Abstract: Methods, apparatus, and processor-readable storage media for automatically sequencing database objects are provided herein. An example computer-implemented method includes obtaining one or more database scripts to be executed on at least one database, wherein each database script is associated with one or more database objects; for each of the database scripts: parsing the database script to identify object information corresponding to the one or more database objects associated with the database script, and determining one or more dependencies of the one or more database objects based at least in part on the object information; automatically determining an order to execute the one or more database scripts based at least in part on the object dependencies of the one or more database objects determined for each of the database scripts; and initiating an execution the one or more database scripts in accordance with the determined order.

Abstract: A gas expansion module for use with semiconductor wafer loadlocks and other regulated-pressure components of semiconductor processing tools is provided. The gas expansion module may be barometrically isolated from the loadlock or other component and pumped down to a vacuum condition while the loadlock is performing operations at a higher pressure, such as ambient atmospheric conditions. After an initial pump-down of the loadlock is performed, the gas expansion module may be fluidly joined to the loadlock volume and the gases within each allowed to reach equilibrium. A further pump-down of the combined volume may be used to bring the loadlock pressure to a desired vacuum condition.

Abstract: A gas expansion module for use with semiconductor wafer loadlocks and other regulated-pressure components of semiconductor processing tools is provided. The gas expansion module may be barometrically isolated from the loadlock or other component and pumped down to a vacuum condition while the loadlock is performing operations at a higher pressure, such as ambient atmospheric conditions. After an initial pump-down of the loadlock is performed, the gas expansion module may be fluidly joined to the loadlock volume and the gases within each allowed to reach equilibrium. A further pump-down of the combined volume may be used to bring the loadlock pressure to a desired vacuum condition.

Abstract: An object proximity alert system for an object network includes an object module having a data processing unit; a GPS unit; and a transceiver, the latter both connected to the data processing unit. A first object in the network has the module, such that the data processing unit obtains first object position data from the GPS unit, calculates the speed of the object, and transmits position data using the transceiver to other network objects, the data processing unit calculates the respective positions of the first object with the objects in the network based on the data, and compares the position data against a preset target separation between the first object and the other objects. In the event a separation distance between the first object and another object in the network is less than the target separation, the data processing unit generates an alarm in at least the first object.