Patents by Inventor Raj R. Pillai

Raj R. Pillai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5489233
    Abstract: An improved polishing pad is provided comprising a solid uniform polymer sheet having no intrinsic ability to absorb or transport slurry particles having during use a surface texture or pattern which has both large and small flow channels present simultaneously which permit the transport of slurry across the surface of the polishing pad, where said channels are not part of the material structure but are mechanically produced upon the pad surface. In a preferred version of the invention, the pad texture consists of a macrotexture produced prior to use and a microtexture which is produced by abrasion by a multiplicity of small abrasive points at a regular selected interval during the use of the pad.
    Type: Grant
    Filed: April 8, 1994
    Date of Patent: February 6, 1996
    Assignee: Rodel, Inc.
    Inventors: Lee M. Cook, John V. H. Roberts, Charles W. Jenkins, Raj R. Pillai