Patents by Inventor Raimund Foerg

Raimund Foerg has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10571681
    Abstract: Embodiments relate to microelectromechanical systems (MEMS) and more particularly to membrane structures comprising pixels for use in, e.g., display devices. In embodiments, a membrane structure comprises a monocrystalline silicon membrane above a cavity formed over a silicon substrate. The membrane structure can comprise a light interference structure that, depending upon a variable distance between the membrane and the substrate, transmits or reflects different wavelengths of light. Related devices, systems and methods are also disclosed.
    Type: Grant
    Filed: August 22, 2017
    Date of Patent: February 25, 2020
    Assignee: Infineon Technologies AG
    Inventors: Roland Meier, Klemens Pruegl, Bernhard Winkler, Thomas Popp, Raimund Foerg
  • Publication number: 20170371148
    Abstract: Embodiments relate to microelectromechanical systems (MEMS) and more particularly to membrane structures comprising pixels for use in, e.g., display devices. In embodiments, a membrane structure comprises a monocrystalline silicon membrane above a cavity formed over a silicon substrate. The membrane structure can comprise a light interference structure that, depending upon a variable distance between the membrane and the substrate, transmits or reflects different wavelengths of light. Related devices, systems and methods are also disclosed.
    Type: Application
    Filed: August 22, 2017
    Publication date: December 28, 2017
    Inventors: Roland Meier, Klemens Pruegl, Bernhard Winkler, Thomas Popp, Raimund Foerg
  • Patent number: 9798132
    Abstract: Embodiments relate to microelectromechanical systems (MEMS) and more particularly to membrane structures comprising pixels for use in, e.g., display devices. In embodiments, a membrane structure comprises a monocrystalline silicon membrane above a cavity formed over a silicon substrate. The membrane structure can comprise a light interference structure that, depending upon a variable distance between the membrane and the substrate, transmits or reflects different wavelengths of light. Related devices, systems and methods are also disclosed.
    Type: Grant
    Filed: May 27, 2015
    Date of Patent: October 24, 2017
    Assignee: Infineon Technologies AG
    Inventors: Roland Meier, Klemens Pruegl, Bernhard Winkler, Thomas Popp, Raimund Foerg
  • Patent number: 9576844
    Abstract: A composite wafer is manufactured by providing a carrier wafer including graphite and a protective layer, forming a bonding layer, and bonding the carrier wafer to a semiconductor wafer through the bonding layer.
    Type: Grant
    Filed: December 8, 2015
    Date of Patent: February 21, 2017
    Assignee: Infineon Technologies AG
    Inventors: Rudolf Berger, Hermann Gruber, Wolfgang Lehnert, Guenther Ruhl, Raimund Foerg, Anton Mauder, Hans-Joachim Schulze, Karsten Kellermann, Michael Sommer, Christian Rottmair, Roland Rupp
  • Patent number: 9496237
    Abstract: A semiconductor device includes a semiconductor chip and a plurality of electrical contact pads disposed on a main face of the semiconductor chip, wherein the electrical contact pads each include a layer stack, each layer stack having one and the same order of layers, and wherein the electrical contact pads are both solderable and bondable.
    Type: Grant
    Filed: May 19, 2015
    Date of Patent: November 15, 2016
    Assignee: Infineon Technologies AG
    Inventors: Gottfried Beer, Raimund Foerg, Juergen Hoegerl
  • Patent number: 9355984
    Abstract: An embodiment method for fabricating electronic devices having two components connected by a metal layer includes applying a metal layer to each component and connecting the metal layers such that a single metal layer is formed.
    Type: Grant
    Filed: July 18, 2013
    Date of Patent: May 31, 2016
    Assignee: Infineon Technologies AG
    Inventors: Irmgard Escher-Poeppel, Eduard Knauer, Thomas Kunstmann, Peter Scherl, Raimund Foerg
  • Patent number: 9337275
    Abstract: An electrical or electronic device is disclosed. In some embodiments, an electrical device includes a single-layer graphene part extending in a lateral direction and a multi-layer graphene structure laterally contacting the single-layer graphene part. The electrical or electronic device further includes a graphite part in contact with a surface of the multi-layer graphene structure. In other embodiments, an electrical device includes a graphene part extending in a lateral direction and a graphite part is configured to provide a lateral contact for the graphene part.
    Type: Grant
    Filed: January 28, 2014
    Date of Patent: May 10, 2016
    Assignee: Infineon Technologies AG
    Inventors: Guenther Ruhl, Raimund Foerg
  • Patent number: 9318358
    Abstract: An etching device is provided, the etching device including a process chamber including an etchant, a structure configured to provide a laminar flow of the etchant, and a workpiece handler configured to move a workpiece through the laminar flow of the etchant along a predefined track.
    Type: Grant
    Filed: April 28, 2011
    Date of Patent: April 19, 2016
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Thomas Fischer, Raimund Foerg, Sebastian Bernrieder, Michael Larisch
  • Publication number: 20160086844
    Abstract: A composite wafer is manufactured by providing a carrier wafer including graphite and a protective layer, forming a bonding layer, and bonding the carrier wafer to a semiconductor wafer through the bonding layer.
    Type: Application
    Filed: December 8, 2015
    Publication date: March 24, 2016
    Inventors: Rudolf Berger, Hermann Gruber, Wolfgang Lehnert, Guenther Ruhl, Raimund Foerg, Anton Mauder, Hans-Joachim Schulze, Karsten Kellermann, Michael Sommer, Christian Rottmair, Roland Rupp
  • Patent number: 9252045
    Abstract: A composite wafer including a carrier substrate having a graphite core and a monocrystalline semiconductor substrate or layer attached to the carrier substrate and a corresponding method for manufacturing such a composite wafer is provided.
    Type: Grant
    Filed: February 26, 2013
    Date of Patent: February 2, 2016
    Assignee: Infineon Technologies AG
    Inventors: Rudolf Berger, Hermann Gruber, Wolfgang Lehnert, Guenther Ruhl, Raimund Foerg, Anton Mauder, Hans-Joachim Schulze
  • Patent number: 9224633
    Abstract: According to an embodiment, a composite wafer includes a carrier substrate having a graphite layer and a monocrystalline semiconductor layer attached to the carrier substrate.
    Type: Grant
    Filed: July 24, 2014
    Date of Patent: December 29, 2015
    Assignee: Infineon Technologies AG
    Inventors: Rudolf Berger, Hermann Gruber, Wolfgang Lehnert, Guenther Ruhl, Raimund Foerg, Anton Mauder, Hans-Joachim Schulze, Karsten Kellermann, Michael Sommer, Christian Rottmair, Roland Rupp
  • Publication number: 20150362722
    Abstract: Embodiments relate to microelectromechanical systems (MEMS) and more particularly to membrane structures comprising pixels for use in, e.g., display devices. In embodiments, a membrane structure comprises a monocrystalline silicon membrane above a cavity formed over a silicon substrate. The membrane structure can comprise a light interference structure that, depending upon a variable distance between the membrane and the substrate, transmits or reflects different wavelengths of light. Related devices, systems and methods are also disclosed.
    Type: Application
    Filed: May 27, 2015
    Publication date: December 17, 2015
    Inventors: Roland Meier, Klemens Pruegl, Bernhard Winkler, Thomas Popp, Raimund Foerg
  • Publication number: 20150333023
    Abstract: A semiconductor device includes a semiconductor chip and a plurality of electrical contact pads disposed on a main face of the semiconductor chip, wherein the electrical contact pads each include a layer stack, each layer stack having one and the same order of layers, and wherein the electrical contact pads are both solderable and bondable.
    Type: Application
    Filed: May 19, 2015
    Publication date: November 19, 2015
    Inventors: Gottfried Beer, Raimund Foerg, Juergen Hoegerl
  • Publication number: 20150279941
    Abstract: A composite wafer including a carrier substrate having a graphite core and a monocrystalline semiconductor substrate or layer attached to the carrier substrate and a corresponding method for manufacturing such a composite wafer is provided.
    Type: Application
    Filed: May 22, 2015
    Publication date: October 1, 2015
    Inventors: Rudolf Berger, Hermann Gruber, Wolfgang Lehnert, Guenther Ruhl, Raimund Foerg, Anton Mauder, Hans-Joachim Schulze
  • Publication number: 20150214303
    Abstract: An electrical or electronic device is disclosed. In some embodiments, an electrical device includes a single-layer graphene part extending in a lateral direction and a multi-layer graphene structure laterally contacting the single-layer graphene part. The electrical or electronic device further includes a graphite part in contact with a surface of the multi-layer graphene structure. In other embodiments, an electrical device includes a graphene part extending in a lateral direction and a graphite part is configured to provide a lateral contact for the graphene part.
    Type: Application
    Filed: January 28, 2014
    Publication date: July 30, 2015
    Inventors: Guenther Ruhl, Raimund Foerg
  • Publication number: 20150021792
    Abstract: An embodiment method for fabricating electronic devices having two components connected by a metal layer includes applying a metal layer to each component and connecting the metal layers such that a single metal layer is formed.
    Type: Application
    Filed: July 18, 2013
    Publication date: January 22, 2015
    Inventors: Irmgard Escher-Poeppel, Eduard KNAUER, Thomas KUNSTMANN, Peter SCHERL, Raimund FOERG
  • Publication number: 20140335676
    Abstract: According to an embodiment, a composite wafer includes a carrier substrate having a graphite layer and a monocrystalline semiconductor layer attached to the carrier substrate.
    Type: Application
    Filed: July 24, 2014
    Publication date: November 13, 2014
    Inventors: Rudolf Berger, Hermann Gruber, Wolfgang Lehnert, Guenther Ruhl, Raimund Foerg, Anton Mauder, Hans-Joachim Schulze, Karsten Kellermann, Michael Sommer, Christian Rottmair, Roland Rupp
  • Patent number: 8822306
    Abstract: According to an embodiment, a composite wafer includes a carrier substrate having a graphite layer and a monocrystalline semiconductor layer attached to the carrier substrate.
    Type: Grant
    Filed: August 9, 2011
    Date of Patent: September 2, 2014
    Assignee: Infineon Technologies AG
    Inventors: Rudolf Berger, Hermann Gruber, Wolfgang Lehnert, Guenther Ruhl, Raimund Foerg, Anton Mauder, Hans-Joachim Schulze, Karsten Kellermann, Michael Sommer, Christian Rottmair, Roland Rupp
  • Publication number: 20140070232
    Abstract: A composite wafer including a carrier substrate having a graphite core and a monocrystalline semiconductor substrate or layer attached to the carrier substrate and a corresponding method for manufacturing such a composite wafer is provided.
    Type: Application
    Filed: February 26, 2013
    Publication date: March 13, 2014
    Inventors: Rudolf Berger, Hermann Gruber, Wolfgang Lehnert, Guenther Ruhl, Raimund Foerg, Anton Mauder, Hans-Joachim Schulze
  • Patent number: 8404562
    Abstract: According to an embodiment, a composite wafer includes a carrier substrate having a graphite core and a monocrystalline semiconductor layer attached to the carrier substrate.
    Type: Grant
    Filed: September 30, 2010
    Date of Patent: March 26, 2013
    Assignee: Infineon Technologies AG
    Inventors: Rudolf Berger, Hermann Gruber, Wolfgang Lehnert, Guenther Ruhl, Raimund Foerg, Anton Mauder, Hans-Joachim Schulze