Abstract: Methods and systems for setting up care areas (CAs) for inspection of a specimen are provided. One system includes a computer subsystem configured for acquiring an area of interest image for a specimen from images of the specimen generated by an imaging subsystem. The computer subsystem segments the area of interest image based on intensity of pixels in the image thereby separating the image into pixels corresponding to one or more specimen structures in the image having an intensity different than other pixels in the image. In addition, the computer subsystem detects edges of the specimen structure(s) in the image based on the pixels corresponding to the specimen structure(s) and determines characteristic(s) of one or more CAs in the images of the specimen based on the detected edges. The computer subsystem further stores information for the CA(s) for use in inspection of the specimen.

Abstract: Methods and systems for setting up care areas (CAs) for inspection of a specimen are provided. One system includes an imaging subsystem configured for generating images of a specimen and a computer subsystem configured for determining a number of defects detected in predefined cells within one or more of the images generated in a repeating patterned area formed on the specimen. The computer subsystem is also configured for comparing the number of the defects detected in each of two or more of the predefined cells to a predetermined threshold and designating any one or more of the two or more of the predefined cells in which the number of the defects is greater than the predetermined threshold as one or more CAs. In addition, the computer subsystem is configured for storing information for the one or more CAs for use in inspection of the specimen.

Abstract: Methods and systems for setting up care areas (CAs) for inspection of a specimen are provided. One system includes an imaging subsystem configured for generating images of a specimen and a computer subsystem configured for determining a number of defects detected in predefined cells within one or more of the images generated in a repeating patterned area formed on the specimen. The computer subsystem is also configured for comparing the number of the defects detected in each of two or more of the predefined cells to a predetermined threshold and designating any one or more of the two or more of the predefined cells in which the number of the defects is greater than the predetermined threshold as one or more CAs. In addition, the computer subsystem is configured for storing information for the one or more CAs for use in inspection of the specimen.