Patents by Inventor Ralph Sowden

Ralph Sowden has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Support for semiconductor substrate
    Patent number: 9401299
    Abstract: A moveable semiconductor substrate support includes a control device receiving data from one or more sensors and providing control signals to one or more actuators. The control device is coupled to and moves with the moveable substrate support to facilitate flexible and complex operation of the substrate support itself.
    Type: Grant
    Filed: September 26, 2011
    Date of Patent: July 26, 2016
    Assignee: Rudolph Technologies, Inc.
    Inventors: Ralph Sowden, Kevin Barr, Matthew Laberge, Troy Palm, Dennis Benson
  • SUPPORT FOR SEMICONDUCTOR SUBSTRATE
    Publication number: 20130330154
    Abstract: A moveable semiconductor substrate support includes a control device receiving data from one or more sensors and providing control signals to one or more actuators. The control device is coupled to and moves with the moveable substrate support to facilitate flexible and complex operation of the substrate support itself.
    Type: Application
    Filed: September 26, 2011
    Publication date: December 12, 2013
    Inventors: Ralph Sowden, Kevin Barr, Matthew Laberge, Troy Palm, Dennis Benson