Patents by Inventor Ralph Wayne Thomas

Ralph Wayne Thomas has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of ozone conversion in semiconductor manufacturing
    Patent number: 6622398
    Abstract: A method for processing semiconductor wafers and similar articles has an ozone remover connected to a processing chamber. The ozone remover has a light chamber surrounded by reflectors. Ozone and other processing gases and vapors flow out of the processing chamber and into the light chamber. Ultraviolet lights in the ozone remover flood the light chamber with ultraviolet light, converting ozone into oxygen. The amount of ozone released into the environment is reduced. A recirculation line receives the gases and vapors flowing out of the ozone remover. Oxygen and any remaining ozone are separated from other gas and vapor components and are recycled back to an ozone generator, to increase the ozone generator efficiency in supplying the machine with ozone.
    Type: Grant
    Filed: May 22, 2002
    Date of Patent: September 23, 2003
    Assignee: Semitool, Inc.
    Inventor: Ralph Wayne Thomas
  • Ozone conversion in semiconductor manufacturing
    Publication number: 20020139005
    Abstract: A machine for processing semiconductor wafers and similar articles has an ozone remover connected to a processing chamber. The ozone remover has a light chamber surrounded by reflectors. Ozone and other processing gases and vapors flow out of the processing chamber and into the light chamber. Ultraviolet lights in the ozone remover flood the light chamber with ultraviolet light, converting ozone into oxygen. The amount of ozone released into the environment is reduced. A recirculation line receives the gases and vapors flowing out of the ozone remover. Oxygen and any remaining ozone are separated from other gas and vapor components and are recycled back to an ozone generator, to increase the ozone generator efficiency in supplying the machine with ozone.
    Type: Application
    Filed: May 22, 2002
    Publication date: October 3, 2002
    Applicant: Semitool, Inc.
    Inventor: Ralph Wayne Thomas
  • Ozone conversion in semiconductor manufacturing
    Patent number: 6408535
    Abstract: A machine for processing semiconductor wafers and similar articles has an ozone remover connected to a processing chamber. The ozone remover has a light chamber surrounded by reflectors. Ozone and other processing gases and vapors flow out of the processing chamber and into the light chamber. Ultraviolet lights in the ozone remover flood the light chamber with ultraviolet light, converting ozone into oxygen. The amount of ozone released into the environment is reduced. A recirculation line receives the gases and vapors flowing out of the ozone remover. Oxygen and any remaining ozone are separated from other gas and vapor components and are recycled back to an ozone generator, to increase the ozone generator efficiency in supplying the machine with ozone.
    Type: Grant
    Filed: August 26, 1999
    Date of Patent: June 25, 2002
    Assignee: Semitool, Inc.
    Inventor: Ralph Wayne Thomas