Patents by Inventor Rajaram Shetty

Rajaram Shetty has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250230576
    Abstract: Methods and wafers for vertical gradient freeze 8 inch gallium arsenide (GaAs) substrates. In disclosed examples, vertical gradient freeze systems for forming gallium arsenide (GaAs) substrates having silicon as a dopant, the system includes a crucible to contain a GaAs liquid melt and seed material during a formation process; one or more heating coils arranged in a plurality of heating zones; and a pedestal to move relative to the crucible, the system operable to control heating of the plurality of heating zones and movement of the pedestal to form a single crystal GaAs substrate.
    Type: Application
    Filed: March 28, 2025
    Publication date: July 17, 2025
    Inventors: Weiguo Liu, Rajaram Shetty, Wei Zhang
  • Patent number: 12276044
    Abstract: Methods and systems for low etch pit density gallium arsenide crystals with boron dopant may include a gallium arsenide single crystal wafer having boron as a dopant, an etch pit density of less than 500 cm?2, and optical absorption of 6 cm?1 or less at 940 nm. The wafer may have an etch pit density of less than 200 cm?2. The wafer may have a diameter of 6 inches or greater. The wafer may have a boron concentration between 1×1019 cm?3 and 2×1019 cm?3. The wafer may have a thickness of 300 ?m or greater. Optoelectronic devices may be formed on a first surface of the wafer, which may be diced into a plurality of die and optical signals from an optoelectronic device on one side of one of the die may be communicated out a second side of the die opposite to the one side.
    Type: Grant
    Filed: December 12, 2019
    Date of Patent: April 15, 2025
    Assignee: AXT, Inc.
    Inventors: Rajaram Shetty, Weiguo Liu, Morris Young
  • Publication number: 20240426025
    Abstract: Methods and systems for low etch pit density 6 inch semi-insulating gallium arsenide wafers may include a semi-insulating gallium arsenide single crystal wafer having a diameter of 6 inches or greater without intentional dopants for reducing dislocation density, an etch pit density of less than 1000 cm?2, and a resistivity of 1×107 ?-cm or more. The wafer may have an optical absorption of less than 5 cm?1 less than 4 cm?1 or less than 3 cm?1 at 940 nm wavelength. The wafer may have a carrier mobility of 3000 cm2/V-sec or higher. The wafer may have a thickness of 500 ?m or greater. Electronic devices may be formed on a first surface of the wafer. The wafer may have a carrier concentration of 1.1×107 cm?3 or less.
    Type: Application
    Filed: September 10, 2024
    Publication date: December 26, 2024
    Inventors: Rajaram Shetty, Weiguo Liu, Morris Young
  • Patent number: 12084790
    Abstract: Methods and systems for low etch pit density 6 inch semi-insulating gallium arsenide wafers may include a semi-insulating gallium arsenide single crystal wafer having a diameter of 6 inches or greater without intentional dopants for reducing dislocation density, an etch pit density of less than 1000 cm?2, and a resistivity of 1×107 ?-cm or more. The wafer may have an optical absorption of less than 5 cm?1 less than 4 cm?1 or less than 3 cm?1 at 940 nm wavelength. The wafer may have a carrier mobility of 3000 cm2/V-sec or higher. The wafer may have a thickness of 500 ?m or greater. Electronic devices may be formed on a first surface of the wafer. The wafer may have a carrier concentration of 1.1×107 cm?3 or less.
    Type: Grant
    Filed: June 20, 2023
    Date of Patent: September 10, 2024
    Assignee: AXT, Inc.
    Inventors: Rajaram Shetty, Weiguo Liu, Morris Young
  • Publication number: 20230416941
    Abstract: Methods and wafers for vertical gradient freeze 8 inch gallium arsenide (GaAs) substrates. In disclosed examples, vertical gradient freeze systems for forming gallium arsenide (GaAs) substrates having silicon as a dopant, the system includes a crucible to contain a GaAs liquid melt and seed material during a formation process; one or more heating coils arranged in a plurality of heating zones; and a pedestal to move relative to the crucible, the system operable to control heating of the plurality of heating zones and movement of the pedestal to form a single crystal GaAs substrate.
    Type: Application
    Filed: September 8, 2023
    Publication date: December 28, 2023
    Inventors: Weiguo Liu, Rajaram Shetty, Wei Zhang
  • Publication number: 20230407522
    Abstract: Methods and systems for low etch pit density 6 inch semi-insulating gallium arsenide wafers may include a semi-insulating gallium arsenide single crystal wafer having a diameter of 6 inches or greater without intentional dopants for reducing dislocation density, an etch pit density of less than 1000 cm?2, and a resistivity of 1×107 ?-cm or more. The wafer may have an optical absorption of less than 5 cm?1 less than 4 cm?1 or less than 3 cm?1 at 940 nm wavelength. The wafer may have a carrier mobility of 3000 cm2/V-sec or higher. The wafer may have a thickness of 500 ?m or greater. Electronic devices may be formed on a first surface of the wafer. The wafer may have a carrier concentration of 1.1×107 cm?3 or less.
    Type: Application
    Filed: June 20, 2023
    Publication date: December 21, 2023
    Inventors: Rajaram Shetty, Weiguo Liu, Morris Young
  • Patent number: 11680340
    Abstract: Methods and systems for low etch pit density 6 inch semi-insulating gallium arsenide wafers may include a semi-insulating gallium arsenide single crystal wafer having a diameter of 6 inches or greater without intentional dopants for reducing dislocation density, an etch pit density of less than 1000 cm?2, and a resistivity of 1×107 ?-cm or more. The wafer may have an optical absorption of less than 5 cm?1 less than 4 cm?1 or less than 3 cm?1 at 940 nm wavelength. The wafer may have a carrier mobility of 3000 cm2/V-sec or higher. The wafer may have a thickness of 500 ?m or greater. Electronic devices may be formed on a first surface of the wafer. The wafer may have a carrier concentration of 1.1×107 cm?3 or less.
    Type: Grant
    Filed: December 11, 2019
    Date of Patent: June 20, 2023
    Assignee: AXT, Inc.
    Inventors: Rajaram Shetty, Weiguo Liu, Morris Young
  • Publication number: 20220298673
    Abstract: Methods and wafers for vertical gradient freeze 8 inch gallium arsenide (GaAs) substrates. In disclosed examples, vertical gradient freeze systems for forming gallium arsenide (GaAs) substrates having silicon as a dopant, the system includes a crucible to contain a GaAs liquid melt and seed material during a formation process; one or more heating coils arranged in a plurality of heating zones; and a pedestal to move relative to the crucible, the system operable to control heating of the plurality of heating zones and movement of the pedestal to form a single crystal GaAs substrate.
    Type: Application
    Filed: March 22, 2022
    Publication date: September 22, 2022
    Inventors: Weiguo Liu, Rajaram Shetty, Wei Zhang
  • Publication number: 20220238746
    Abstract: A germanium single-crystal wafer comprises silicon with an atomic concentration of from 3×1014 atoms/cc to 10×1013 atoms/cc, boron with an atomic concentration of from 1×1016 atoms/cc to 10×1018 atoms/cc, and gallium with an atomic concentration of from 1×1016 atoms/cc to 10×1019 atoms/cc. Further provided are a method for preparing the germanium single-crystal wafer, a method for preparing a germanium single-crystal ingot, and the use of the germanium single-crystal wafer for increasing the open-circuit voltage of a solar cell. The germanium single-crystal wafer has an improved electrical property in that it has a smaller difference in resistivity and carrier concentration.
    Type: Application
    Filed: May 15, 2020
    Publication date: July 28, 2022
    Inventors: Rajaram Shetty, Yuanli Wang, Weiguo Liu, Yvonne Zhou, Sung-Nee George Chu
  • Patent number: 11127867
    Abstract: A monocrystalline germanium wafer that increases the open-circuit voltage of multijunction solar cells, a method for preparing the monocrystalline germanium wafer and a method for preparing an ingot from which the monocrystalline germanium wafer is prepared. The monocrystalline germanium wafer that increases the open-circuit voltage of the bottom cell of multijunction solar cells is prepared by adjusting the amounts of the co-dopants silicon and gallium in the monocrystalline germanium wafer, the ratio of silicon to gallium in the preparation of the monocrystalline germanium.
    Type: Grant
    Filed: July 9, 2018
    Date of Patent: September 21, 2021
    Assignee: Beijing Tongmei Xtal Technology Co., Ltd.
    Inventors: Rajaram Shetty, Yuanli Wang, Yvonne Zhou, Weiguo Liu, Sung-Nee George Chu
  • Publication number: 20200190696
    Abstract: Methods and systems for low etch pit density 6 inch semi-insulating gallium arsenide wafers may include a semi-insulating gallium arsenide single crystal wafer having a diameter of 6 inches or greater without intentional dopants for reducing dislocation density, an etch pit density of less than 1000 cm?2, and a resistivity of 1×107 ?-cm or more. The wafer may have an optical absorption of less than 5 cm?1 less than 4 cm?1 or less than 3 cm?1 at 940 nm wavelength. The wafer may have a carrier mobility of 3000 cm2/V-sec or higher. The wafer may have a thickness of 500 ?m or greater. Electronic devices may be formed on a first surface of the wafer. The wafer may have a carrier concentration of 1.1×107 cm?3 or less.
    Type: Application
    Filed: December 11, 2019
    Publication date: June 18, 2020
    Inventors: Rajaram Shetty, Weiguo Liu, Morris Young
  • Publication number: 20200190697
    Abstract: Methods and systems for low etch pit density gallium arsenide crystals with boron dopant may include a gallium arsenide single crystal wafer having boron as a dopant, an etch pit density of less than 500 cm?2, and optical absorption of 6 cm?1 or less at 940 nm. The wafer may have an etch pit density of less than 200 cm?2. The wafer may have a diameter of 6 inches or greater. The wafer may have a boron concentration between 1×1019 cm?3 and 2×1019 cm?3. The wafer may have a thickness of 300 ?m or greater. Optoelectronic devices may be formed on a first surface of the wafer, which may be diced into a plurality of die and optical signals from an optoelectronic device on one side of one of the die may be communicated out a second side of the die opposite to the one side.
    Type: Application
    Filed: December 12, 2019
    Publication date: June 18, 2020
    Inventors: Rajaram Shetty, Weiguo Liu, Morris Young