Abstract: A spectrometer device includes an optical interference filter which is designed to filter specific wavelength ranges of an incident light beam on passage through the optical interference filter. The spectrometer device also includes a detector device which is designed to detect the filtered light beam. Further, the spectrometer device includes a focusing device with a reflective surface. The focusing device is designed to focus the filtered light beam onto the detector device by reflection on the surface.

Abstract: The invention relates to a method for operating an optical component (100) having a mirror element (20), a substrate (30) for carrying the mirror element (20), an actuator device (40) for tilting the mirror element (20) about one or two tilt axes (28), which actuator device has a first actuator electrode structure (42) and a second actuator electrode structure (44), and a sensor device (50) for detecting a tilt angle (?) of the mirror element (20). The first actuator electrode structure (42) in this case comprises a plurality of first active actuator electrodes (421) and at least one first passive actuator electrode (422). The second actuator electrode structure (44) in this case comprises a plurality of second active actuator electrodes (441) and at least one second passive actuator electrode (442). At least one of the first active actuator electrodes (421) is subjected to a first voltage (U1) and at least one of the second active actuator electrodes (442) is subjected to a second voltage (U2).

Abstract: The invention relates to a microelectromechanical apparatus (100, 200) comprising one or more microelectromechanical devices (130) each having a mirror element (134), an actuator (132) for moving the respective mirror element (134), and a heating element (138, 240) for heating the respective mirror element (134), wherein the microelectromechanical apparatus (100) comprises one or more temperature sensors (135, 145, 210, 212) and an electronic system (125, 225), wherein the control electronic system (125, 225) is configured to determine a temperature value of the respective mirror element (134) using the one or more temperature sensors (135) for each mirror element (134), and the electronic system (125, 225) is further configured to adjust a heating power for each of the heating elements (138, 240).

Abstract: The disclosure relates to an interferometer element for use in a spectrometer which includes a micromechanical Fabry-Perot filter element, which has at least a first mirror element, a second mirror element, and a third mirror element. Each of the first mirror element, the second mirror element, and the third mirror element are arranged in series in an optical path of the interferometer element, and at least one of a first distance between the first and second mirror elements, and a second distance between the second and third mirror elements is modifiable.

Abstract: An interferometer includes a holding element having an actuation recess, a first mirror element arranged on the holding element opposite the actuation recess, and a second mirror element arranged opposite the first mirror element at a mirror distance, to form an optical slit. The first mirror element is arranged between the second mirror element and the holding element and the optical slit is spatially separated from the actuation recess by the first mirror element. The interferometer further includes an electrode pair including a first actuation electrode in one of the mirror elements and a second actuation electrode on a side of the actuation recess opposite the first actuation electrode. The mirror distance can be varied by applying an electrical voltage to the electrode pair.

Abstract: A spectrometer device includes an optical interference filter which is designed to filter specific wavelength ranges of an incident light beam on passage through the optical interference filter. The spectrometer device also includes a detector device which is designed to detect the filtered light beam. Further, the spectrometer device includes a focusing device with a reflective surface. The focusing device is designed to focus the filtered light beam onto the detector device by reflection on the surface.

Abstract: The disclosure relates to an interferometer element for use in a spectrometer which includes a micromechanical Fabry-Perot filter element, which has at least a first mirror element, a second mirror element, and a third mirror element. Each of the first mirror element, the second mirror element, and the third mirror element are arranged in series in an optical path of the interferometer element, and at least one of a first distance between the first and second mirror elements, and a second distance between the second and third mirror elements is modifiable.

Abstract: An interferometer includes a holding element having an actuation recess, a first mirror element arranged on the holding element opposite the actuation recess, and a second mirror element arranged opposite the first mirror element at a mirror distance, to form an optical slit. The first mirror element is arranged between the second mirror element and the holding element and the optical slit is spatially separated from the actuation recess by the first mirror element. The interferometer further includes an electrode pair including a first actuation electrode in one of the mirror elements and a second actuation electrode on a side of the actuation recess opposite the first actuation electrode. The mirror distance can be varied by applying an electrical voltage to the electrode pair.

Abstract: A pivot apparatus, in particular a pivot apparatus for a micromirror, a fixed base frame being connected, directly or indirectly via an intermediate frame, to a pivotable carrier element. Spring elements having flexural springs are respectively disposed between the base frame and carrier element, base frame and intermediate frame, and intermediate frame and carrier element. The use of flexural springs enables good thermal coupling between the individual components, and an increase in robustness. The pivot apparatus can be embodied in particular as a microelectromechanical system.

Abstract: A pivot apparatus, in particular a pivot apparatus for a micromirror, a fixed base frame being connected, directly or indirectly via an intermediate frame, to a pivotable carrier element. Spring elements having flexural springs are respectively disposed between the base frame and carrier element, base frame and intermediate frame, and intermediate frame and carrier element. The use of flexural springs enables good thermal coupling between the individual components, and an increase in robustness. The pivot apparatus can be embodied in particular as a microelectromechanical system.

Abstract: The present invention consists of an optical sensor for determining the angle and the torque of a rotatable object (13). The sensor contains at least one patterned surface (1) an ASIC (3), at least one lens (2) and at least one EMR source (16, 17). The ASIC (3) comprises processing means and an array of detectors for EMR. The at least one EMR source (16, 17) illuminates the patterned surface (1) and the at least one lens (2) focuses a part of the reflected EMR (5) from the patterned surface (1) onto the array of detectors for EMR. The patterned surface (1) contains a pattern including turning marks and laser marks (8). The at least one lens (2) focuses substantially EMR reflected by the turning marks (14) onto the array of detectors. The turning marks (14) are non-symmetrical.

Abstract: A device for measuring an angle and/or the torque acting on a rotatable body is proposed according to the invention, whereby the rotational angle is detected by means of magnetic or optical sensors. In particular, in a preferred exemplary embodiment, two devices (7, 8) are proposed, each of which comprises two optically readable code tracks. The two code tracks (1a, 1b or 2a, 2b) on one device (7 or 8) are similar in design and are offset in relation to each other, so that associated sensors (4) output a digital signal. The rotational angle is calculated based on the lag between the two digital signals. In a further embodiment it is provided that a torsion element (5) having a known torsional stiffness is situated between the two devices (7, 8). Torque transferred by the rotatable body (3) can also be calculated therefore from the angular difference of the two devices 7, 8. The device is used preferably in the steering axle of a motor vehicle.

Abstract: Detection of patterned regions on code-carriers assigned to rotatable components is achieved by means of an optical sensor arrangement having illumination arrangement. Upon rotation of coded regions, reflections thereof are detected and focused on surface-arrays on a surface of an ASIC. A multiturn-code-carrier is assigned to a rotatable component, the multiturn-code-carrier having a detectable surface and being rotatable in a ratio which is different from the rotating ratio of code-carrier, on which said coded regions are provided.

Abstract: The present invention consists of an optical sensor for determining the angle and the torque of a rotatable object (13). The sensor contains at least one patterned surface (1) an ASIC (3), at least one lens (2) and at least one EMR source (16, 17). The ASIC (3) comprises processing means and an array of detectors for EMR. The at least one EMR source (16, 17) illuminates the patterned surface (1) and the at least one lens (2) focuses a part of the reflected EMR (5) from the patterned surface (1) onto the array of detectors for EMR. The patterned surface (1) contains a pattern including turning marks and laser marks (8). The at least one lens (2) focuses substantially EMR reflected by the turning marks (14) onto the array of detectors. The turning marks (14) are non-symmetrical.

Abstract: The invention proposes a method for determining a rotation angle (&PHgr;) and/or an angular difference (&dgr;) in a divided shaft (3), which has a number of phase tracks (1a, 1b, 2a, and 2b) disposed on it, which are provided with codes. Via an evaluation unit, each group of tracks (1a, 1b, 2a, and 2b) supplies a phase signal (&agr;1, &agr;2), which is respectively ambiguous with regard to a rotation of the shaft (3). The at least two phase signals (&agr;1, &agr;2) are added up in a weighted fashion to produce a signal S from which the integer portion and the non-integer portion are calculated. The non-integer portion is proportional to the angular difference (&dgr;) between the two track groups. The torque (M) is determined through multiplication with the spring rate of an interposed torque rod. The unambiguous torque (&PHgr;) is determined from the integer portion of the signal (S) and a phase value (&agr;1) or (&agr;2) with the aid of a weighted addition.

Abstract: The invention proposes a method for determining a rotation angle (&PHgr;) and/or an angular difference (&dgr;) in a divided shaft (3), which has a number of phase tracks (1a, 1b, 2a, and 2b) disposed on it, which are provided with codes. Via an evaluation unit, each group of tracks (1a, 1b, 2a, and 2b) supplies a phase signal (&agr;1, &agr;2), which is respectively ambiguous with regard to a rotation of the shaft (3). The at least two phase signals (&agr;1, &agr;2) are added up in a weighted fashion to produce a signal S from which the integer portion and the non-integer portion are calculated. The non-integer portion is proportional to the angular difference (&dgr;) between the two track groups. The torque (M) is determined through multiplication with the spring rate of an interposed torque rod. The unambiguous torque (&PHgr;) is determined from the integer portion of the signal (S) and a phase value (&agr;1) or (&agr;2) with the aid of a weighted addition.

Abstract: A device for measuring an angle and/or the torque acting on a rotatable body is proposed according to the invention, whereby the rotational angle is detected by means of magnetic or optical sensors. In particular, in a preferred exemplary embodiment, two devices (7, 8) are proposed, each of which comprises two optically readable code tracks. The two code tracks (1a, 1b or 2a, 2b) on one device (7 or 8) are similar in design and are offset in relation to each other, so that associated sensors (4) output a digital signal. The rotational angle is calculated based on the lag between the two digital signals. In a further embodiment it is provided that a torsion element (5) having a known torsional stiffness is situated between the two devices (7, 8). Torque transferred by the rotatable body (3) can also be calculated therefore from the angular difference of the two devices 7, 8. The device is used preferably in the steering axle of a motor vehicle.

Abstract: An apparatus (1) is described for determining the angle of a first rotatable body which coacts with two further rotatable bodies. The angle of the two further bodies can be measured, and the angle of the first body can be calculated therefrom. According to the present invention, means are provided with which simultaneous measurement of the angles of the two further bodies can be achieved. The accuracy of the determination of the angle of the first body is thereby improved.

Abstract: An apparatus (1) is described for determining the angle of a first rotatable body which coacts with two further rotatable bodies. The angle of the two further bodies can be measured, and the angle of the first body can be calculated therefrom. According to the present invention, means are provided with which simultaneous measurement of the angles of the two further bodies can be achieved. The accuracy of the determination of the angle of the first body is thereby improved.

Abstract: A device for detecting faults including sensor failure in a sensor that outputs a substantially binary output signal is described. For fault detection, the various terminals of the sensor are supplied with substantially binary voltages from a fault detection circuit and the changes in the output signal of the sensor that occur as a consequence of the supplied voltages are evaluated for fault detection.