Patents by Inventor Raghunath Singanamalla

Raghunath Singanamalla has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240074159
    Abstract: A variety of applications can include apparatus having a memory device with metal digit lines for various digit line contacts for a memory array in an integrated process flow of the metal lines with metal contacts of transistors in a periphery to the memory array region. In the integrated process flow, material of the metal digit lines can be used as the metal contacts to the transistors in the periphery to the memory array region. In various embodiments, a metal contact can contact a metal gate of a transistor in the periphery or contact a metal barrier region, where the metal barrier region is above and contacting the metal gate and is structured without including polysilicon. Sacrificial polysilicon can be used to protect the gate of the transistor during processing in the memory array region.
    Type: Application
    Filed: August 22, 2023
    Publication date: February 29, 2024
    Inventors: Shivani Srivastava, Russell Allen Benson, Raghunath Singanamalla
  • Publication number: 20240074160
    Abstract: A variety of applications can include apparatus having a memory device structured from integrated processing of a memory array of the memory device with a periphery to the memory array. The memory device can be implemented with transistors formed in the periphery, where metal gates of the transistors are structured without polysilicon regions between the metal gates and metal contacts for the metal gates. The integrated processing can provide step height reduction between the memory array and the periphery to the memory array of a memory device, with the elimination of polysilicon on the gate stack of transistors in the periphery. The step height reduction in the memory device can lower overlap capacitance.
    Type: Application
    Filed: August 22, 2023
    Publication date: February 29, 2024
    Inventors: Shivani Srivastava, Russell Allen Benson, Raghunath Singanamalla, Jaydeb Goswami
  • Publication number: 20240074166
    Abstract: A variety of applications can include apparatus having a memory device with metal digit lines coupled to various digit line contacts for a memory array in an integrated process flow of the metal lines with metal contacts of transistors in a periphery to the memory array region, with a metal silicide formed on the gates of the transistors. The metal silicide for each transistor can be coupled to the metal contact for the transistor. In the integrated process flow, material of the metal digit lines can be used as the metal contact to the transistors in the periphery to the memory array region. The metal silicide can be formed by conversion of polysilicon formed on the memory array region and the periphery to the memory array region in the integrated process flow.
    Type: Application
    Filed: August 22, 2023
    Publication date: February 29, 2024
    Inventors: Shivani Srivastava, Raghunath Singanamalla, Russell Allen Benson
  • Publication number: 20240074161
    Abstract: A variety of applications can include apparatus having a memory device with digit line contacts disposed in a dielectric and metal digit lines coupled to various of the digit line contacts by at most one metal barrier above the dielectric. Material of the metal digit lines is used as a contact metal to a transistor in a periphery to the memory array region, where the transistor is coupled to the metal contact by multiple barrier metals on polysilicon on the transistor. An integration flow of metallization for periphery devices to a memory array and digit lines can be implemented to allow separate barrier metal formation between the memory array and the periphery, while still using the same material as the main conductor. Barrier metals can be formed for the periphery and the memory array region and then cleared from the memory array region before forming the main conductor.
    Type: Application
    Filed: August 22, 2023
    Publication date: February 29, 2024
    Inventors: Russell Allen Benson, Shivani Srivastava, Jaydip Guha, Raghunath Singanamalla
  • Patent number: 11094697
    Abstract: Some embodiments include a memory cell having first and second transistors, and a capacitor vertically displaced relative to the first and second transistors. The capacitor has a first node electrically coupled with a source/drain region of the first transistor, a second node electrically coupled with a source/drain region of the second transistor, and capacitor dielectric material between the first and second nodes. Some embodiments include a memory cell having first and second transistors vertically displaced relative to one another, and a capacitor between the first and second transistors. The capacitor has a first node electrically coupled with a source/drain region of the first transistor, a second node electrically coupled with a source/drain region of the second transistor, and capacitor dielectric material between the first and second nodes.
    Type: Grant
    Filed: November 7, 2018
    Date of Patent: August 17, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Gloria Yang, Suraj J. Mathew, Raghunath Singanamalla, Vinay Nair, Scott J. Derner, Michael Amiel Shore, Brent Keeth, Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Patent number: 10854611
    Abstract: Some embodiments include a memory cell having a first transistor supported by a semiconductor base, and having second and third transistors above the first transistor and vertically stacked one atop the other. Some embodiments include a memory cell having first, second and third transistors. The third transistor is above the second transistor, and the second and third transistors are above the first transistor. The first transistor has first and second source/drain regions, the second transistor has third and fourth source/drain regions, and the third transistor has fifth and sixth source/drain regions. A read bitline is coupled with the sixth source/drain region. A write bitline is coupled with the first source/drain region. A write wordline includes a gate of the first transistor. A read wordline includes a gate of the third transistor. A capacitor is coupled with the second source/drain region and with a gate of the second transistor.
    Type: Grant
    Filed: May 15, 2019
    Date of Patent: December 1, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Suraj J. Mathew, Kris K. Brown, Raghunath Singanamalla, Vinay Nair, Fawad Ahmed, Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Patent number: 10847516
    Abstract: Some embodiments include a memory cell having first, second and third transistors, with the second and third transistors being vertically displaced relative to one another. The memory cell has a semiconductor pillar extending along the second and third transistors, with the semiconductor pillar containing channel regions and source/drain regions of the second and third transistors. A capacitor may be electrically coupled between a source/drain region of the first transistor and a gate of the second transistor.
    Type: Grant
    Filed: July 2, 2019
    Date of Patent: November 24, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Suraj J. Mathew, Raghunath Singanamalla, Fawad Ahmed, Kris K. Brown, Vinay Nair, Gloria Yang, Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Publication number: 20190326292
    Abstract: Some embodiments include a memory cell having first, second and third transistors, with the second and third transistors being vertically displaced relative to one another. The memory cell has a semiconductor pillar extending along the second and third transistors, with the semiconductor pillar containing channel regions and source/drain regions of the second and third transistors. A capacitor may be electrically coupled between a source/drain region of the first transistor and a gate of the second transistor.
    Type: Application
    Filed: July 2, 2019
    Publication date: October 24, 2019
    Applicant: Micron Technology, Inc.
    Inventors: Suraj J. Mathew, Raghunath Singanamalla, Fawad Ahmed, Kris K. Brown, Vinay Nair, Gloria Yang, Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Publication number: 20190267379
    Abstract: Some embodiments include a memory cell having a first transistor supported by a semiconductor base, and having second and third transistors above the first transistor and vertically stacked one atop the other. Some embodiments include a memory cell having first, second and third transistors. The third transistor is above the second transistor, and the second and third transistors are above the first transistor. The first transistor has first and second source/drain regions, the second transistor has third and fourth source/drain regions, and the third transistor has fifth and sixth source/drain regions. A read bitline is coupled with the sixth source/drain region. A write bitline is coupled with the first source/drain region. A write wordline includes a gate of the first transistor. A read wordline includes a gate of the third transistor. A capacitor is coupled with the second source/drain region and with a gate of the second transistor.
    Type: Application
    Filed: May 15, 2019
    Publication date: August 29, 2019
    Applicant: Micron Technology, Inc.
    Inventors: Suraj J. Mathew, Kris K. Brown, Raghunath Singanamalla, Vinay Nair, Fawad Ahmed, Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Patent number: 10361204
    Abstract: Some embodiments include a memory cell having first, second and third transistors, with the second and third transistors being vertically displaced relative to one another. The memory cell has a semiconductor pillar extending along the second and third transistors, with the semiconductor pillar containing channel regions and source/drain regions of the second and third transistors. A capacitor may be electrically coupled between a source/drain region of the first transistor and a gate of the second transistor.
    Type: Grant
    Filed: June 12, 2018
    Date of Patent: July 23, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Suraj J. Mathew, Raghunath Singanamalla, Fawad Ahmed, Kris K. Brown, Vinay Nair, Gloria Yang, Fatma Arzum Slmsek-Ege, Diem Thy N. Tran
  • Patent number: 10319724
    Abstract: Some embodiments include a memory cell having a first transistor supported by a semiconductor base, and having second and third transistors above the first transistor and vertically stacked one atop the other. Some embodiments include a memory cell having first, second and third transistors. The third transistor is above the second transistor, and the second and third transistors are above the first transistor. The first transistor has first and second source/drain regions, the second transistor has third and fourth source/drain regions, and the third transistor has fifth and sixth source/drain regions. A read bitline is coupled with the sixth source/drain region. A write bitline is coupled with the first source/drain region. A write wordline includes a gate of the first transistor. A read wordline includes a gate of the third transistor. A capacitor is coupled with the second source/drain region and with a gate of the second transistor.
    Type: Grant
    Filed: July 12, 2018
    Date of Patent: June 11, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Suraj J. Mathew, Kris K. Brown, Raghunath Singanamalla, Vinay Nair, Fawad Ahmed, Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Publication number: 20190088652
    Abstract: Some embodiments include a memory cell having first and second transistors, and a capacitor vertically displaced relative to the first and second transistors. The capacitor has a first node electrically coupled with a source/drain region of the first transistor, a second node electrically coupled with a source/drain region of the second transistor, and capacitor dielectric material between the first and second nodes. Some embodiments include a memory cell having first and second transistors vertically displaced relative to one another, and a capacitor between the first and second transistors. The capacitor has a first node electrically coupled with a source/drain region of the first transistor, a second node electrically coupled with a source/drain region of the second transistor, and capacitor dielectric material between the first and second nodes.
    Type: Application
    Filed: November 7, 2018
    Publication date: March 21, 2019
    Applicant: Micron Technology, Inc.
    Inventors: Gloria Yang, Suraj J. Mathew, Raghunath Singanamalla, Vinay Nair, Scott J. Derner, Michael Amiel Shore, Brent Keeth, Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Patent number: 10157926
    Abstract: Some embodiments include a memory cell having first and second transistors, and a capacitor vertically displaced relative to the first and second transistors. The capacitor has a first node electrically coupled with a source/drain region of the first transistor, a second node electrically coupled with a source/drain region of the second transistor, and capacitor dielectric material between the first and second nodes. Some embodiments include a memory cell having first and second transistors vertically displaced relative to one another, and a capacitor between the first and second transistors. The capacitor has a first node electrically coupled with a source/drain region of the first transistor, a second node electrically coupled with a source/drain region of the second transistor, and capacitor dielectric material between the first and second nodes.
    Type: Grant
    Filed: July 31, 2017
    Date of Patent: December 18, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Gloria Yang, Suraj J. Mathew, Raghunath Singanamalla, Vinay Nair, Scott J. Derner, Michael Amiel Shore, Brent Keeth, Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Publication number: 20180331107
    Abstract: Some embodiments include a memory cell having a first transistor supported by a semiconductor base, and having second and third transistors above the first transistor and vertically stacked one atop the other. Some embodiments include a memory cell having first, second and third transistors. The third transistor is above the second transistor, and the second and third transistors are above the first transistor. The first transistor has first and second source/drain regions, the second transistor has third and fourth source/drain regions, and the third transistor has fifth and sixth source/drain regions. A read bitline is coupled with the sixth source/drain region. A write bitline is coupled with the first source/drain region. A write wordline includes a gate of the first transistor. A read wordline includes a gate of the third transistor. A capacitor is coupled with the second source/drain region and with a gate of the second transistor.
    Type: Application
    Filed: July 12, 2018
    Publication date: November 15, 2018
    Applicant: Micron Technology, Inc.
    Inventors: Suraj J. Mathew, Kris K. Brown, Raghunath Singanamalla, Vinay Nair, Fawad Ahmed, Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Publication number: 20180301454
    Abstract: Some embodiments include a memory cell having first, second and third transistors, with the second and third transistors being vertically displaced relative to one another. The memory cell has a semiconductor pillar extending along the second and third transistors, with the semiconductor pillar containing channel regions and source/drain regions of the second and third transistors. A capacitor may be electrically coupled between a source/drain region of the first transistor and a gate of the second transistor.
    Type: Application
    Filed: June 12, 2018
    Publication date: October 18, 2018
    Applicant: Micron Technology, Inc.
    Inventors: Suraj J. Mathew, Raghunath Singanamalla, Fawad Ahmed, Kris K. Brown, Vinay Nair, Gloria Yang, Fatma Arzum SImsek-Ege, Diem Thy N. Tran
  • Patent number: 10079235
    Abstract: Some embodiments include a memory cell having first, second and third transistors, with the second and third transistors being vertically displaced relative to one another. The memory cell has a semiconductor pillar extending along the second and third transistors, with the semiconductor pillar containing channel regions and source/drain regions of the second and third transistors. A capacitor may be electrically coupled between a source/drain region of the first transistor and a gate of the second transistor.
    Type: Grant
    Filed: July 31, 2017
    Date of Patent: September 18, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Suraj J. Mathew, Raghunath Singanamalla, Fawad Ahmed, Kris K. Brown, Vinay Nair, Gloria Yang, Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Patent number: 10056386
    Abstract: Some embodiments include a memory cell having a first transistor supported by a semiconductor base, and having second and third transistors above the first transistor and vertically stacked one atop the other. Some embodiments include a memory cell having first, second and third transistors. The third transistor is above the second transistor, and the second and third transistors are above the first transistor. The first transistor has first and second source/drain regions, the second transistor has third and fourth source/drain regions, and the third transistor has fifth and sixth source/drain regions. A read bitline is coupled with the sixth source/drain region. A write bitline is coupled with the first source/drain region. A write wordline includes a gate of the first transistor. A read wordline includes a gate of the third transistor. A capacitor is coupled with the second source/drain region and with a gate of the second transistor.
    Type: Grant
    Filed: July 31, 2017
    Date of Patent: August 21, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Suraj J. Mathew, Kris K. Brown, Raghunath Singanamalla, Vinay Nair, Fawad Ahmed, Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Publication number: 20180061837
    Abstract: Some embodiments include a memory cell having a first transistor supported by a semiconductor base, and having second and third transistors above the first transistor and vertically stacked one atop the other. Some embodiments include a memory cell having first, second and third transistors. The third transistor is above the second transistor, and the second and third transistors are above the first transistor. The first transistor has first and second source/drain regions, the second transistor has third and fourth source/drain regions, and the third transistor has fifth and sixth source/drain regions. A read bitline is coupled with the sixth source/drain region. A write bitline is coupled with the first source/drain region. A write wordline includes a gate of the first transistor. A read wordline includes a gate of the third transistor. A capacitor is coupled with the second source/drain region and with a gate of the second transistor.
    Type: Application
    Filed: July 31, 2017
    Publication date: March 1, 2018
    Inventors: Suraj J. Mathew, Kris K. Brown, Raghunath Singanamalla, Vinay Nair, Fawad Ahmed, Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Publication number: 20180061836
    Abstract: Some embodiments include a memory cell having first, second and third transistors, with the second and third transistors being vertically displaced relative to one another. The memory cell has a semiconductor pillar extending along the second and third transistors, with the semiconductor pillar containing channel regions and source/drain regions of the second and third transistors. A capacitor may be electrically coupled between a source/drain region of the first transistor and a gate of the second transistor.
    Type: Application
    Filed: July 31, 2017
    Publication date: March 1, 2018
    Inventors: Suraj J. Mathew, Raghunath Singanamalla, Fawad Ahmed, Kris K. Brown, Vinay Nair, Gloria Yang, Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Publication number: 20180061835
    Abstract: Some embodiments include a memory cell having first and second transistors, and a capacitor vertically displaced relative to the first and second transistors. The capacitor has a first node electrically coupled with a source/drain region of the first transistor, a second node electrically coupled with a source/drain region of the second transistor, and capacitor dielectric material between the first and second nodes. Some embodiments include a memory cell having first and second transistors vertically displaced relative to one another, and a capacitor between the first and second transistors. The capacitor has a first node electrically coupled with a source/drain region of the first transistor, a second node electrically coupled with a source/drain region of the second transistor, and capacitor dielectric material between the first and second nodes.
    Type: Application
    Filed: July 31, 2017
    Publication date: March 1, 2018
    Inventors: Gloria Yang, Suraj J. Mathew, Raghunath Singanamalla, Vinay Nair, Scott J. Derner, Michael Amiel Shore, Brent Keeth, Fatma Arzum Simsek-Ege, Diem Thy N. Tran