Abstract: In a separating wall, which separates a vacuum region from a region under atmospheric pressure, pins are provided as a current lead-through. The pins are cast in, for example, glass. A plug-in contact is arranged on a separate carrier plate in order to prevent force or stresses, which can occur in particular because of tolerances, from being introduced into the glass. The carrier plate is connected to the control device by a flexible cable.

Abstract: A rolling-element bearing for bearing rotating components in vacuum devices includes a plurality of rolling elements (10) arranged between bearing elements (12, 14). A bearing compartment (26) is for example closed by sealing elements (22, 24) on both sides. The sealing elements (22, 24) have a minor sealing gap(s). The rolling-elements bearing is used in vacuum sections in which a pressure of less than 10?3 mbar prevails.

Abstract: A vacuum pump, particularly a turbomolecular pump or multi-inlet pump, comprises a rotor shaft (12) carrying at least one rotor means (14). The rotor shaft (12) is supported on the pressure side by a bearing assembly (56) and on the suction-side by a further bearing assembly (30). According to the invention, the suction-side bearing assembly (30) comprises an electromagnetic bearing (32,34). Further according to the invention, the pressure-side bearing assembly (56) comprises a ball bearing (58) so that the rotor shaft (12) can be given the largest possible length. The rolling bearing (58) is preferably biased by the electromagnetic bearing (32,34).

Abstract: A pump bearing arrangement, suitable particularly for rapidly rotating pumps such as turbomolecular pumps, comprises a pump rotor (10) con-nected to a rotor shaft. The rotor shaft (14) is supported in a shaft housing (20) by two bearing arrangements (12). Each bearing arrangement (12) has an inner bearing ring (16) connected to the rotor shaft (14) and an outer bearing ring (22) connected to the shaft housing (20). Bearing supports (24) are disposed between the two bearing rings. At least one vibration element (26) is provided between the outer bearing ring (22) and the shaft housing (20), serving for damping and further having a thermal conductivity of at least 0.3 W/mK for dissipating heat.

Abstract: A turbomolecular pump (10) includes a rotor (18) which is mounted on a housing (12) by at least one roller bearing (16). The roller bearing (16) comprises a non-rotating bearing shell (20) and a rotating bearing shell (22). The non-rotating bearing shell (20) is mounted on the housing (12) by an elastic vibration ring (14). The vibration ring (14) is of an anisotropic form, such that the spring stiffness is inhomogeneous over the circumference.