Abstract: A method and apparatus for ultrasonic scanning of a wafer assembly is disclosed. The wafer assembly is held in a wafer chuck and rotated. A transducer generates ultrasound in the wafer assembly and the ultrasound emitted from the wafer assembly is sensed. A controller adjusts the relative positions of the wafer and the transducer and controls the transducer to generate ultrasound at a number of scan points.

Abstract: A method and apparatus for ultrasonic inspection of one or more objects in an object holder. In a first embodiment of the method, the objects are immersed in a tank containing coupling fluid and a flow of fluid is generated in the tank beneath the object holder, thereby producing a suction pressure that tends to hold the objects in the holder. Each object is insonified with ultrasound from an ultrasonic transducer and the ultrasound reflected from or transmitted through the object is sensed. In a further embodiment, the object to be inspected is moved between the upper and lower chambers of a scanning station, over a surface in the lower chamber. A coupling fluid is supplied to the upper chamber so that coupling fluid flows through one or more holes in the bottom of the upper chamber and fills the space between the ultrasound emitting surface of the ultrasonic transducer and the object to be scanned, thereby providing coupling for the ultrasound and tending the hold the objects in the object holder.

Abstract: A method and apparatus for retaining a part in a carrier during an ultrasonic scan. The part is positioned above a first opening in a lower chamber while air is drawn out of a second opening in the lower chamber to apply suction to the lower surface of the part. An ultrasonic transducer is housed in an upper chamber that dispenses coupling fluid to the top surface of the object.

Abstract: A method and apparatus are disclosed for coupling ultrasound between an ultrasonic transducer and an object. A fluid cavity in an upper chamber has an inlet for receiving a flow of coupling fluid, a first aperture for admitting the ultrasonic transducer into the fluid cavity and a second aperture for dispensing coupling fluid from the fluid cavity to the object. The first and second apertures may be sized to restrict flow of coupling fluid from the fluid cavity. The focus of the ultrasound transducer may be varied by moving the ultrasonic transducer relative to the upper chamber.

Abstract: A method and apparatus for ultrasonic inspection of one or more objects in an object holder. In a first embodiment of the method, the objects are immersed in a tank containing coupling fluid and a flow of fluid is generated in the tank beneath the object holder, thereby producing a suction pressure that tends to hold the objects in the holder. Each object is insonified with ultrasound from an ultrasonic transducer and the ultrasound reflected from or transmitted through the object is sensed. In a further embodiment, the object to be inspected is moved between the upper and lower chambers of a scanning station, over a surface in the lower chamber. A coupling fluid is supplied to the upper chamber so that coupling fluid flows through one or more holes in the bottom of the upper chamber and fills the space between the ultrasound emitting surface of the ultrasonic transducer and the object to be scanned, thereby providing coupling for the ultrasound and tending the hold the objects in the object holder.

Abstract: A method and apparatus for retaining a part in a carrier during an ultrasonic scan. The part is positioned above a first opening in a lower chamber while air is drawn out of a second opening in the lower chamber to apply suction to the lower surface of the part. An ultrasonic transducer is housed in an upper chamber that dispenses coupling fluid to the top surface of the object.

Abstract: A method and apparatus for ultrasonic inspection of one or more objects in an object holder. In a first embodiment of the method, the objects are immersed in a tank containing coupling fluid and a flow of fluid is generated in the tank beneath the object holder, thereby producing a suction pressure that tends to hold the objects in the holder. Each object is insonified with ultrasound from an ultrasonic transducer and the ultrasound reflected from or transmitted through the object is sensed. In a further embodiment, the object to be inspected is moved between the upper and lower chambers of a scanning station, over a surface in the lower chamber. A coupling fluid is supplied to the upper chamber so that coupling fluid flows through one or more holes in the bottom of the upper chamber and fills the space between the ultrasound emitting surface of the ultrasonic transducer and the object to be scanned, thereby providing coupling for the ultrasound and tending the hold the objects in the object holder.