Abstract: Described is a device as well as a method for beam forming a homogenized light beam, particularly a laser beam, with a unit that homogenizes the light beam at least along a cross-sectional axis of the light beam, a mask following downstream in the beam path of the light beam, said mask having mask regions that block the light beam and those that are transparent, and also an optical imaging unit disposed downstream in the beam path. The invention stands out on account of the fact that an optical module is provided in the beam path between the homogenizing unit and the mask, said module imaging the entire cross section of the homogenized light beam largely without losses onto all transparent mask regions with uniform distribution.

Abstract: An energy stabilization method and system includes an energy detector and simulating optics before the detector for forming a diagnostic portion of an output beam to simulate the beam profile of the working beam incident at the workpiece. Preferably, the simulating optics before the detector are selected to be identical or similar to beam transforming optics that the working beam traverses after the diagnostic portion is split off from the working beam, but before the working beam reaches the workpiece. The diagnostic beam portion is thus formed to have an identical or similar beam profile as the working beam at the workpiece. Alternatively, instead of providing transforming optics along the diagnostic beam path that are the same or similar to those encountered by the working beam, a processor configures the data received at the detector to simulate the beam profile of the working beam at the workpiece, after it traverses the transforming optics described above.

Abstract: A system is provided for delivering a laser beam of wavelength less than 200 nm from a laser, such as an F2 laser or ArF laser, through a sealed enclosure sealably connected to the laser, and preferably to another housing, leading ultimately to a workpiece. The enclosure is preferably evacuated and back-filled with an inert gas to adequately deplete any air, water, hydrocarbons or oxygen within the enclosure. Thereafter or alternatively, an inert gas flow is established and maintained within the enclosure during operation of the laser. The inert gas preferably has high purity, e.g., more than 99.5% and preferably more than 99.999%, wherein the inert is preferably nitrogen or a noble gas. The enclosure is preferably sealed by a window transparent to the sub-200 nm radiation for preventing contaminants generated in the enclosure from entering the housing and contaminating surfaces therein. The enclosure is preferably made of steel and/or copper, and the window is preferably made of CaF2.

Abstract: A system is provided for delivering a laser beam of wavelength less than 200 nm from a laser, such as an F2 laser or ArF laser, through a sealed enclosure sealably connected to the laser, and preferably to another housing, leading ultimately to a workpiece. The enclosure is preferably evacuated and back-filled with an inert gas to adequately deplete any air, water, hydrocarbons or oxygen within the enclosure. Thereafter or alternatively, an inert gas flow is established and maintained within the enclosure during operation of the laser. The inert gas preferably has high purity, e.g., more than 99.5% and preferably more than 99.999%, wherein the inert is preferably nitrogen or a noble gas. The enclosure is preferably sealed by a window transparent to the sub-200 nm radiation for preventing contaminants generated in the enclosure from entering the housing and contaminating surfaces therein. The enclosure is preferably made of steel and/or copper, and the window is preferably made of CaF2.

Abstract: A system is provided for delivering a laser beam of wavelength less than 200 nm from a laser, such as an F2 laser or ArF laser, through a sealed enclosure sealably connected to the laser, and preferably to another housing, leading ultimately to a workpiece. The enclosure is preferably evacuated and back-filled with an inert gas to adequately deplete any air, water, hydrocarbons or oxygen within the enclosure. Thereafter or alternatively, an inert gas flow is established and maintained within the enclosure during operation of the laser. The inert gas preferably has high purity, e.g., more than 99.5% and preferably more than 99.999%, wherein the inert is preferably nitrogen or a noble gas. The enclosure is preferably sealed by a window transparent to the sub-200 nm radiation for preventing contaminants generated in the enclosure from entering the housing and contaminating surfaces therein. The enclosure is preferably made of steel and/or copper, and the window is preferably made of CaF2.

Abstract: A system is provided for delivering a laser beam of wavelength less than 200 nm from a laser, such as an F2 laser or ArF laser, through a sealed enclosure sealably connected to the laser, and preferably to another housing, leading ultimately to a workpiece. The enclosure is preferably evacuated and back-filled with an inert gas to adequately deplete any air, water, hydrocarbons or oxygen within the enclosure. Thereafter or alternatively, an inert gas flow is established and maintained within the enclosure during operation of the laser. The inert gas preferably has high purity, e.g., more than 99.5% and preferably more than 99.999%, wherein the inert is preferably nitrogen or a noble gas. The enclosure is preferably sealed by a window transparent to the sub-200 nm radiation for preventing contaminants generated in the enclosure from entering the housing and contaminating surfaces therein. The enclosure is preferably made of steel and/or copper, and the window is preferably made of CaF2.

Abstract: Method and system for allocating predictable costs for consumable items of a laser system includes determining an average or predicted lifetime of one or more components of a laser system. Then, costs are estimated for the repair and/or replacement of the components in advance of their predicted failure. The costs are then scheduled to be paid at a known time or known times. The average or predicted lifetime may be determined in terms of time, pulse count, accumulated energy input to the discharge, number of workpieces processed or another countable parameter. Also, the component or components predicted to fail may be ordered in advance for rapid delivery at the time of failure. The components may include a laser tube, tube windows, a line-narrowing optical component, a line-narrowing module, a monitor optics module and a halogen filter, the pulser module for a gas discharge laser and/or containers of laser gas.

Abstract: A system is provided for delivering a laser beam of wavelength less than 200 nm from a laser, such as an F2 laser or ArF laser, through a sealed enclosure sealably connected to the laser, and preferably to another housing, leading ultimately to a workpiece. The enclosure is preferably evacuated and back-filled with an inert gas to adequately deplete any air, water, hydrocarbons or oxygen within the enclosure. Thereafter or alternatively, an inert gas flow is established and maintained within the enclosure during operation of the laser. The inert gas preferably has high purity, e.g., more than 99.5% and preferably more than 99.999%, wherein the inert is preferably nitrogen or a noble gas. The enclosure is preferably sealed by a window transparent to the sub-200 nm radiation for preventing contaminants generated in the enclosure from entering the housing and contaminating surfaces therein. The enclosure is preferably made of steel and/or copper, and the window is preferably made of CaF2.