Abstract: An optical system is described. The optical system comprises an input pupil for input of illumination radiation, and first and second field splitting stages. The first field splitting stage is configured to divide input illumination radiation into a first selected number of illumination beams along a selected first axis. The second field splitting stage is configured for receiving the first selected number of illumination beams and dividing said first selected number of illumination beam into a second selected number of illumination beams along a selected second axis. The optical system thus provides a selected number of illumination beams exiting through said output pupil and providing illumination of a region of a selected spatial shape.

Abstract: An optical inspection system for inspection of a mask or a wafer, the system including an objective for collecting light coming from an object being inspected, a relay component placed on an optical path between the objective and an imaging component, for collecting light from the objective, and relaying the collected light to the imaging component, wherein the optical inspection system further includes a mirror placed on the optical path between the objective and the relay module, for changing a direction of the optical path at an angle away from an optical axis of the objective and into an optical axis of the relay component, the relay component includes reflecting surfaces arranged such that the collected light passes back and forth within the relay component three times. Related apparatus and methods are also described.

Abstract: A pulse stretcher unit, and a respecting inspection system are disclosed. The pulse stretcher unit comprises a selected number of beam splitters arranged along a selected main path and comprising an input beam splitter, an output beam splitter and one or more intermediate beam splitters, and an arrangement of light reflecting surfaces defining a selected number of n auxiliary paths extending between said selected number of beam splitters. Wherein said selected number of beam splitters direct input beam between said selected main path and said selected number of auxiliary paths for splitting an input pulse into a series of pulses having generally equal amplitude. And wherein lengths of said auxiliary paths follow approximately a series of the form L/2k for k=0, 1, 2, where L is a selected length of an auxiliary path.

Abstract: A method includes, receiving a layout design of at least part of an electronic module, the design specifying at least (i) an electronic device coupled to at least a substrate, and (ii) an electrical trace that is connected to the electronic device and has a designed route. A digital input, which represents at least part of an actual electronic module that was manufactured in accordance with the layout design but without at least a portion of the electrical trace, is received. An error in coupling the electronic device to the substrate, relative to the layout design, is estimated based on the digital input. An actual route that corrects the estimated error, is calculated for at least the portion of the electrical trace. At least the portion of the electrical trace is formed on the substrate of the actual electronic module, along the actual route instead of the designed route.

Abstract: An optical inspection apparatus includes an interferometer module, which is configured to direct a beam of coherent light toward an area under inspection and to produce a first image of interference fringes of the area. The apparatus also includes a triangulation module configured to project a pattern of structured light onto the area, and at least one image sensor configured to capture the first image of interference fringes and a second image of the pattern that is reflected from the area. Beam combiner optics are configured to direct the beam of coherent light and the projected pattern to impinge on the same location on the area. A processor is configured to process the first and second images in order to generate a 3D map of the area.

Abstract: A method includes, receiving a layout design of at least part of an electronic module, the design specifying at least (i) an electronic device coupled to at least a substrate, and (ii) an electrical trace that is connected to the electronic device and has a designed route. A digital input, which represents at least part of an actual electronic module that was manufactured in accordance with the layout design but without at least a portion of the electrical trace, is received. An error in coupling the electronic device to the substrate, relative to the layout design, is estimated based on the digital input. An actual route that corrects the estimated error, is calculated for at least the portion of the electrical trace. At least the portion of the electrical trace is formed on the substrate of the actual electronic module, along the actual route instead of the designed route.

Abstract: An optical inspection apparatus includes an interferometer module, which is configured to direct a beam of coherent light toward an area under inspection and to produce a first image of interference fringes of the area. The apparatus also includes a triangulation module configured to project a pattern of structured light onto the area, and at least one image sensor configured to capture the first image of interference fringes and a second image of the pattern that is reflected from the area. Beam combiner optics are configured to direct the beam of coherent light and the projected pattern to impinge on the same location on the area. A processor is configured to process the first and second images in order to generate a 3D map of the area.

Abstract: Optical apparatus includes a mount, which holds a workpiece. An array of optical heads project respective patterns of radiation onto the workpiece. A calibration assembly captures images of the respective patterns. A motion assembly, on which the calibration assembly is mounted, transports the calibration assembly among a plurality of different positions between the array of the optical heads and the mount so as to intercept and image, at each of the different positions, a respective pattern projected by a different one of the optical heads. A processor processes the images captured by the calibration assembly at the different positions so as to monitor operation of the apparatus.

Abstract: Optical apparatus includes a mount, which holds a workpiece. An array of optical heads project respective patterns of radiation onto the workpiece. A calibration assembly captures images of the respective patterns. A motion assembly, on which the calibration assembly is mounted, transports the calibration assembly among a plurality of different positions between the array of the optical heads and the mount so as to intercept and image, at each of the different positions, a respective pattern projected by a different one of the optical heads. A processor processes the images captured by the calibration assembly at the different positions so as to monitor operation of the apparatus.

Abstract: A dermatological laser apparatus for irradiating human tissue with optical pulses includes a laser source (2) producing an optical output, a pulse shaper (4) coupled to the laser source for converting the optical output into optical pulses having desired shapes, and an optical delivery tool (8) coupled to the pulse shaper for applying the optical pulses sequentially to a multiplicity of sites on the human tissue with consecutively irradiated sites being non-adjacent.

Abstract: An LED-based high power uniform light engine including an array of LEDs having a common anode and a fill factor which exceeds 0.85, the common anode having heat spreading functionality and an active heat sink which is thermally connected to the common anode.

Abstract: An LED-based high power uniform light engine including an array of LEDs having a common anode and a fill factor which exceeds 0.85, the common anode having heat spreading functionality and an active heat sink which is thermally connected to the common anode.

Abstract: An optical power limiter comprises an input optical transmission element, an output optical transmission element, and a power-limiting element disposed between the input and output elements for transmitting optical signals from the input element to the output element. The power-limiting element comprises an optical-limiting solid mixture containing particles of at least one material that produces reversible thermal changes in response to light above a predetermined optical power level, thereby changing the optical transmission properties of the power-limiting element.

Abstract: A side-pumped, diode-pumped solid-state laser cavity includes a conductively cooled housing having an opening for pump radiation from a diode array in close proximity to a laser rod. The pump light is absorbed by the rod and excites the laser ions. The cavity includes a thin, diffuse reflector encircling the rod, having a shaped opening for the collection and redirection of the pump light into the rod, and a good heat conductor as the heat sink and heat conductor. A split heat sink inhibits the flow of heat from the pump diodes into the laser rod, and pre-formed air spacings are designed to provide uniform temperature distribution around the laser rod.

Abstract: A tapered waveguide optical mode transformer (20) includes a tapered core formed on a planar substrate structure (16). To vertically taper the core (21), steps (22) are etched into the top surface of the core. The steps have depths and lengths along the optical axis of tapered waveguide that are selected to transform the optical mode characteristics of a desired optical fiber to the optical mode characteristics of a desired planar waveguide. The core can also be tapered horizontally to form a 2-D tapered waveguide. The tapered waveguide can be integrally included in planar lightwave circuits (PLCs) to reduce light coupling losses between optical fibers and the PLC waveguides.

Abstract: A method for instant splicing of an optical fiber to an optical waveguide or bulk material comprises forming a nanometric conductive layer at the interface between the optical fiber and the optical waveguide or bulk material to be spliced, and applying laser radiation to the interface through the fiber optical internally or through the bulk material externally, to produce an arc discharge due to the laser light electric field. The arc discharge melts and diffuses the conductive layer to produce a permanent splice having a low optical loss.

Abstract: A side-pumped, diode-pumped solid-state laser cavity includes a conductively cooled housing having an opening for pump radiation from a diode array in close proximity to a laser rod. The pump light is absorbed by the rod and excites the laser ions. The cavity includes a thin, diffuse reflector encircling the rod, having a shaped opening for the collection and redirection of the pump light into the rod, and a good heat conductor as the heat sink and heat conductor. A split heat sink inhibits the flow of heat from the pump diodes into the laser rod, and pre-formed air spacings are designed to provide uniform temperature distribution around the laser rod.

Abstract: A method for scanning a surface with a number of different illumination configurations, the method comprises capturing a plurality of images in a sequential manner during a single sweep, each image including one or more lines of pixels, sequentially altering an illumination configuration used to capture the plurality of images according to a predefined sequence of illumination configurations and shifts of the relative position of the imaging unit for capturing each of the plurality of images, and repeating the sequence of illumination configurations settings and associated image capture positions until a desired area of the surface is scanned, wherein said predefined shift is between 10 pixels and less then one pixel.

Abstract: There is provided a system for forming an optical screen, including a continuous wave or pulsed laser transmitter for transmitting a beam of radiation at a predetermined wavelength and forming a planar or curved surface to be traversed by a moving object, at least one receiver including an array of detectors for receiving reflected or scattered beam radiation from the object and directing it towards the detectors for producing a signal, and a detection logic receiving the signal and determining parameters selected from the group of spatial position, velocity and direction of propulsion of them moving object. A method for detecting a moving object is also provided.

Abstract: There is provided an optically driven, transmitting and receiving antenna transformable into an electrically invisible antenna when inactive, including a light source, a semiconductor wafer illuminatable by the light source and a microwave source or sensor. The wafer has a surface for forming optically induced plasma or electron hole concentration, assuming a spatial and temporal pattern defined by a light beam impinging thereon. Upon the wafer being exposed to the light beam having a power level sufficient for creating a dense plasma or electron hole concentration in the wafer, the wafer becomes reflective to microwaves, and returns to transparency when light from the light source is turned off.