Abstract: Methods and systems for setting up care areas (CAs) for inspection of a specimen are provided. One system includes an imaging subsystem configured for generating images of a specimen and a computer subsystem configured for determining a number of defects detected in predefined cells within one or more of the images generated in a repeating patterned area formed on the specimen. The computer subsystem is also configured for comparing the number of the defects detected in each of two or more of the predefined cells to a predetermined threshold and designating any one or more of the two or more of the predefined cells in which the number of the defects is greater than the predetermined threshold as one or more CAs. In addition, the computer subsystem is configured for storing information for the one or more CAs for use in inspection of the specimen.

Abstract: Methods and systems for setting up care areas (CAs) for inspection of a specimen are provided. One system includes an imaging subsystem configured for generating images of a specimen and a computer subsystem configured for determining a number of defects detected in predefined cells within one or more of the images generated in a repeating patterned area formed on the specimen. The computer subsystem is also configured for comparing the number of the defects detected in each of two or more of the predefined cells to a predetermined threshold and designating any one or more of the two or more of the predefined cells in which the number of the defects is greater than the predetermined threshold as one or more CAs. In addition, the computer subsystem is configured for storing information for the one or more CAs for use in inspection of the specimen.