Patents by Inventor Rai Dhindsa

Rai Dhindsa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20060065369
    Abstract: An arrangement in a plasma processing system for selectively providing an RF grounding path between an electrode and ground. The arrangement includes an RF conduction path structure and an annular structure. The annular structure and the RF conduction path structure having two relative positions relative to one another. A first relative position of the two relative positions is characterized by the annular structure electrically coupling with the RF conduction path structure to provide a ground to the RF conduction path structure. A second relative position of the two relative positions is characterized by the annular structure being electrically uncoupled from the RF conduction path.
    Type: Application
    Filed: September 29, 2004
    Publication date: March 30, 2006
    Inventors: Rai Dhindsa, Felix Kozakevich, Eric Lenz, Russell Martin