Abstract: Method and apparatus for depositing film on flexible (plastic/metal) foil and/or temperature sensitive substrates (101) by combustion chemical vapor deposition (C-CVD). A substrate (101) is held in place to provide physical and conductive thermal contact between the substrate (101) and a substrate holder (102). The substrate holder (102) is cooled using a cooling fluid and the substrate (101) and burner are moved relative to each other as C-CVD takes place. Heating of the substrate (101) during C-CVD is controlled and deterioration by heating is avoided. The foil or substrate (101) is suitable, in particular, for use in flat and flexible displays.

Abstract: Method for depositing film on flexible (plastic/metal) foil and/or temperature sensitive substrates (101) by combustion chemical vapor deposition (C-CVD). A substrate (101) is held in place by suction to provide physical and thermal contact between the substrate (101) and a substrate holder (102) and, simultaneously, the substrate holder (102) is cooled using a cooling fluid and the substrate (101). Heating of the substrate (101) during C-CVD is controlled and deterioration by heating is avoided. The foil or substrate (101) is suitable, in particular, for use in flat and flexible displays.

Abstract: A temperature control system for a frame (20) including a thermal electric cooling (TEC) element (32) having a first face (34) and a second face (36), the TEC element (32) disposed to form a gap (50) between the first face (34) and the frame (20), and a fluid heat transfer element (38) thermally connected to the second face (36). The temperature control system also employs a thermal group, a flushable reservoir, and/or a phase change element, as desired.