Abstract: A rolling-element bearing for bearing rotating components in vacuum devices includes a plurality of rolling elements (10) arranged between bearing elements (12, 14). A bearing compartment (26) is for example closed by sealing elements (22, 24) on both sides. The sealing elements (22, 24) have a minor sealing gap(s). The rolling-elements bearing is used in vacuum sections in which a pressure of less than 10?3 mbar prevails.

Abstract: A Holweck vacuum pump includes a pump rotor (16) having a rotating tube (24), a respective pump stator (12,14) comprising a helical thread groove (21,23) on the radial inside and outside of said rotor tube (24), and an inlet-side rotor blade disk (28) provided with a supporting ring (30) which supports said rotor tube (24). The blades (18) of said blade disk include rotor-side shoulders (40) which support the supporting ring (30).

Abstract: A friction vacuum pump (10) comprises a housing (12) defining a vaneless pump stator (30), a rotor drive and a rotor support which rotatably supports a pump rotor (16) provided with a vane (18). The housing (12) surrounds the overall axial length of the pump rotor (16), the rotor drive and the rotor support. Prior art housings are of multipart configuration and thus comprise seals between the housing portions. The seals are difficult to coat and may be or become locations where leaks occur. In contrast, the housing (12) is of one-piece configuration such that, in any case, the region of the housing (12) which is in contact with the vacuum gas is free of seals.

Abstract: A device (1), for evacuating a chamber to pressures in the high vacuum range includes a suction-side vacuum pump (2) and an atmospheric-pressure-side vacuum pump (3). The suction-side vacuum pump (2) is a mechanical kinetic vacuum pump with a rotor (11) and a stator (10). The stator (10) has a rotationally-symmetrical inner surface which matches the outer rotor geometry. The rotor (11) in the mechanical kinetic vacuum pump (2) is provided with a structure (13) carrying out the gas pumping. Said gas pumping structure comprises webs (14), the angle and width of which decrease from the suction side to the pressure side. The gas throughflow is improved. The outer diameter of the rotor (11) and the inner diameter of the stator (10) of the suctnion-side pump decrease from the suction side to the pressure side.

Abstract: A device (1), for evacuating a chamber to pressures in the high vacuum range includes a suction-side vacuum pump (2) and an atmospheric-pressure-side vacuum pump (3). The suction-side vacuum pump (2) is a mechanical kinetic vacuum pump with a rotor (11) and a stator (10). The stator (10) has a rotationally-symmetrical inner surface which matches the outer rotor geometry. The rotor (11) in the mechanical kinetic vacuum pump (2) is provided with a structure (13) carrying out the gas pumping. Said gas pumping structure comprises webs (14), the angle and width of which decrease from the suction side to the pressure side. The gas throughflow is improved. The outer diameter of the rotor (11) and the inner diameter of the stator (10) of the suctnion-side pump decrease from the suction side to the pressure side.

Abstract: A vacuum pump (1) includes a housing (2) in which a suction inlet opening (5) is defined. A vibration absorber (7) includes a suspension body (8) and an absorber jacket (9). The housing (2) of the vacuum pump (1) is connected directly to one end of the suspension body (8) in vacuum-tight connection and an opposite end of the suspension body carries a connecting port (14). By connecting the suspension body directly with the housing without mechanically releasable interconnection elements, the overall height of the pump and suspension body assembly is reduced.

Abstract: The invention relates to a turbomolecular vacuum pump comprising rows of rotor blades (3) and rows of stator blades (4) that alternately engage with one another at varying angles of attack (&agr;). The aim of the invention is to improve the properties of such a pump. To this end, at least a part of the blades (1 or 2) of the rows of blades (3 or 4) that are mounted on the pressure side thickens towards the rim facing the pressure side.

Abstract: A friction pump (1), such as turbomolecular pump, includes a steel housing (2) in which a steel shaft (15) is supported by a bearing (16). A rotor (4) with a central bore (21) is mounted on the shaft. In order to reduce the risk of the joint area between the rotor and the shaft becoming loose, a ring groove (26, 31) which encompasses the joint area between the rotor is provided in an area adjacent at least one of the faces of the rotor. A reinforcing ring (34, 35, 38) of a high strength, low thermal expansion material encompasses one of a thrust member (28) and cylindrical rotor sections (32, 37) adjacent the shaft.

Abstract: A friction vacuum pump (1) with a frame (5), stator (3), rotor (4) and housing; all functional elements of the pump are combined into one unit (22), which, in turn, can be inserted into a housing (19, 55) that has been adapted to a specific application; using this procedure, all separate connection housing can be eliminated and optimal conductance can be achieved (FIG. 1).

Abstract: The invention relates to a friction vacuum pump (1) with a stator (3) and a rotor (4), which form at least two pump stages (12, 13, 14) with one gas inlet (23, 28) each, as well as with junction for the pump stages, which are equipped with junction openings (36,37) and serve for the connection of the gas inlets (23, 28) of the pump stages with devices to be evacuated; in order to avoid high conductance losses it is proposed that the junction openings (36, 37) are located in a plane which is disposed laterally adjacent to the pump stages (12, 13, 14) such that the distance between the junction openings (36, 37) and the rotor axis (15) is of minimum feasible size.