Abstract: The invention relates to a process for manufacturing chlorosilanes, in which methyl-rich disilane, polysilane and siloxane residues from the Müller-Rochow synthesis or a chlorosilane synthesis are reduced in quantity. It comprises the steps: a) reaction of silicon with alkyl halogenides, aryl halogenides or hydrogen chloride, b) reaction of at least one high-boiling product fraction from step a) with at least one halogenide and c) reaction of at least one high-boiling product fraction resulting from step b) with alkyl halogenides, aryl halogenides and/or chlorosilanes.