Patents by Inventor Rajinder S. Dhaliwal

Rajinder S. Dhaliwal has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Carbon tube for electron beam application
    Patent number: 7863563
    Abstract: Embodiments of the present invention provide an apparatus employing an electron beam to expose the structure of a micro device and produce an image of the structure. The apparatus includes an electron gun producing the electron beam; an electron beam column having one or more segments that shape, focus and/or deflect the electron beams; and one or more center tubes along the electron beam column that provides a high vacuum environment for and guiding the electron beam to a target object coated with an electron sensitive resist. At least one of the center tubes is a carbon tube made of solid carbon material.
    Type: Grant
    Filed: March 8, 2007
    Date of Patent: January 4, 2011
    Assignee: International Business Machines Corporation
    Inventors: Lonn E. Moore, Rajinder S. Dhaliwal, Maris A. Sturans
  • CARBON TUBE FOR ELECTRON BEAM APPLICATION
    Publication number: 20080218054
    Abstract: Embodiments of the present invention provide an apparatus employing an electron beam to expose the structure of a micro device and produce an image of the structure. The apparatus includes an electron gun producing the electron beam; an electron beam column having one or more segments that shape, focus and/or deflect the electron beams; and one or more center tubes along the electron beam column that provides a high vacuum environment for and guiding the electron beam to a target object coated with an electron sensitive resist. At least one of the center tubes is a carbon tube made of solid carbon material.
    Type: Application
    Filed: March 8, 2007
    Publication date: September 11, 2008
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Lonn E. Moore, Rajinder S. Dhaliwal, Maris A. Sturans