Abstract: The present disclosure provides a system and method for delay prediction for scheduled public transport. A multi-architectural deep learning approach has been used to predict the delays of a queried vehicle in the scheduled public transport. For this, historical operational data is transformed into temporal, and spatiotemporal data. While, the spatial data is obtained from geographical information. The system uses different combinations of neural networks architectures. A regressor model uses three separate kinds of architecture. One component is the Fully Connected Neural Network (FCNN), which is good at learning from static features, the second is the Long Short Term Memory (LSTM) network which is good at learning from temporal features, and the third is the 3D Convolutional Neural Network (3DCNN) which is good at learning from spatiotemporal features. Learned encoding from each are fed to another FCNN to produce the predicted delay value.

Abstract: Apparatus and methods for achieving uniform heating or cooling of a substrate during a rapid thermal process are disclosed. More particularly, apparatus and methods for controlling the temperature of an edge ring supporting a substrate and/or a reflector plate during a rapid thermal process to improve temperature uniformity across the substrate are disclosed, which include a thermal mass or plate adjacent the edge ring to heat or cool the edge ring.

Abstract: A rapid thermal processing (RTP) system including a transmission pyrometer monitoring the temperature dependent absorption of the silicon wafer for radiation from the RTP lamps at a reduced power level. A look-up table is created relating unnormalized values of photodetector photocurrents with wafer and radiant lamp temperatures. A calibrating step measures the photocurrent with known wafer and lamp temperatures and all photocurrents measured thereafter are accordingly normalized. The transmission pyrometer may be used for closed loop control for thermal treatments below 500° C. or used in the pre-heating phase for a higher temperature process including radiation pyrometry in closed loop control. The pre-heating temperature ramp rate may be controlled by measuring the initial ramp rate and readjusting the lamp power accordingly. Radiation and transmission pyrometers may be included in an integrated structure with a beam splitter dividing radiation from the wafer.