Patents by Inventor Raik Hartlep

Raik Hartlep has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for cleaning and drying of wafers
    Publication number: 20070138600
    Abstract: A wafer processing device is disclosed that includes a processing chamber, which is surrounded by a housing, an arrangement of inlet openings within the processing chamber, which are provided to dispense a liquid, and a rotatable holding device for wafers. Whereby the wafers are disposed in a wafer carrier, which is fixed to the holding device, in which a coating of a fluoropolymer, preferably PTFE, is provided on all parts of the wafer processing device coming into contact with liquid.
    Type: Application
    Filed: December 14, 2006
    Publication date: June 21, 2007
    Inventor: Raik Hartlep