Patents by Inventor Ralph Busskamp

Ralph Busskamp has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Support element for an automatic load platform of a silicon wafer exposure unit
    Patent number: 5572036
    Abstract: A support element of an automatic load platform of a silicon wafer exposure unit, having a circular cross-section, with a first outer diameter adapted to the guide of a load station, which diameter is smaller than that of a silicon wafer, wherein the circular disc of the support element has at its circumference in a direction parallel to the insertion direction of the load station at least partly enlarged portions and therewith a second outer diameter which corresponds approximately to that of the silicon wafer, and wherein the greatest width of the support element at right angles to the insertion direction corresponds to that of the circular disc.
    Type: Grant
    Filed: September 11, 1995
    Date of Patent: November 5, 1996
    Assignee: U.S. Philips Corporation
    Inventors: Andreas Gakis, Ralph Busskamp