Patents by Inventor Rainer Maul

Rainer Maul has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device and method for measuring lithography masks
    Patent number: 8253947
    Abstract: A device for measuring lithography masks is provided, comprising a reticle carrier for the lithography mask to be measured, a measurement objective for reproducing on a detector a section of said lithography mask held by said reticle carrier, a measurement module for measuring the position of said reticle carrier relative to said measurement objective, and a correction module by means of which said reticle carrier can be moved in order to bring it into a predetermined position relative to said measurement objective, wherein said measurement objective and said measurement module are fastened directly to an instrument carrier in a locally fixed manner.
    Type: Grant
    Filed: November 6, 2007
    Date of Patent: August 28, 2012
    Assignee: Carl Zeiss SMS GmbH
    Inventors: Albrecht Hof, Günter Maul, Dietmar Neugebauer, Armin Bich, Monika Frey, Wolfgang Scherm, Stefan Otto, Rainer Maul, Helmut Krause
  • DEVICE AND METHOD FOR MEASURING LITHOGRAPHY MASKS
    Publication number: 20110205549
    Abstract: A device for measuring lithography masks is provided, comprising a reticle carrier for the lithography mask to be measured, a measurement objective for reproducing on a detector a section of said lithography mask held by said reticle carrier, a measurement module for measuring the position of said reticle carrier relative to said measurement objective, and a correction module by means of which said reticle carrier can be moved in order to bring it into a predetermined position relative to said measurement objective, wherein said measurement objective and said measurement module are fastened directly to an instrument carrier in a locally fixed manner.
    Type: Application
    Filed: November 6, 2007
    Publication date: August 25, 2011
    Inventors: Albrecht Hof, Günter Maul, Dietmar Neugebauer, Armin Bich, Monika Frey, Wolfgang Scherm, Stefan Otto, Rainer Maul, Helmut Krause