Patents by Inventor Rajiv Krishan Agarwal
Rajiv Krishan Agarwal has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10711227Abstract: Composition, method and system for PVD TiN hard mask removal from 28/20 nm pattern wafers have been disclosed. The composition uses peroxide as oxidizing agent for PVD TiN hard mask removal under slightly basic conditions. The composition comprises bulky or long chain organic amines or polyalkylamine to improve removal/etching selectivity of PVD TiN vs CVD TiN. The composition further comprises long chain organic acids or amines to maintain Co compatibility.Type: GrantFiled: January 9, 2018Date of Patent: July 14, 2020Assignee: VERSUM MATERIALS US, LLCInventors: Wen Dar Liu, Yi-Chia Lee, William Jack Casteel, Jr., Tianniu Chen, Rajiv Krishan Agarwal, Madhukar Bhaskara Rao
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Patent number: 10073351Abstract: A photoresist or semiconductor manufacturing residue stripping and cleaning composition comprising water, one or more alkaline compounds, one or more corrosion inhibitors, and one or more oxidized products of one or more antioxidants, the method of making the composition and the method of using the composition.Type: GrantFiled: December 9, 2015Date of Patent: September 11, 2018Assignee: VERSUM MATERIALS US, LLCInventors: Rajiv Krishan Agarwal, Mark Richard Brown, Aiping Wu, David Barry Rennie, Yi-Chia Lee, Gene Everad Parris
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Publication number: 20180251711Abstract: Composition, method and system for PVD TiN hard mask removal from 28/20 nm pattern wafers have been disclosed. The composition uses peroxide as oxidizing agent for PVD TiN hard mask removal under slightly basic conditions. The composition comprises bulky or long chain organic amines or polyalkylamine to improve removal/etching selectivity of PVD TiN vs CVD TiN. The composition further comprises long chain organic acids or amines to maintain Co compatibility.Type: ApplicationFiled: January 9, 2018Publication date: September 6, 2018Applicant: Versum Materials US, LLCInventors: Wen Dar Liu, Yi-Chia Lee, William Jack Casteel, JR., Tianniu Chen, Rajiv Krishan Agarwal, Madhukar Bhaskara Rao
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Patent number: 9976111Abstract: Composition, method and system for PVD TiN hard mask removal from 28/20 nm pattern wafers have been disclosed. The composition uses peroxide as oxidizing agent for PVD TiN hard mask removal under slightly basic conditions. The composition comprises bulky or long chain organic amines or polyalkylamine to improve removal/etching selectivity of PVD TiN vs CVD TiN. The composition further comprises long chain organic acids or amines to maintain Co compatibility.Type: GrantFiled: April 26, 2016Date of Patent: May 22, 2018Assignee: VERSUM MATERIALS US, LLCInventors: Wen Dar Liu, Yi-Chia Lee, William Jack Casteel, Jr., Tianniu Chen, Rajiv Krishan Agarwal, Madhukar Bhaskara Rao
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Publication number: 20170107460Abstract: Composition, method and system for PVD TiN hard mask removal from 28/20 nm pattern wafers have been disclosed. The composition uses peroxide as oxidizing agent for PVD TiN hard mask removal under slightly basic conditions. The composition comprises bulky or long chain organic amines or polyalkylamine to improve removal/etching selectivity of PVD TiN vs CVD TiN. The composition further comprises long chain organic acids or amines to maintain Co compatibility.Type: ApplicationFiled: April 26, 2016Publication date: April 20, 2017Applicant: Air Products and Chemicals, Inc.Inventors: Wen Dar Liu, Yi-Chia Lee, William Jack Casteel, JR., Tianniu Chen, Rajiv Krishan Agarwal, Madhukar Bhaskara Rao
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Patent number: 9463978Abstract: The method described herein provides a method for preparing trisilylamine. In one aspect, the method comprises: providing a reaction mixture of trisilylamine and monochlorosilane into a reactor wherein the reaction mixture is at a temperature and pressure sufficient to provide trisilylamine in a liquid phase wherein the reaction mixture is substantially free of an added solvent; contacting the reaction mixture with ammonia to provide a crude mixture comprising trisilylamine and an ammonium chloride solid wherein monochlorosilane is in stoichiometric excess in relation to ammonia; purifiying the crude mixture to provide trisilylamine wherein the trisilyamine is produced at purity level of 90% or greater; and optionally removing the ammonium chloride solid from the reactor.Type: GrantFiled: February 2, 2016Date of Patent: October 11, 2016Assignee: Air Products and Chemicals, Inc.Inventors: Rajiv Krishan Agarwal, Sai-Hong Andrew Lo, Howard Paul Withers, Jr., Joseph T. Sluzevich, James Joseph Hart
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Publication number: 20160179011Abstract: A photoresist or semiconductor manufacturing residue stripping and cleaning composition comprising water, one or more alkaline compounds, one or more corrosion inhibitors, and one or more oxidized products of one or more antioxidants, the method of making the composition and the method of using the composition.Type: ApplicationFiled: December 9, 2015Publication date: June 23, 2016Applicant: AIR PRODUCTS AND CHEMICALS, INC.Inventors: Rajiv Krishan Agarwal, Mark Richard Brown, Aiping Wu, David Barry Rennie, Yi-Chia Lee, Gene Everad Parris
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Publication number: 20160145102Abstract: The method described herein provides a method for preparing trisilylamine. In one aspect, the method comprises: providing a reaction mixture of trisilylamine and monochlorosilane into a reactor wherein the reaction mixture is at a temperature and pressure sufficient to provide trisilylamine in a liquid phase wherein the reaction mixture is substantially free of an added solvent; contacting the reaction mixture with ammonia to provide a crude mixture comprising trisilylamine and an ammonium chloride solid wherein monochlorosilane is in stoichiometric excess in relation to ammonia; purifiying the crude mixture to provide trisilylamine wherein the trisilyamine is produced at purity level of 90% or greater; and optionally removing the ammonium chloride solid from the reactor.Type: ApplicationFiled: February 2, 2016Publication date: May 26, 2016Applicant: AIR PRODUCTS AND CHEMICALS, INC.Inventors: Rajiv Krishan Agarwal, Sai-Hong Andrew Lo, Howard Paul Withers, JR., Joseph T. Sluzevich, James Joseph Hart
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Patent number: 9284198Abstract: The method described herein provides a method for preparing trisilylamine. In one aspect, the method comprises: providing a reaction mixture of trisilylamine and monochlorosilane into a reactor wherein the reaction mixture is at a temperature and pressure sufficient to provide trisilylamine in a liquid phase wherein the reaction mixture is substantially free of an added solvent; contacting the reaction mixture with ammonia to provide a crude mixture comprising trisilylamine and an ammonium chloride solid wherein monochlorosilane is in stoichiometric excess in relation to ammonia; purifiying the crude mixture to provide trisilylamine wherein the trisilyamine is produced at purity level of 90% or greater; and optionally removing the ammonium chloride solid from the reactor.Type: GrantFiled: May 22, 2014Date of Patent: March 15, 2016Assignee: Air Products and Chemicals, Inc.Inventors: Rajiv Krishan Agarwal, Sai-Hong Andrew Lo, Howard Paul Withers, Jr., Joseph T. Sluzevich, James Joseph Hart
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Publication number: 20150004089Abstract: The method described herein provides a method for preparing trisilylamine. In one aspect, the method comprises: providing a reaction mixture of trisilylamine and monochlorosilane into a reactor wherein the reaction mixture is at a temperature and pressure sufficient to provide trisilylamine in a liquid phase wherein the reaction mixture is substantially free of an added solvent; contacting the reaction mixture with ammonia to provide a crude mixture comprising trisilylamine and an ammonium chloride solid wherein monochlorosilane is in stoichiometric excess in relation to ammonia; purifiying the crude mixture to provide trisilylamine wherein the trisilyamine is produced at purity level of 90% or greater; and optionally removing the ammonium chloride solid from the reactor.Type: ApplicationFiled: May 22, 2014Publication date: January 1, 2015Applicant: AIR PRODUCTS AND CHEMICALS, INC.Inventors: Rajiv Krishan Agarwal, Sai-Hong Andrew Lo, Howard Paul Withers, JR., Joseph T. Sluzevich, James Joseph Hart
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Publication number: 20140196664Abstract: Condensable materials, such as but not limited to tungsten fluoride (WF6), can be used deposit films in a chemical vapor deposition (CVD) process. Described herein are methods to collect and reuse the condensable materials that are unreacted in the production process rather than treat these materials as waste. In one embodiment, when a condensable material, such as gaseous WF6, is not supplied to the CVD reactor, it is redirected to a recovery cabinet for capture.Type: ApplicationFiled: January 7, 2014Publication date: July 17, 2014Applicant: AIR PRODUCTS AND CHEMICALS, INC.Inventors: Andrew David Johnson, Rajiv Krishan Agarwal, Heui-Bok Ahn, William Jack Casteel, JR., Eugene Joseph Karwacki, JR., John Francis Lehmann, David Charles Winchester