Patents by Inventor Ralph P. Ulrich

Ralph P. Ulrich has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Phosphorus removal from surface regions of phosphosilicate glass microcircuit layers
    Patent number: 4260425
    Abstract: A method for reducing the phosphorus concentration in exposed surface areas of a phosphosilicate glass microcircuit layer to reduce the corrosivity of the layer. The method comprises a two step treatment of the layer surface: first, exposing the surface to water vapor at an elevated temperature for a time sufficient to hydrate available phosphorus in a region adjoining the surface, and second, removing the resultant acidic hydration products by rinsing the surface with water.
    Type: Grant
    Filed: April 4, 1979
    Date of Patent: April 7, 1981
    Assignee: Tektronix, Inc.
    Inventors: Ralph P. Ulrich, Deborah W. Hewitt