Patents by Inventor Rajeev Patil

Rajeev Patil has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240086157
    Abstract: Techniques are provided for visual generation of software deployment pipelines using recommendations of development and operations (DevOps) blueprints.
    Type: Application
    Filed: September 8, 2022
    Publication date: March 14, 2024
    Inventors: Rajeev Patil, Afsar Doodekula, Mohan Rao Gadupudi, Venkata Chowdary Mutyala, Nathan Cairl
  • Patent number: 11794314
    Abstract: An apparatus for securing a substrate includes a detachable plate configured to reversibly attach to a base of a chuck. The base of the chuck includes one or more base-substrate vacuum inlet channels and one or more base-plate inlet channels. The detachable plate includes one or more first vacuum reservoirs and second vacuum reservoirs. The detachable plate is further configured to establish a fluidic connection between the one or more first vacuum reservoirs and the base-plate inlet channels for forming a first vacuum seal between the detachable plate and the base. The detachable plate further includes one or more pass-through channels for fluidic connection with the one or more second vacuum reservoirs for forming a second vacuum seal between the detachable plate and the substrate.
    Type: Grant
    Filed: December 27, 2021
    Date of Patent: October 24, 2023
    Assignee: KLA Corporation
    Inventors: Lim Chow Tian, Rajeev Patil, Harit Maganlal Gadhia
  • Publication number: 20230069384
    Abstract: An apparatus for securing a substrate includes a detachable plate configured to reversibly attach to a base of a chuck. The base of the chuck includes one or more base-substrate vacuum inlet channels and one or more base-plate inlet channels. The detachable plate includes one or more first vacuum reservoirs and second vacuum reservoirs. The detachable plate is further configured to establish a fluidic connection between the one or more first vacuum reservoirs and the base-plate inlet channels for forming a first vacuum seal between the detachable plate and the base. The detachable plate further includes one or more pass-through channels for fluidic connection with the one or more second vacuum reservoirs for forming a second vacuum seal between the detachable plate and the substrate.
    Type: Application
    Filed: December 27, 2021
    Publication date: March 2, 2023
    Inventors: Lim Chow Tian, Rajeev Patil, Harit Maganlal Gadhia
  • Patent number: 11119384
    Abstract: Disclosed are methods and apparatus for hermetically sealing a nonlinear optical (NLO) crystal for use in a laser system. A mounted NLO crystal, an enclosure base, a lid, and a plurality of window components are moved into an oven. A vacuum bake process is then performed on the mounted NLO crystal, enclosure base, lid, and plurality of window components until a humidity level that is less than a predefined amount is reached. The mounted NLO crystal, enclosure base, lid, and plurality of window components are moved from the oven onto a stage of a glove box that includes a sealing tool. In the glove box, the mounted NLO crystal is hermetically sealed into the enclosure base by sealing the lid and plurality of window components into openings of the enclosure base.
    Type: Grant
    Filed: September 17, 2018
    Date of Patent: September 14, 2021
    Assignee: KLA-Tencor Corporation
    Inventors: Rajeev Patil, David Ramirez, Yevgeniy Churin, William Replogle
  • Publication number: 20210231292
    Abstract: A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.
    Type: Application
    Filed: April 12, 2021
    Publication date: July 29, 2021
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine, Jincheng Wang, Anant Chimmalgi, Rajeev Patil, Rudolf Brunner
  • Patent number: 10976025
    Abstract: A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.
    Type: Grant
    Filed: February 13, 2018
    Date of Patent: April 13, 2021
    Assignee: KLA Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine, Jincheng Wang, Anant Chimmalgi, Rajeev Patil, Rudolf Brunner
  • Publication number: 20190094653
    Abstract: Disclosed are methods and apparatus for hermetically sealing a nonlinear optical (NLO) crystal for use in a laser system. A mounted NLO crystal, an enclosure base, a lid, and a plurality of window components are moved into an oven. A vacuum bake process is then performed on the mounted NLO crystal, enclosure base, lid, and plurality of window components until a humidity level that is less than a predefined amount is reached. The mounted NLO crystal, enclosure base, lid, and plurality of window components are moved from the oven onto a stage of a glove box that includes a sealing tool. In the glove box, the mounted NLO crystal is hermetically sealed into the enclosure base by sealing the lid and plurality of window components into openings of the enclosure base.
    Type: Application
    Filed: September 17, 2018
    Publication date: March 28, 2019
    Applicant: KLA-Tencor Corporation
    Inventors: Rajeev Patil, David Ramirez, Yevgeniy Churin, William Replogle
  • Patent number: 10244613
    Abstract: An illumination source for igniting and sustaining a plasma in a plasma lamp of a laser-sustained plasma (LSP) broadband source includes one or more ignition lasers configured to ignite the plasma within a gas contained within the plasma lamp. The illumination sources also include one or more sustaining lasers configured to sustain the plasma. The illumination sources include a delivery optical fiber, one or more optical elements configured to selectively optically couple an output of the one or more ignition lasers, and an output of the one or more sustaining lasers to the delivery optical fiber.
    Type: Grant
    Filed: September 29, 2016
    Date of Patent: March 26, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Anant Chimmalgi, Rudolf Brunner, Anatoly Shchemelinin, Ilya Bezel, Erik Kim, Rajeev Patil
  • Publication number: 20180172240
    Abstract: A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.
    Type: Application
    Filed: February 13, 2018
    Publication date: June 21, 2018
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine, Jincheng Wang, Anant Chimmalgi, Rajeev Patil, Rudolf Brunner
  • Patent number: 9927094
    Abstract: A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma, the plasma bulb being transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.
    Type: Grant
    Filed: January 15, 2013
    Date of Patent: March 27, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine, Jincheng Wang, Anant Chimmalgi, Rajeev Patil, Rudolf Brunner
  • Publication number: 20170150590
    Abstract: An illumination source for igniting and sustaining a plasma in a plasma lamp of a laser-sustained plasma (LSP) broadband source includes one or more ignition lasers configured to ignite the plasma within a gas contained within the plasma lamp. The illumination sources also includes one or more sustaining lasers configured to sustain the plasma. The illumination sources includes a delivery optical fiber one or more optical elements configured to selectively optically couple an output of the one or more ignition lasers and an output of the one or more sustaining lasers to the delivery optical fiber.
    Type: Application
    Filed: September 29, 2016
    Publication date: May 25, 2017
    Inventors: Anant Chimmalgi, Rudolf Brunner, Anatoly Shchemelinin, Ilya Bezel, Erik Kim, Rajeev Patil
  • Patent number: 9534848
    Abstract: A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.
    Type: Grant
    Filed: August 26, 2013
    Date of Patent: January 3, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: Jincheng Wang, Anant Chimmalgi, Rajeev Patil, Erik Kim, Rudolf Brunner, Quang Giang, Lauren Wilson, Ken Gross, Ilya Bezel, Dan Scott, Younus Vora, Matthew Derstine, Cedric Lasfargues
  • Patent number: 9318311
    Abstract: A refillable plasma cell for use in a laser-sustained plasma light source includes a plasma bulb, the bulb being formed from a glass material substantially transparent to a selected wavelength of radiation, and a gas port assembly, the gas port assembly being operably connected to the bulb and disposed at a first portion of the gas bulb, wherein the bulb is configured to selectively receive a gas from a gas source via the gas port assembly.
    Type: Grant
    Filed: October 9, 2012
    Date of Patent: April 19, 2016
    Assignee: KLA-Tencor Corporation
    Inventors: Anant Chimmalgi, Anatoly Shchemelinin, Ilya Bezel, Rajeev Patil
  • Publication number: 20140060792
    Abstract: A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.
    Type: Application
    Filed: August 26, 2013
    Publication date: March 6, 2014
    Applicant: KLA-Tencor Corporation
    Inventors: Jincheng Wang, Anant Chimmalgi, Rajeev Patil, Erik Kim, Rudolf Brunner, Quang Giang, Lauren Wilson, Ken Gross, Ilya Bezel, Dan Scott, Younus Vora, Matthew Derstine, Cedric Lasfargues
  • Patent number: 7016594
    Abstract: A simple and robust heat actuated steering device for use with mirrors and other optical components of optical telecommunications equipment is described, together with systems which implement such devices. The device uses differential heating between two legs of a flexured mount to allow tilting that can be used to steer an optical beam. Disturbances in the optical alignment, caused by temperature changes, of an optical device containing this component can be compensated by measuring the device temperature and using this to determine a command signal, for example as provided through a lookup table, to correct for device misalignment. Techniques for calibrating the device and establishing the correction data are also disclosed.
    Type: Grant
    Filed: August 9, 2004
    Date of Patent: March 21, 2006
    Assignee: Lightconnect, Inc.
    Inventors: Asif A. Godil, Eric K. Gustafson, Rajeev Patil, Timothy D. Stowe