Abstract: A vacuum pump comprises stator elements in a pump housing. The stator elements cooperate with rotor elements. The rotor elements are held by a rotor shaft, wherein the rotor shaft is mounted in the pump housing via bearing elements. The bearing element is surrounded by a supporting element, wherein the supporting element comprises an inner portion, an outer portion and a plurality of spring arms connecting the inner portion (28) to the outer portion. Each spring arm comprises at least one hollow space.

Abstract: A vacuum pump comprises stator elements in a pump housing. The stator elements cooperate with rotor elements. The rotor elements are held by a rotor shaft, wherein the rotor shaft is mounted in the pump housing via bearing elements. The bearing element is surrounded by a supporting element, wherein the supporting element comprises an inner portion, an outer portion and a plurality of spring arms connecting the inner portion (28) to the outer portion. Each spring arm comprises at least one hollow space.

Abstract: A vacuum-pump rotor, in particular a vacuum-pump rotor for a turbomolecular pump, having a hub element for connecting to a rotor shaft or for forming a rotor shaft. A plurality of rotor blades are connected to the hub element. In order to form a vacuum-pump rotor by means of which a high tip speed can be achieved, the hub element and/or the rotor blades are produced of a plurality of material layers.

Abstract: A vacuum pump comprises a rotor shaft, which bears one or more rotor elements. The rotor shaft is driven by an electrical driver. A stator is arranged between the rotor elements. The rotor shaft is supported by bearings. The highly heat-generating components such as the driver and the stator are connected to a second housing part in particular by means of a support member. Heat-sensitive components such as the bearing are supported by means of a separate first housing part. The two housing parts can be kept at different temperatures, for example by means of separate cooling devices. Thus, the operating temperature of the in particular pressure-side bearing can be reduced, and therefore the service life can be extended.

Abstract: A vacuum-pump rotor, in particular a vacuum-pump rotor for a turbomolecular pump, having a hub element for connecting to a rotor shaft or for forming a rotor shaft. A plurality of rotor blades are connected to the hub element. In order to form a vacuum-pump rotor by means of which a high tip speed can be achieved, the hub element and/or the rotor blades are produced of a plurality of material layers.

Abstract: In a separating wall, which separates a vacuum region from a region under atmospheric pressure, pins are provided as a current lead-through. The pins are cast in, for example, glass. A plug-in contact is arranged on a separate carrier plate in order to prevent force or stresses, which can occur in particular because of tolerances, from being introduced into the glass. The carrier plate is connected to the control device by a flexible cable.

Abstract: A vacuum pump comprises a rotor shaft, which bears one or more rotor elements. The rotor shaft is driven by an electrical driver. A stator is arranged between the rotor elements. The rotor shaft is supported by bearings. The highly heat-generating components such as the driver and the stator are connected to a second housing part in particular by means of a support member. Heat-sensitive components such as the bearing are supported by means of a separate first housing part. The two housing parts can be kept at different temperatures, for example by means of separate cooling devices. Thus, the operating temperature of the in particular pressure-side bearing can be reduced, and therefore the service life can be extended.

Abstract: A rolling-element bearing for bearing rotating components in vacuum devices includes a plurality of rolling elements (10) arranged between bearing elements (12, 14). A bearing compartment (26) is for example closed by sealing elements (22, 24) on both sides. The sealing elements (22, 24) have a minor sealing gap(s). The rolling-elements bearing is used in vacuum sections in which a pressure of less than 10?3 mbar prevails.

Abstract: A vacuum pump, particularly a turbomolecular pump or multi-inlet pump, comprises a rotor shaft (12) carrying at least one rotor means (14). The rotor shaft (12) is supported on the pressure side by a bearing assembly (56) and on the suction-side by a further bearing assembly (30). According to the invention, the suction-side bearing assembly (30) comprises an electromagnetic bearing (32,34). Further according to the invention, the pressure-side bearing assembly (56) comprises a ball bearing (58) so that the rotor shaft (12) can be given the largest possible length. The rolling bearing (58) is preferably biased by the electromagnetic bearing (32,34).

Abstract: A pump bearing arrangement, suitable particularly for rapidly rotating pumps such as turbomolecular pumps, comprises a pump rotor (10) con-nected to a rotor shaft. The rotor shaft (14) is supported in a shaft housing (20) by two bearing arrangements (12). Each bearing arrangement (12) has an inner bearing ring (16) connected to the rotor shaft (14) and an outer bearing ring (22) connected to the shaft housing (20). Bearing supports (24) are disposed between the two bearing rings. At least one vibration element (26) is provided between the outer bearing ring (22) and the shaft housing (20), serving for damping and further having a thermal conductivity of at least 0.3 W/mK for dissipating heat.

Abstract: A turbomolecular pump (10) includes a rotor (18) which is mounted on a housing (12) by at least one roller bearing (16). The roller bearing (16) comprises a non-rotating bearing shell (20) and a rotating bearing shell (22). The non-rotating bearing shell (20) is mounted on the housing (12) by an elastic vibration ring (14). The vibration ring (14) is of an anisotropic form, such that the spring stiffness is inhomogeneous over the circumference.

Abstract: The invention relates to rotors or stators of a turbomolecular pump with rotor blades made of a specific aluminum alloy.

Abstract: A vacuum pump (10) includes a pump unit (14) and an operating unit (12) arranged spaced from the pump unit (14). The operating unit (12) is connected with the pump unit (14) for controlling it. The pump unit (14) and the operating unit (12) respectively comprise a transceiver module (20,22) for transmitting and receiving control and operational data bidirectionally in a wireless manner. The pump unit (14) and the operating unit (12) are exclusively connected with each other in a wireless manner. By the omission of electrical lines, the induction of interfering signals is excluded. Wall perforations for lead-through of electrical lines are omitted.

Abstract: A test-gas leak detector (1) includes a connection (27) for a device under test, a sniffer, or a leak detector chamber, a high-vacuum pump (2), a test-gas detector (5) that is connected on the intake side of said pumps, and a test-gas conduit (28) leading from the connection of the leak detector (27). The conduit is connected to at least one intermediate stage of the high-vacuum pump (2) in addition to the pre-vacuum zone of the high-vacuum pump (2) via conduit sections (31, 32, 35) and valves (33, 34, 36). A housing (9), in which at least some of the conduits and valves and the high-vacuum pump (2) are integrated, forms part of the leak detector (1) and a detachable slide-in module (51) forms part of the high-vacuum pump. The slide-in module has an external jacket construction (53) comprising passages (58, 61) and when the leak detector (1) is operational, is situated in a receiving opening (52) that is provided in the housing (9).

Abstract: A vacuum pump (1, 30) has an inlet (5) and an outlet (6). Plug-in screw fittings (9) are connected with the inlet and the outlet. The plug-in screw fittings include a bore with an internal bevel (22) that receives a flexible connecting line (23), a chuck collet (19), and an O-ring (21) frictionally in a vacuum-tight relationship. In this manner, a more simple and versatile connection is provided between the vacuum pump and the connecting lines.

Abstract: A ball bearing (18) that carries a rotor side portion of a rotor shaft (16) includes an inner race (23), an outer race (24), and a plurality of balls (25). The inner race has an enlarged end face (S1) which supports a supporting part (22) of a rotor (13). The enlarged end face has a diameter (D1) which is at least as large as a reference diameter (D3) minus 34% of a diameter of the balls (25). The flexural strength of the rotor shaft is increased at the location of the ball bearing (18). The natural bending frequency also increases and is caused to be above an operating frequency of the rotor shaft. Resonances are also avoided.