Patents by Inventor Raijiro Koga

Raijiro Koga has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Conditioning disk for conditioning a polishing pad
    Patent number: 6386963
    Abstract: The present invention generally provides an apparatus and a method for conditioning a polishing pad in a polishing system. In one embodiment, the apparatus includes a conditioning disk having conditioning elements disposed on the bottom surface and away from the center portion of the disk. In another embodiment, the apparatus includes a base plate and a ring-shaped plate in which the conditioning elements are disposed on the ring-shaped plate. In still another embodiment, the apparatus includes a conditioning disk having conditioning elements disposed on the bottom surface and away from the center portion of the disk and having brush bristles disposed on the center portion of the disk.
    Type: Grant
    Filed: October 27, 2000
    Date of Patent: May 14, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Suzuki Kenji, Raijiro Koga
  • Pad conditioner cleaning apparatus
    Patent number: 6358124
    Abstract: A chemical mechanical polishing apparatus includes a pad conditioner having a conditioner head, a cleaning cup for receiving and cleaning the conditioner head of the pad conditioner, and a fluid dispenser for dispensing a cleaning fluid onto the conditioner head.
    Type: Grant
    Filed: December 29, 1998
    Date of Patent: March 19, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Raijiro Koga, Hiromi Tsuruta, Takashi Kumagai, Gee Hoey, Brian J. Brown, Boris Fishkin, Fred C. Redeker, Bruce Lu, Rex Lu, K. Y. Wang, Roland Shu
  • Pad conditioner cleaning apparatus
    Patent number: 6217430
    Abstract: A cleaning cup for holding and cleaning a pad conditioner having a conditioner head, the cleaning cup includes a spray nozzle for spraying a cleaning solution on a top side of the conditioner head. The cleaning cup further includes a plurality of support pins extending upwards from a base of the cleaning cup to receive the conditioner head thereon.
    Type: Grant
    Filed: November 2, 1998
    Date of Patent: April 17, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Raijiro Koga, Hiromi Tsuruta, Takashi Kumagai, Gee Hoey, Brian J. Brown, Boris Fishkin, Fred C. Redeker