Patents by Inventor Rainer Fettig

Rainer Fettig has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for examining a beam of charged particles
    Patent number: 11961705
    Abstract: The present invention relates to a method for examining a beam of charged particles, including the following steps: producing persistent interactions of the beam with a sample at a plurality of positions of the sample relative to the beam and deriving at least one property of the beam by analyzing the spatial distribution of the persistent interactions at the plurality of positions.
    Type: Grant
    Filed: December 22, 2020
    Date of Patent: April 16, 2024
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Daniel Rhinow, Markus Bauer, Rainer Fettig, David Lämmle, Marion Batz, Katharina Gries, Sebastian Vollmar, Petra Spies, Ottmar Hoinkis
  • METHOD AND APPARATUS FOR EXAMINING A BEAM OF CHARGED PARTICLES
    Publication number: 20210110996
    Abstract: The present invention relates to a method for examining a beam of charged particles, including the following steps: producing persistent interactions of the beam with a sample at a plurality of positions of the sample relative to the beam and deriving at least one property of the beam by analyzing the spatial distribution of the persistent interactions at the plurality of positions.
    Type: Application
    Filed: December 22, 2020
    Publication date: April 15, 2021
    Inventors: Daniel Rhinow, Markus Bauer, Rainer Fettig, David Lämmle, Marion Batz, Katharina Gries, Sebastian Vollmar, Petra Spies, Ottmar Hoinkis
  • Method and apparatus for avoiding damage when analysing a sample surface with a scanning probe microscope
    Patent number: 9995764
    Abstract: The present application relates to a method for avoiding damage when analyzing a sample surface with a scanning probe microscope, the method comprising the step of: detecting an electrostatic interaction between a charging of the sample surface and a measuring tip of the scanning probe microscope in the course of the approach of the measuring tip to the sample surface already at a distance from the sample surface which is greater than the distance of the measuring tip when analyzing the sample surface.
    Type: Grant
    Filed: March 10, 2017
    Date of Patent: June 12, 2018
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Hans Hermann Pieper, Christof Baur, Rainer Fettig
  • METHOD AND APPARATUS FOR AVOIDING DAMAGE WHEN ANALYSING A SAMPLE SURFACE WITH A SCANNING PROBE MICROSCOPE
    Publication number: 20170261532
    Abstract: The present application relates to a method for avoiding damage when analyzing a sample surface with a scanning probe microscope, the method comprising the step of: detecting an electrostatic interaction between a charging of the sample surface and a measuring tip of the scanning probe microscope in the course of the approach of the measuring tip to the sample surface already at a distance from the sample surface which is greater than the distance of the measuring tip when analyzing the sample surface.
    Type: Application
    Filed: March 10, 2017
    Publication date: September 14, 2017
    Inventors: Hans Hermann Pieper, Christof Baur, Rainer Fettig