Patents by Inventor Rainer-Helmut Lebert

Rainer-Helmut Lebert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and device for producing extreme ultraviolet radiation or soft X-ray radiation
    Patent number: 7619232
    Abstract: A device for generating extreme ultraviolet (EUV) or soft X-ray radiation comprising: a laser source for producing a laser radiation which is focused to intensities beyond 106 W/cm2 onto a target to produce a plasma; and said electrodes located around the path of the plasma produced by the laser source; and said electrodes being combined with components for producing a rapid electric discharge in the plasma with a characteristic time constant which is less than the time constant of the laser produced plasma expansion time.
    Type: Grant
    Filed: June 27, 2003
    Date of Patent: November 17, 2009
    Assignees: XTREME Technologies GmbH, Commissariat a l'Energie Atomique, AIXUV GmbH
    Inventors: Martin Schmidt, Rainer-Helmut Lebert, Uwe Stamm
  • Method and Device for Producing Extreme Ultraviolet Radiation or Soft X-Ray Radiation
    Publication number: 20080116400
    Abstract: A device for generating extreme ultraviolet (EUV) or soft X-ray radiation comprising: a laser source for producing a laser radiation which is focused to intensities beyond 106 W/cm2 onto a target to produce a plasma; and said electrodes located around the path of the plasma produced by the laser source; and said electrodes being combined with components for producing a rapid electric discharge in the plasma with a characteristic time constant which is less than the time constant of the laser produced plasma expansion time.
    Type: Application
    Filed: June 27, 2003
    Publication date: May 22, 2008
    Inventors: Martin Schmidt, Rainer-Helmut Lebert, Uwe Stamm