Patents by Inventor Raj Singu

Raj Singu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE SUSCEPTOR USING EDGE PURGING
    Publication number: 20220380895
    Abstract: A workpiece susceptor body can include a front face configured to support a workpiece, a back face opposite the front face, a workpiece contact zone at least partially forming a support boundary on an inner portion of the front face, and a plurality of axial channels disposed within the susceptor body. The workpiece contact zone can be disposed radially inward of an outer edge of a workpiece positioned on the front face in a processing configuration. Each of the plurality of axial channels may connect to corresponding openings extending into an outer portion of the front face. Each of the openings may be disposed radially outward of the workpiece contact zone of the susceptor body.
    Type: Application
    Filed: July 29, 2022
    Publication date: December 1, 2022
    Inventors: Raj Singu, Todd Robert Dunn, Carl Louis White, Herbert Terhorst, Eric James Shero, Bhushan Zope
  • Substrate susceptor using edge purging
    Patent number: 11404302
    Abstract: A workpiece susceptor body can include a front face configured to support a workpiece, a back face opposite the front face, a workpiece contact zone at least partially forming a support boundary on an inner portion of the front face, and a plurality of axial channels disposed within the susceptor body. The workpiece contact zone can be disposed radially inward of an outer edge of a workpiece positioned on the front face in a processing configuration. Each of the plurality of axial channels may connect to corresponding openings extending into an outer portion of the front face. Each of the openings may be disposed radially outward of the workpiece contact zone of the susceptor body.
    Type: Grant
    Filed: May 15, 2020
    Date of Patent: August 2, 2022
    Assignee: ASM IP HOLDING B.V.
    Inventors: Raj Singu, Todd Robert Dunn, Carl Louis White, Herbert Terhorst, Eric James Shero, Bhushan Zope
  • SUBSTRATE SUSCEPTOR USING EDGE PURGING
    Publication number: 20200373187
    Abstract: A workpiece susceptor body can include a front face configured to support a workpiece, a back face opposite the front face, a workpiece contact zone at least partially forming a support boundary on an inner portion of the front face, and a plurality of axial channels disposed within the susceptor body. The workpiece contact zone can be disposed radially inward of an outer edge of a workpiece positioned on the front face in a processing configuration. Each of the plurality of axial channels may connect to corresponding openings extending into an outer portion of the front face. Each of the openings may be disposed radially outward of the workpiece contact zone of the susceptor body.
    Type: Application
    Filed: May 15, 2020
    Publication date: November 26, 2020
    Inventors: Raj Singu, Todd Robert Dunn, Carl Louis White, Herbert Terhorst, Eric James Shero, Bhushan Zope
  • Heater electrical connector and adapter
    Patent number: D900036
    Type: Grant
    Filed: August 24, 2017
    Date of Patent: October 27, 2020
    Assignee: ASM IP Holding B.V.
    Inventors: Christopher Wuester, Raj Singu