Patents by Inventor Ragvahasimhan Sreenivasan

Ragvahasimhan Sreenivasan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Bulk finFET with punchthrough stopper region and method of fabrication
    Patent number: 9082853
    Abstract: An improved bulk FinFET with a punchthrough stopper region, and method of fabrication are disclosed. The dopants used to form the punchthrough stopper are supplied from a shallow trench isolation liner. An anneal diffuses the dopants from the shallow trench isolation liner into the bulk substrate and lower portion of the fins, to form the punchthrough stopper region.
    Type: Grant
    Filed: October 31, 2012
    Date of Patent: July 14, 2015
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Ali Khakifirooz, Shom Ponoth, Ragvahasimhan Sreenivasan
  • BULK FINFET WITH PUNCHTHROUGH STOPPER REGION AND METHOD OF FABRICATION
    Publication number: 20140117462
    Abstract: An improved bulk FinFET with a punchthrough stopper region, and method of fabrication are disclosed. The dopants used to form the punchthrough stopper are supplied from a shallow trench isolation liner. An anneal diffuses the dopants from the shallow trench isolation liner into the bulk substrate and lower portion of the fins, to form the punchthrough stopper region.
    Type: Application
    Filed: October 31, 2012
    Publication date: May 1, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kangguo Cheng, Ali Khakifirooz, Shom Ponoth, Ragvahasimhan Sreenivasan