Abstract: Disclosed are devices, systems and methods for gas sampling, for controlling and measuring a gaseous flow, and for controlling a pressure gradient. An exemplary device 1 for controlling a gaseous flow comprises a gaseous flow adjusting interface 2, configured to inhibit or allow a flow of gas through the device 1 in a controlled manner, and control means 3, 4 of the adjusting interface. The adjusting interface 2 comprises a plurality of nano-holes 20. Each of the nano-holes has sub-micrometric dimensions and is suitable to be opened or closed in a controlled manner. The control means 3,4, in turn, comprise actuating means 3, suitable to open or close these nano-holes, and electronic processing means 4, configured to activate the actuation means to open or close individually or collectively the nano-holes 20 in a controlled manner.

Abstract: A portable system 1 for analyzing gaseous flows that vary over time is described, the system comprising a sampling chamber 18, a gas sampling module 7, an ion filtering module 8 and an ion detecting module 9. The gas sampling module 7 is configured to adjust an input gaseous flow Fi of gas particles from the sampling chamber 18, ionize said gas particles and to emit the produced ions, so as to generate an ion flow I. The ion filtering module 8 is configured to controllably select at least one type of ion present in the ion flow I and to generate a corresponding at least one homogeneous ion beam I?, having an intensity representative of the concentration of the corresponding gas particle in the gaseous composition to be analyzed. The ion detecting module 9 is configured to measure the intensity of the at least one ion beam I?.

Abstract: An electronic device 1 for analyzing a gas composition, which is present in an environment A at an environment pressure Pa, is described. The device 1 is portable and comprises a gas sampling module 7, an ion filtering module 8 and an ion detecting module 9. The sampling module 7 is configured to adjust an input gaseous flow Fi of gaseous particles from the environment A and to ionize said gaseous particles and to generate an ion flow I having an ion composition representative of the gas composition to be analyzed. The ion filtering module 8 is configured to controllably select at least one type of ions present in the ion flow I and to generate a corresponding at least one homogeneous ion beam I?. The ion detecting module 9 is configured to measure the intensity of such least one ion beam I?.

Abstract: A device 1 for generating a controlled ionic flow I is described. The device 1 is portable and comprises an ionization chamber 6, at least one inlet member 2 and at least one ion outlet member 3. The ionization chamber 6 is suitable to be kept at a vacuum pressure, and configured to ionize gaseous particles contained therein. The at least one inlet member 2 is configured to inhibit or allow and/or adjust an inlet in the ionization chamber of a gaseous flow Fi of said gaseous particles. In addition, the at least one inlet member 2 comprises a gaseous flow adjusting interface 22, having a plurality of nano-holes 20, of sub-micrometric dimensions, suitable to be opened or closed, in a controlled manner, to inhibit or allow a respective plurality of gas micro-flows through the at least one inlet member 2.

Abstract: A portable system 1 for analyzing gaseous flows that vary over time is described, the system comprising a sampling chamber 18, a gas sampling module 7, an ion filtering module 8 and an ion detecting module 9. The sampling chamber 18 is suitable to be kept at a controlled sampling pressure Pc, and is configured to receive at least one gaseous flow F having a gaseous composition to be analyzed that is variable over time. The gas sampling module 7, arranged in fluidic communication with the sampling chamber 18, is configured to adjust an input gaseous flow Fi of gas particles from the sampling chamber 18, and an output gaseous flow Fo from the sampling module 7, so as to reproduce inside the sampling module 7 a gaseous composition representative of the gaseous composition to be analyzed. The gas sampling module 7 is further configured to ionize said gas particles and to emit the produced ions, so as to generate an ion flow I having an ion composition representative of the gaseous composition to be analyzed.

Abstract: A device 1 for generating a controlled ionic flow I is described. The device 1 is portable and comprises an ionization chamber 6, at least one inlet member 2 and at least one ion outlet member 3. The ionization chamber 6 is suitable to be kept at a vacuum pressure, and configured to ionize gaseous particles contained therein. The at least one inlet member 2 is configured to inhibit or allow and/or adjust an inlet in the ionization chamber of a gaseous flow Fi of said gaseous particles. In addition, the at least one inlet member 2 comprises a gaseous flow adjusting interface 22, having a plurality of nano-holes 20, of sub-micrometric dimensions, suitable to be opened or closed, in a controlled manner, to inhibit or allow a respective plurality of gas micro-flows through the at least one inlet member 2.

Abstract: Disclosed are devices, systems and methods for gas sampling, for controlling and measuring a gaseous flow, and for controlling a pressure gradient. An exemplary device 1 for controlling a gaseous flow comprises a gaseous flow adjusting interface 2, configured to inhibit or allow a flow of gas through the device 1 in a controlled manner, and control means 3, 4 of the adjusting interface. The adjusting interface 2 comprises a plurality of nano-holes 20. Each of the nano-holes has sub-micrometric dimensions and is suitable to be opened or closed in a controlled manner. The control means 3,4, in turn, comprise actuating means 3, suitable to open or close these nano-holes, and electronic processing means 4, configured to activate the actuation means to open or close individually or collectively the nano-holes 20 in a controlled manner.

Abstract: An electronic device 1 for analyzing a gas composition, which is present in an environment A at an environment pressure Pa, is described. The device 1 is portable and comprises a gas sampling module 7, an ion filtering module 8 and an ion detecting module 9. The sampling module 7 is configured to adjust an input gaseous flow Fi of gaseous particles from the environment A and an output gaseous flow Fo so as to reproduce inside the sampling module 7 a gas composition representative of the gas composition to be analyzed. In addition, the sampling module 7 is configured to ionize said gaseous particles and to emit the ions produced, so as to generate an ion flow I having an ion composition representative of the gas composition to be analyzed.

Abstract: A method for operating a mass spectrometer (MS) includes establishing a pressure differential across a membrane wherein an upstream pressure in a calibrant gas inlet line on an upstream side of the membrane is greater than a downstream pressure in an ion source on a downstream side of the membrane; flowing a calibrant gas from the calibrant gas inlet line, through a nano-scale orifice of the membrane, and into the ion source; and maintaining the upstream pressure at a constant value. The calibrant may be flowed at a low flow rate. An MS system includes a membrane interposed between a calibrant gas introduction system and a mass spectrometer. The membrane may include an orifice of nano-scale diameter.

Abstract: A gas sampling device has a high-vacuum tight chamber formed within its casing, which communicates with an ambient outside through an inlet hole for the gas flow to be ionized and the ambient downstream the ionization chamber with an outlet hole for the ionized gas. A high-vacuum tight membrane separates the inlet hole from the ambient outside the chamber. The membrane has at least one nanohole formed therethrough with a diameter in the order of nanometers.

Abstract: GC-MS analysis apparatus has an interface section between GC and MS sections, which is located with respect to the direction of an analyte flow downstream of the GC section and upstream of the MS section. The interface section comprises at least one membrane with at least one orifice capable of establishing a molecular flow condition in the analyte passing between the GC and MS sections through the membrane. The membrane is subjected to a pressure differential such that the pressure pa in a region located upstream of the membrane is higher than the pressure pb in a region located downstream of the membrane.

Abstract: GC-MS analysis apparatus has an interface section between GC and MS sections, which is located with respect to the direction of an analyte flow downstream of the GC section and upstream of the MS section. The interface section comprises at least one membrane with at least one orifice capable of establishing a molecular flow condition in the analyte passing between the GC and MS sections through the membrane. The membrane is subjected to a pressure differential such that the pressure pa in a region located upstream of the membrane is higher than the pressure pb in a region located downstream of the membrane.

Abstract: A gas sampling device has a high-vacuum tight chamber formed within its casing, which communicates with an ambient outside through an inlet hole for the gas flow to be ionised and the ambient downstream the ionisation chamber with an outlet hole for the ionised gas. A high-vacuum tight membrane separates the inlet hole from the ambient outside the chamber. The membrane has at least one nanohole formed therethrough with a diameter in the order of nanometers.

Abstract: A pressure sensor made of a wafer with a pair of parallel silicon layers and a silicon oxide layer there between, comprises a vibrating microassembly formed as a silicon beam, which is arranged in a plane perpendicular to the silicon layers and fastened to a supporting base. A control devise is formed from a portion of one of the silicon layers and is driven by a signal of a predetermined frequency component, which under absolute vacuum conditions makes the microassembly to freely oscillate at a known frequency and amplitude relative to the supporting base within a cavity formed by removing the silicon oxide layer. An optical detection system detects deviations of the frequency and/or amplitude of oscillation of the microassembly from the known frequency and/or amplitude.

Abstract: A pressure sensor comprises a vibrating microassembly, which is fastened to a supporting base, a control device for assembly to make it to oscillate relative to the supporting base at known frequency and amplitude under absolute vacuum conditions, and means for detecting the deviations of the frequency and/or amplitude of the oscillation of assembly from known frequency and/or amplitude, wherein the control device is driven by a constant frequency signal components, and wherein detection means allow for a direct detection of the deviations, for instance by optical or electrical means.

Abstract: A micro-electro-mechanical vibrating pumping stage comprises a silicon substrate (15) on which there are formed a single-layer or multilayer oscillating assembly (27; 127; 227; 327) with a vibrating membrane and a device controlling the membrane in order to provide its oscillation with respect to the substrate. A molecular vacuum pump incorporates this vibrating pumping stage.

Abstract: A pressure sensor is a micro-electro-mechanical vibrating device, with a silicon substrate (15; 15?) onto which a single-layer or multilayer vibrating assembly (121; 221; 321) is formed. It comprises an electrode (21; 21?), which makes the assembly to oscillate relative to the substrate at the resonance frequency or at another known frequency, and a detector for detecting the actual frequency and/or amplitude of said oscillation. The actual frequency and/or amplitude are affected by the conditions, in particular the pressure, of the external environment and the variations of the frequency and amplitude with respect to the values set by the electrode is used to measure pressure variations in the surrounding environment.

Abstract: An ionisation vacuum gauge for measuring the residual pressure of a gaseous material remaining in a container (10), more particularly after operation of a vacuum pump comprises an electron-emitting cathode (31) made by exploiting the nanotube technology, a grid (13; 33; 133; 133?) for accelerating the electrons emitted by the cathode, and a plate (15; 35) collecting the ions and/or the ionised positive molecules of the gas. Measuring the plate current by a galvanometer allows for determining the value of the residual pressure inside the container.

Abstract: The present invention relates to an ionisation vacuum gauge for measuring the residual pressure of a gaseous material remaining in a container (10), more particularly after operation of a vacuum pump. The gauge comprises an electron-emitting cathode (17), a grid (13) for accelerating the electrons emitted by the cathode and a plate (15) collecting the ions and/or the ionised positive molecules of the gas, wherein said plate is placed outside said grid. Measuring the plate current by a galvanometer allows determining the value of the residual pressure inside the container.

Abstract: A pressure sensor is a micro-electro-mechanical vibrating device, with a silicon substrate (15; 15?) onto which a single-layer or multilayer vibrating assembly (121; 221; 321) is formed. It comprises an electrode (21; 21?), which makes the assembly to oscillate relative to the substrate at the resonance frequency or at another known frequency, and a detector for detecting the actual frequency and/or amplitude of said oscillation. The actual frequency and/or amplitude are affected by the conditions, in particular the pressure, of the external environment and the variations of the frequency and amplitude with respect to the values set by the electrode is used to measure pressure variations in the surrounding environment.