Abstract: The present invention discloses method and device for determining an element concentration of an EDS/WDS spectrum of an unknown sample. The method comprises performing a preliminary quantification of the EDS/WDS spectrum of the unknown sample and identify a plurality of elements in the unknown sample; identify at least one pre-stored standard sample including the plurality of elements; determine, for each element of the plurality of elements, a similarity score for the corresponding element in each identified standard sample; select, for each element of the plurality of elements, the one standard sample among the at least one standard sample by using the determined similarity score and identify the concentration of the corresponding element in the selected standard sample; and perform quantification of the EDS/WDS spectrum of the unknown sample by using, for each element of the plurality of elements, the identified concentration of the respectively selected standard sample.

Abstract: A method comprises the steps of: (a) Obtaining a measured X-ray spectrum for the coated sample, for determining characteristics for the sample and for a coating material; (b) Determining a simulated X-ray spectrum for the sample based on an initial sample composition; (c) Determining an adapted sample composition that improves a match between the characteristics of the sample and an adapted simulated X ray spectrum; (d) Determining an adapted coating thickness for the coating material based on the adapted sample composition and characteristics of the coating; and (e) Repeating the steps (b) to (d) using the adapted sample composition and the adapted coating thickness of the coating material instead of the initial values, wherein the coating thickness is used for determining an absorption of X-rays.

Abstract: A method comprises the steps of: (a) Obtaining a measured X-ray spectrum for the coated sample, for determining characteristics for the sample and for a coating material; (b) Determining a simulated X-ray spectrum for the sample based on an initial sample composition; (c) Determining an adapted sample composition that improves a match between the characteristics of the sample and an adapted simulated X ray spectrum; (d) Determining an adapted coating thickness for the coating material based on the adapted sample composition and characteristics of the coating; and (e) Repeating the steps (b) to (d) using the adapted sample composition and the adapted coating thickness of the coating material instead of the initial values, wherein the coating thickness is used for determining an absorption of X-rays.