Patents by Inventor Ralf Frese

Ralf Frese has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Measuring system for measuring an imaging quality of an EUV lens
    Patent number: 9494483
    Abstract: A measuring system (10) for measuring an imaging quality of an EUV lens (30) includes a diffractive test structure (26), a measurement light radiating device (16) which is configured to radiate measurement light (21) in the EUV wavelength range onto the test structure, a variation device (28) for varying at least one image-determining parameter of an imaging of the test structure that is effected by a lens, a detector (14) for recording an image stack including a plurality of images generated with different image-determining parameters being set, and an evaluation device (15) which is configured to determine the imaging quality of the lens from the image stack.
    Type: Grant
    Filed: September 23, 2014
    Date of Patent: November 15, 2016
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Ralf Frese, Michael Samaniego, Markus Deguenther, Helmut Haidner, Rainer Hoch, Martin Schriever
  • Measuring System for Measuring an Imaging Quality of an EUV Lens
    Publication number: 20150009492
    Abstract: A measuring system (10) for measuring an imaging quality of an EUV lens (30) includes a diffractive test structure (26), a measurement light radiating device (16) which is configured to radiate measurement light (21) in the EUV wavelength range onto the test structure, a variation device (28) for varying at least one image-determining parameter of an imaging of the test structure that is effected by a lens, a detector (14) for recording an image stack including a plurality of images generated with different image-determining parameters being set, and an evaluation device (15) which is configured to determine the imaging quality of the lens from the image stack.
    Type: Application
    Filed: September 23, 2014
    Publication date: January 8, 2015
    Inventors: Ralf Frese, Michael Samaniego, Markus Deguenther, Helmut Haidner, Rainer Hoch, Martin Schriever