein the support positions have position dependent heights, characterized in that the support positions are formed in the first insulating layer by isotropic etching, and the particular height h of a support position, in each case, is a function of a distance from a base of the support position in the reference plane.