Patents by Inventor Rajeev Patil
Rajeev Patil has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240192974Abstract: Techniques are provided for simulation of pipeline jobs in a software deployment pipeline. One method comprises obtaining a request from a user to simulate a pipeline job of a software deployment pipeline; processing a configuration file associated with the pipeline job to identify an image for a virtualized computing resource associated with the pipeline job; generating an executable script for the pipeline job using the configuration file associated with the pipeline job; initiating a generation of a simulated version of the virtualized computing resource in a simulated environment using the image for the virtualized computing resource associated with the pipeline job; initiating an execution of at least a portion of the pipeline job in the simulated version of the virtualized computing resource; and obtaining one or more results from the execution of the at least one pipeline job in the simulated version of the virtualized computing resource.Type: ApplicationFiled: December 8, 2022Publication date: June 13, 2024Inventors: Mohan Rao Gadupudi, Avinash Gopisetti Venkata, Afsar Doodekula, Rajeev Patil, Sagar Sanjeev, Venkata Chowdary Mutyala
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Publication number: 20240183790Abstract: A lifter assembly for an optical system includes a chuck having a chuck base and a detachable top plate, wherein the detachable top plate is one of a plurality of interchangeable detachable top plates configured to support a substrate. The lifter assembly also includes a moveable plate supporting the chuck on an upper surface of the moveable plate, the moveable plate vertically adjustable between a lower, retracted position and an upper, extended position. The lifter assembly further includes a bellows structure operatively coupled to the moveable plate. The lifter assembly yet further includes a pneumatic system fluidly coupled to the bellows structure to selectively expand and contract, wherein expansion of the bellows structure vertically adjusts the moveable plate to the upper, extended position and contraction of the bellows structure vertically adjusts the moveable plate to the lower, retracted position.Type: ApplicationFiled: March 13, 2023Publication date: June 6, 2024Inventors: Lim Chow Tian, Rajeev Patil, Jinson Jayan
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Publication number: 20240086157Abstract: Techniques are provided for visual generation of software deployment pipelines using recommendations of development and operations (DevOps) blueprints.Type: ApplicationFiled: September 8, 2022Publication date: March 14, 2024Inventors: Rajeev Patil, Afsar Doodekula, Mohan Rao Gadupudi, Venkata Chowdary Mutyala, Nathan Cairl
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Patent number: 11794314Abstract: An apparatus for securing a substrate includes a detachable plate configured to reversibly attach to a base of a chuck. The base of the chuck includes one or more base-substrate vacuum inlet channels and one or more base-plate inlet channels. The detachable plate includes one or more first vacuum reservoirs and second vacuum reservoirs. The detachable plate is further configured to establish a fluidic connection between the one or more first vacuum reservoirs and the base-plate inlet channels for forming a first vacuum seal between the detachable plate and the base. The detachable plate further includes one or more pass-through channels for fluidic connection with the one or more second vacuum reservoirs for forming a second vacuum seal between the detachable plate and the substrate.Type: GrantFiled: December 27, 2021Date of Patent: October 24, 2023Assignee: KLA CorporationInventors: Lim Chow Tian, Rajeev Patil, Harit Maganlal Gadhia
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Publication number: 20230069384Abstract: An apparatus for securing a substrate includes a detachable plate configured to reversibly attach to a base of a chuck. The base of the chuck includes one or more base-substrate vacuum inlet channels and one or more base-plate inlet channels. The detachable plate includes one or more first vacuum reservoirs and second vacuum reservoirs. The detachable plate is further configured to establish a fluidic connection between the one or more first vacuum reservoirs and the base-plate inlet channels for forming a first vacuum seal between the detachable plate and the base. The detachable plate further includes one or more pass-through channels for fluidic connection with the one or more second vacuum reservoirs for forming a second vacuum seal between the detachable plate and the substrate.Type: ApplicationFiled: December 27, 2021Publication date: March 2, 2023Inventors: Lim Chow Tian, Rajeev Patil, Harit Maganlal Gadhia
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Patent number: 11119384Abstract: Disclosed are methods and apparatus for hermetically sealing a nonlinear optical (NLO) crystal for use in a laser system. A mounted NLO crystal, an enclosure base, a lid, and a plurality of window components are moved into an oven. A vacuum bake process is then performed on the mounted NLO crystal, enclosure base, lid, and plurality of window components until a humidity level that is less than a predefined amount is reached. The mounted NLO crystal, enclosure base, lid, and plurality of window components are moved from the oven onto a stage of a glove box that includes a sealing tool. In the glove box, the mounted NLO crystal is hermetically sealed into the enclosure base by sealing the lid and plurality of window components into openings of the enclosure base.Type: GrantFiled: September 17, 2018Date of Patent: September 14, 2021Assignee: KLA-Tencor CorporationInventors: Rajeev Patil, David Ramirez, Yevgeniy Churin, William Replogle
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Publication number: 20210231292Abstract: A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.Type: ApplicationFiled: April 12, 2021Publication date: July 29, 2021Inventors: Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine, Jincheng Wang, Anant Chimmalgi, Rajeev Patil, Rudolf Brunner
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Patent number: 10976025Abstract: A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.Type: GrantFiled: February 13, 2018Date of Patent: April 13, 2021Assignee: KLA CorporationInventors: Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine, Jincheng Wang, Anant Chimmalgi, Rajeev Patil, Rudolf Brunner
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Publication number: 20190094653Abstract: Disclosed are methods and apparatus for hermetically sealing a nonlinear optical (NLO) crystal for use in a laser system. A mounted NLO crystal, an enclosure base, a lid, and a plurality of window components are moved into an oven. A vacuum bake process is then performed on the mounted NLO crystal, enclosure base, lid, and plurality of window components until a humidity level that is less than a predefined amount is reached. The mounted NLO crystal, enclosure base, lid, and plurality of window components are moved from the oven onto a stage of a glove box that includes a sealing tool. In the glove box, the mounted NLO crystal is hermetically sealed into the enclosure base by sealing the lid and plurality of window components into openings of the enclosure base.Type: ApplicationFiled: September 17, 2018Publication date: March 28, 2019Applicant: KLA-Tencor CorporationInventors: Rajeev Patil, David Ramirez, Yevgeniy Churin, William Replogle
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Patent number: 10244613Abstract: An illumination source for igniting and sustaining a plasma in a plasma lamp of a laser-sustained plasma (LSP) broadband source includes one or more ignition lasers configured to ignite the plasma within a gas contained within the plasma lamp. The illumination sources also include one or more sustaining lasers configured to sustain the plasma. The illumination sources include a delivery optical fiber, one or more optical elements configured to selectively optically couple an output of the one or more ignition lasers, and an output of the one or more sustaining lasers to the delivery optical fiber.Type: GrantFiled: September 29, 2016Date of Patent: March 26, 2019Assignee: KLA-Tencor CorporationInventors: Anant Chimmalgi, Rudolf Brunner, Anatoly Shchemelinin, Ilya Bezel, Erik Kim, Rajeev Patil
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Publication number: 20180172240Abstract: A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.Type: ApplicationFiled: February 13, 2018Publication date: June 21, 2018Inventors: Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine, Jincheng Wang, Anant Chimmalgi, Rajeev Patil, Rudolf Brunner
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Patent number: 9927094Abstract: A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma, the plasma bulb being transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.Type: GrantFiled: January 15, 2013Date of Patent: March 27, 2018Assignee: KLA-Tencor CorporationInventors: Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine, Jincheng Wang, Anant Chimmalgi, Rajeev Patil, Rudolf Brunner
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Publication number: 20170150590Abstract: An illumination source for igniting and sustaining a plasma in a plasma lamp of a laser-sustained plasma (LSP) broadband source includes one or more ignition lasers configured to ignite the plasma within a gas contained within the plasma lamp. The illumination sources also includes one or more sustaining lasers configured to sustain the plasma. The illumination sources includes a delivery optical fiber one or more optical elements configured to selectively optically couple an output of the one or more ignition lasers and an output of the one or more sustaining lasers to the delivery optical fiber.Type: ApplicationFiled: September 29, 2016Publication date: May 25, 2017Inventors: Anant Chimmalgi, Rudolf Brunner, Anatoly Shchemelinin, Ilya Bezel, Erik Kim, Rajeev Patil
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Patent number: 9534848Abstract: A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.Type: GrantFiled: August 26, 2013Date of Patent: January 3, 2017Assignee: KLA-Tencor CorporationInventors: Jincheng Wang, Anant Chimmalgi, Rajeev Patil, Erik Kim, Rudolf Brunner, Quang Giang, Lauren Wilson, Ken Gross, Ilya Bezel, Dan Scott, Younus Vora, Matthew Derstine, Cedric Lasfargues
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Patent number: 9318311Abstract: A refillable plasma cell for use in a laser-sustained plasma light source includes a plasma bulb, the bulb being formed from a glass material substantially transparent to a selected wavelength of radiation, and a gas port assembly, the gas port assembly being operably connected to the bulb and disposed at a first portion of the gas bulb, wherein the bulb is configured to selectively receive a gas from a gas source via the gas port assembly.Type: GrantFiled: October 9, 2012Date of Patent: April 19, 2016Assignee: KLA-Tencor CorporationInventors: Anant Chimmalgi, Anatoly Shchemelinin, Ilya Bezel, Rajeev Patil
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Publication number: 20140060792Abstract: A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.Type: ApplicationFiled: August 26, 2013Publication date: March 6, 2014Applicant: KLA-Tencor CorporationInventors: Jincheng Wang, Anant Chimmalgi, Rajeev Patil, Erik Kim, Rudolf Brunner, Quang Giang, Lauren Wilson, Ken Gross, Ilya Bezel, Dan Scott, Younus Vora, Matthew Derstine, Cedric Lasfargues
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Patent number: 7016594Abstract: A simple and robust heat actuated steering device for use with mirrors and other optical components of optical telecommunications equipment is described, together with systems which implement such devices. The device uses differential heating between two legs of a flexured mount to allow tilting that can be used to steer an optical beam. Disturbances in the optical alignment, caused by temperature changes, of an optical device containing this component can be compensated by measuring the device temperature and using this to determine a command signal, for example as provided through a lookup table, to correct for device misalignment. Techniques for calibrating the device and establishing the correction data are also disclosed.Type: GrantFiled: August 9, 2004Date of Patent: March 21, 2006Assignee: Lightconnect, Inc.Inventors: Asif A. Godil, Eric K. Gustafson, Rajeev Patil, Timothy D. Stowe