Abstract: A particle microscope includes a particle beam system directing a particle beam onto a sample. The particle beam system includes a magnetic lens energized by an adjustable lens current. The sample is positioned at an adjustable distance from the lens, and particles of the beam have an adjustable kinetic energy. A method of operating such microscope includes positioning a sample at a distance from the lens, adjusting the kinetic energy, changing the lens current at plural different lens current change rates, determining a lens current at focus for each of the plural different lens current change rates, and determining an optimized lens current based on the determined lens currents at focus and the lens current change rates.

Abstract: A side shield arrangement for an openable roof system of an automotive vehicle, comprising a shield blade which is mounted to be pivotable between a lowered rest position and a deployed functional position, which has two bearing points spaced from each other in the longitudinal direction of the shield blade, and which has force applied by a spring device towards the direction of the deployed functional position, is known. According to the invention, a front bearing point is disposed on the face end of the shield blade, and a rear bearing point is provided with the spring device.

Abstract: A sliding roof system is shown having a pair of guide rails, a slide in each guide rail, the slide being displaceably mounted therein, a functional component which is displaceably received in the guide rail and can be fixed in a raised position by means of a latching hook, the latching hook being shiftable between a release position and a latching position, the latching hook when in the latching position engaging in an opening of the guide rail, and a cover which can be opened from a closed position by displacement of the slide, a retaining lever being provided which can mechanically hold the latching hook in the latching position, wherein the retaining lever is adapted to be pivoted about a pivot pin between the release position and the retaining position.

Abstract: A method includes capturing a first image of the sample via a detector, wherein the particles of the primary particle beam have a first average energy so that the interaction products detected by the detector predominantly contain sample information from a sample layer lying below the sample surface. The method also includes removing the outermost sample layer with the aid of the cutting device, and capturing a second image of the sample via the detector, wherein the particles of the primary particle beam have a second average energy so that the interaction products detected by the detector predominantly contain sample information from the surface layer of the sample. The method further includes calculating the lateral shift/lateral offset of the sample from a comparison of the first and second images, and compensating for the lateral offset.

Abstract: A sliding roof system is shown having a pair of guide rails, a slide in each guide rail, the slide being displaceably mounted therein, a functional component which is displaceably received in the guide rail and can be fixed in a raised position by means of a latching hook, the latching hook being shiftable between a release position and a latching position, the latching hook when in the latching position engaging in an opening of the guide rail, and a cover which can be opened from a closed position by displacement of the slide, a retaining lever being provided which can mechanically hold the latching hook in the latching position, wherein the retaining lever is adapted to be pivoted about a pivot pin between the release position and the retaining position.

Abstract: A sliding roof system is shown having a pair of guide rails, a slide in each guide rail, the slide being displaceably mounted therein, a functional component which is displaceably received in the guide rail and can be fixed in a raised position by means of a latching hook, the latching hook being shiftable between a release position and a latching position, the latching hook when in the latching position engaging in an opening of the guide rail, and a cover which can be opened from a closed position by displacement of the slide, a retaining lever being provided which can mechanically hold the latching hook in the latching position, wherein the retaining lever is adapted to be pivoted about a pivot pin between the release position and the retaining position.

Abstract: A sliding roof system is shown having a pair of guide rails, a slide in each guide rail, the slide being displaceably mounted therein, a functional component which is displaceably received in the guide rail and can be fixed in a raised position by means of a latching hook, the latching hook being shiftable between a release position and a latching position, the latching hook when in the latching position engaging in an opening of the guide rail, and a cover which can be opened from a closed position by displacement of the slide, a retaining lever being provided which can mechanically hold the latching hook in the latching position, wherein the retaining lever is adapted to be pivoted about a pivot pin between the release position and the retaining position.

Abstract: A roller blind system for a sliding roof with at least one guide rail and with a roller blind with a roller blind fabric mounted on at least one guiding strip is provided, The guiding strip is sectionally guided in the guide rail and its end that is located outside the guide rail contracts to form a coil during a movement of the roller blind in opening direction, wherein at least one device for increasing the opening force of the roller blind is provided, which is designed and arranged such that the device produces an additional force at least in opening direction.

Abstract: A method includes capturing a first image of the sample via a detector, wherein the particles of the primary particle beam have a first average energy so that the interaction products detected by the detector predominantly contain sample information from a sample layer lying below the sample surface. The method also includes removing the outermost sample layer with the aid of the cutting device, and capturing a second image of the sample via the detector, wherein the particles of the primary particle beam have a second average energy so that the interaction products detected by the detector predominantly contain sample information from the surface layer of the sample. The method further includes calculating the lateral shift/lateral offset of the sample from a comparison of the first and second images, and compensating for the lateral offset.

Abstract: A sliding roof system is shown having a pair of guide rails, a slide in each guide rail, the slide being displaceably mounted therein, a functional component which is displaceably received in the guide rail and can be fixed in a raised position by means of a latching hook, the latching hook being shiftable between a release position and a latching position, the latching hook when in the latching position engaging in an opening of the guide rail, and a cover which can be opened from a closed position by displacement of the slide, a retaining member being provided which can mechanically hold the latching hook in the latching position, wherein the retaining lever is adapted to be pivoted about a pivot pin between the release position and the retaining position.

Abstract: A method for producing a representation of an object using a particle beam, as well as a particle beam device for carrying out the method are disclosed. The system described herein is based on the object of specifying the method and the particle beam device for producing a representation of an object such that images which are produced, in particular including FFT images, are as free as possible of artifacts which are not caused by the object to be examined. This is achieved in particular in that pixel lives, line flyback times and pixel pause times are varied in raster patterns.

Abstract: A method for producing a representation of an object using a particle beam, as well as a particle beam device for carrying out the method are disclosed. The system described herein is based on the object of specifying the method and the particle beam device for producing a representation of an object such that images which are produced, in particular including FFT images, are as free as possible of artifacts which are not caused by the object to be examined. This is achieved in particular in that pixel lives, line flyback times and pixel pause times are varied in raster patterns.

Abstract: An inspection method comprises focusing a particle beam onto a sample; operating at least one detector located close to the sample; assigning detection signals generated by the at least one detector to different intensity intervals; determining, based on the detection signals assigned to the intensity intervals, at least one first signal component related to electrons incident on the detector; and determining, based on the detection signals assigned to the intensity intervals, at least one second signal component related to X-rays incident on the detector.

Abstract: A particle beam system comprises a particle beam source 5 for generating a primary particle beam 13, an objective lens 19 for focusing the primary particle beam 13 in an object plane 23; a particle detector 17; and an X-ray detector 47 arranged between the objective lens and the object plane. The X-ray detector comprises plural semiconductor detectors, each having a detection surface 51 oriented towards the object plane. A membrane is disposed between the object plane and the detection surface of the semiconductor detector, wherein different semiconductor detectors have different membranes located in front, the different membranes differing with respect to a secondary electron transmittance.

Abstract: A particle beam system comprises a particle beam source 5 for generating a primary particle beam 13, an objective lens 19 for focusing the primary particle beam 13 in an object plane 23; a particle detector 17; and an X-ray detector 47 arranged between the objective lens and the object plane. The X-ray detector comprises plural semiconductor detectors, each having a detection surface 51 oriented towards the object plane. A membrane is disposed between the object plane and the detection surface of the semiconductor detector, wherein different semiconductor detectors have different membranes located in front, the different membranes differing with respect to a secondary electron transmittance.

Abstract: A particle beam system comprises a particle beam source 5 for generating a primary particle beam 13, an objective lens 19 for focusing the primary particle beam 13 in an object plane 23; a particle detector 17; and an X-ray detector 47 arranged between the objective lens and the object plane. The X-ray detector comprises plural semiconductor detectors, each having a detection surface 51 oriented towards the object plane. A membrane is disposed between the object plane and the detection surface of the semiconductor detector, wherein different semiconductor detectors have different membranes located in front, the different membranes differing with respect to a secondary electron transmittance.

Abstract: A particle beam system comprises a particle beam source 5 for generating a primary particle beam 13, an objective lens 19 for focusing the primary particle beam 13 in an object plane 23; a particle detector 17; and an X-ray detector 47 arranged between the objective lens and the object plane. The X-ray detector comprises plural semiconductor detectors, each having a detection surface 51 oriented towards the object plane. A membrane is disposed between the object plane and the detection surface of the semiconductor detector, wherein different semiconductor detectors have different membranes located in front, the different membranes differing with respect to a secondary electron transmittance.

Abstract: A method for producing a representation of an object using a particle beam, as well as a particle beam device for carrying out the method are disclosed. The system described herein is based on the object of specifying the method and the particle beam device for producing a representation of an object such that images which are produced, in particular including FFT images, are as free as possible of artifacts which are not caused by the object to be examined. This is achieved in particular in that pixel lives, line flyback times and pixel pause times are varied in raster patterns.

Abstract: An inspection method comprises focusing a particle beam onto a sample; operating at least one detector located close to the sample; assigning detection signals generated by the at least one detector to different intensity intervals; determining, based on the detection signals assigned to the intensity intervals, at least one first signal component related to electrons incident on the detector; and determining, based on the detection signals assigned to the intensity intervals, at least one second signal component related to X-rays incident on the detector.

Abstract: A particle beam system comprises a particle beam source 5 for generating a primary particle beam 13, an objective lens 19 for focusing the primary particle beam 13 in an object plane 23; a particle detector 17; and an X-ray detector 47 arranged between the objective lens and the object plane. The X-ray detector comprises plural semiconductor detectors, each having a detection surface 51 oriented towards the object plane. A membrane is disposed between the object plane and the detection surface of the semiconductor detector, wherein different semiconductor detectors have different membranes located in front, the different membranes differing with respect to a secondary electron transmittance.