Patents by Inventor Rainer W. Thomae

Rainer W. Thomae has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Microwave ion source
    Patent number: 6922019
    Abstract: A compact microwave ion source has a permanent magnet dipole field, a microwave launcher, and an extractor parallel to the source axis. The dipole field is in the form of a ring. The microwaves are launched from the middle of the dipole ring using a coaxial waveguide. Electrons are heated using ECR in the magnetic field. The ions are extracted from the side of the source from the middle of the dipole perpendicular to the source axis. The plasma density can be increased by boosting the microwave ion source by the addition of an RF antenna. Higher charge states can be achieved by increasing the microwave frequency. A xenon source with a magnetic pinch can be used to produce intense EUV radiation.
    Type: Grant
    Filed: May 17, 2002
    Date of Patent: July 26, 2005
    Assignee: The Regents of the University of California
    Inventors: Ka-Ngo Leung, Jani Reijonen, Rainer W. Thomae
  • Microwave ion source
    Publication number: 20030006708
    Abstract: A compact microwave ion source has a permanent magnet dipole field, a microwave launcher, and an extractor parallel to the source axis. The dipole field is in the form of a ring. The microwaves are launched from the middle of the dipole ring using a coaxial waveguide. Electrons are heated using ECR in the magnetic field. The ions are extracted from the side of the source from the middle of the dipole perpendicular to the source axis. The plasma density can be increased by boosting the microwave ion source by the addition of an RF antenna. Higher charge states can be achieved by increasing the microwave frequency. A xenon source with a magnetic pinch can be used to produce intense EUV radiation.
    Type: Application
    Filed: May 17, 2002
    Publication date: January 9, 2003
    Inventors: Ka-Ngo Leung, Jani Reijonen, Rainer W. Thomae