Patents by Inventor Rama Kambhampati

Rama Kambhampati has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9634010
    Abstract: A method for forming field effect transistors comprises forming a first dummy gate stack over a first fin, forming a second dummy gate stack over a second fin, depositing a first layer of spacer material on the first dummy gate stack, the first fin, the second dummy gate stack, and the second fin, patterning a first masking layer on the first dummy gate stack and the first fin, etching to remove portions of the first layer of spacer material and form a spacer adjacent to the second dummy gate stack, removing the first masking layer, epitaxially growing a silicon material on the second fin, depositing a layer of oxide material on the first layer of spacer material, the first epitaxial material and the second dummy gate stack, and depositing a second layer of spacer material on the layer of oxide material.
    Type: Grant
    Filed: May 31, 2016
    Date of Patent: April 25, 2017
    Assignees: INTERNATIONAL BUSINESS MACHINES CORPORATION, GLOBALFOUNDRIES INC.
    Inventors: Rama Kambhampati, Junli Wang, Ruilong Xie, Tenko Yamashita
  • Patent number: 9607903
    Abstract: A method for forming field effect transistors comprises forming a first dummy gate stack over a first fin, forming a second dummy gate stack over a second fin, depositing a first layer of spacer material on the first dummy gate stack, the first fin, the second dummy gate stack, and the second fin, patterning a first masking layer on the first dummy gate stack and the first fin, etching to remove portions of the first layer of spacer material and form a spacer adjacent to the second dummy gate stack, removing the first masking layer, epitaxially growing a silicon material on the second fin, depositing a layer of oxide material on the first layer of spacer material, the first epitaxial material and the second dummy gate stack, and depositing a second layer of spacer material on the layer of oxide material.
    Type: Grant
    Filed: August 31, 2016
    Date of Patent: March 28, 2017
    Assignees: INTERNATIONAL BUSINESS MACHINES CORPORATION, GLOBALFOUNDRIES INC.
    Inventors: Rama Kambhampati, Junli Wang, Ruilong Xie, Tenko Yamashita
  • Publication number: 20170040453
    Abstract: A method for forming field effect transistors comprises forming a first dummy gate stack over a first fin, forming a second dummy gate stack over a second fin, depositing a first layer of spacer material on the first dummy gate stack, the first fin, the second dummy gate stack, and the second fin, patterning a first masking layer on the first dummy gate stack and the first fin, etching to remove portions of the first layer of spacer material and form a spacer adjacent to the second dummy gate stack, removing the first masking layer, epitaxially growing a silicon material on the second fin, depositing a layer of oxide material on the first layer of spacer material, the first epitaxial material and the second dummy gate stack, and depositing a second layer of spacer material on the layer of oxide material.
    Type: Application
    Filed: August 4, 2015
    Publication date: February 9, 2017
    Inventors: Rama Kambhampati, Junli Wang, Ruilong Xie, Tenko Yamashita
  • Publication number: 20170040325
    Abstract: A method for forming field effect transistors comprises forming a first dummy gate stack over a first fin, forming a second dummy gate stack over a second fin, depositing a first layer of spacer material on the first dummy gate stack, the first fin, the second dummy gate stack, and the second fin, patterning a first masking layer on the first dummy gate stack and the first fin, etching to remove portions of the first layer of spacer material and form a spacer adjacent to the second dummy gate stack, removing the first masking layer, epitaxially growing a silicon material on the second fin, depositing a layer of oxide material on the first layer of spacer material, the first epitaxial material and the second dummy gate stack, and depositing a second layer of spacer material on the layer of oxide material.
    Type: Application
    Filed: May 31, 2016
    Publication date: February 9, 2017
    Inventors: Rama Kambhampati, Junli Wang, Ruilong Xie, Tenko Yamashita
  • Publication number: 20170040224
    Abstract: A method for forming field effect transistors comprises forming a first dummy gate stack over a first fin, forming a second dummy gate stack over a second fin, depositing a first layer of spacer material on the first dummy gate stack, the first fin, the second dummy gate stack, and the second fin, patterning a first masking layer on the first dummy gate stack and the first fin, etching to remove portions of the first layer of spacer material and form a spacer adjacent to the second dummy gate stack, removing the first masking layer, epitaxially growing a silicon material on the second fin, depositing a layer of oxide material on the first layer of spacer material, the first epitaxial material and the second dummy gate stack, and depositing a second layer of spacer material on the layer of oxide material.
    Type: Application
    Filed: August 31, 2016
    Publication date: February 9, 2017
    Inventors: Rama Kambhampati, Junli Wang, Ruilong Xie, Tenko Yamashita
  • Patent number: 9548388
    Abstract: A method for forming field effect transistors comprises forming a first dummy gate stack over a first fin, forming a second dummy gate stack over a second fin, depositing a first layer of spacer material on the first dummy gate stack, the first fin, the second dummy gate stack, and the second fin, patterning a first masking layer on the first dummy gate stack and the first fin, etching to remove portions of the first layer of spacer material and form a spacer adjacent to the second dummy gate stack, removing the first masking layer, epitaxially growing a silicon material on the second fin, depositing a layer of oxide material on the first layer of spacer material, the first epitaxial material and the second dummy gate stack, and depositing a second layer of spacer material on the layer of oxide material.
    Type: Grant
    Filed: August 4, 2015
    Date of Patent: January 17, 2017
    Assignees: INTERNATIONAL BUSINESS MACHINES CORPORATION, GLOBALFOUNDRIES, INC.
    Inventors: Rama Kambhampati, Junli Wang, Ruilong Xie, Tenko Yamashita
  • Patent number: 9472670
    Abstract: A method for forming field effect transistors comprises forming a first dummy gate stack over a first fin, forming a second dummy gate stack over a second fin, depositing a first layer of spacer material on the first dummy gate stack, the first fin, the second dummy gate stack, and the second fin, patterning a first masking layer on the first dummy gate stack and the first fin, etching to remove portions of the first layer of spacer material and form a spacer adjacent to the second dummy gate stack, removing the first masking layer, epitaxially growing a silicon material on the second fin, depositing a layer of oxide material on the first layer of spacer material, the first epitaxial material and the second dummy gate stack, and depositing a second layer of spacer material on the layer of oxide material.
    Type: Grant
    Filed: March 30, 2016
    Date of Patent: October 18, 2016
    Assignees: INTERNATIONAL BUSINESS MACHINES CORPORATION, GLOBALFOUNDRIES INC.
    Inventors: Rama Kambhampati, Junli Wang, Ruilong Xie, Tenko Yamashita
  • Patent number: 9252245
    Abstract: A methodology for spacer-last replacement metal gate (RMG) flow that exhibits reduced variability, and the resulting device are disclosed. Embodiments may include forming a dummy gate stack comprising a dummy nitride portion on a dummy oxide portion on a substrate, forming source/drain regions in the substrate at opposite sides of the dummy gate stack, depositing an insulating material over the source/drain regions, coplanar with the dummy gate stack, and replacing the dummy gate stack with a metal gate stack and spacers.
    Type: Grant
    Filed: September 5, 2014
    Date of Patent: February 2, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Murat Akarvardar, Rama Kambhampati
  • Patent number: 9129987
    Abstract: A method includes providing a gate structure having a gate, a first spacer along at least one side of the gate and an interlayer dielectric on at least one of the gate and the first spacer. The interlayer dielectric is removed to reveal the first spacer. The first spacer is removed and a second spacer is deposited on at least one side of the gate. The second spacer is formed of material having a lower dielectric constant than the first spacer.
    Type: Grant
    Filed: January 24, 2014
    Date of Patent: September 8, 2015
    Assignee: GLOBAL FOUNDRIES, Inc.
    Inventors: Jing Wan, Jin Ping Liu, Guillaume Bouche, Andy Wei, Lakshmanan H. Vanamurthy, Cuiqin Xu, Sridhar Kuchibhatla, Rama Kambhampati, Xiuyu Cai
  • Publication number: 20150214330
    Abstract: A method includes providing a gate structure having a gate, a first spacer along at least one side of the gate and an interlayer dielectric on at least one of the gate and the first spacer. The interlayer dielectric is removed to reveal the first spacer. The first spacer is removed and a second spacer is deposited on at least one side of the gate. The second spacer is formed of material having a lower dielectric constant than the first spacer.
    Type: Application
    Filed: January 24, 2014
    Publication date: July 30, 2015
    Applicant: GLOBALFOUNDRIES Inc.
    Inventors: Jing WAN, Jin Ping LIU, Guillaume BOUCHE, Andy WEI, Lakshmanan H. VANAMURTHY, Cuiqin XU, Sridhar KUCHIBHATLA, Rama KAMBHAMPATI, Xiuyu CAI
  • Publication number: 20070142398
    Abstract: Tetracyclic 3-substituted indoles having serotonin receptor affinity and pharmaceutically acceptable salts thereof.
    Type: Application
    Filed: December 16, 2003
    Publication date: June 21, 2007
    Inventors: Venkata Ramakrishna, Vikas Shirsath, Rama Kambhampati, Venkata Satya Veerabhadra Rao, Venkateswarlu Jasti
  • Publication number: 20060223890
    Abstract: N-arylsulfonyl-3-substituted indole compounds, derivatives, analogs, tautomeric forms, stereoisomers, geometric forms, N-oxides, polymorphs and pharmaceutically acceptable salts.
    Type: Application
    Filed: June 5, 2003
    Publication date: October 5, 2006
    Inventors: Venkata Ramakrishna, Vikas Shirsath, Rama Kambhampati, Venkata Satya Rao, Venkateswarlu Jasti
  • Publication number: 20060173193
    Abstract: N-arylsulfonyl-3-aminoalkoxyindoles indole compounds, radioisotopes, stereoisomers, geometric forms, N-oxides, polymorphs and pharmaceutically acceptable salts.
    Type: Application
    Filed: November 25, 2003
    Publication date: August 3, 2006
    Inventors: Venkata Ramakrishna, Vikas Shirsath, Rama Kambhampati, Venkata Satya Veerabhadra Rao, Venkatswarlu Jasti
  • Publication number: 20050250834
    Abstract: The present invention relates to novel tetracyclic arylcarbonyl indoles, their derivatives, their analogues, their tautomeric forms, their stereoisomers, their polymorphs, their pharmaceutically acceptable salts, their pharmaceutically acceptable solvates, novel intermediates described herein and pharmaceutically acceptable compositions containing them. This invention particularly relates to novel tetracyclic arylcarbonyl indoles of the general formula (I), their derivatives, their analogues, their tautomeric forms, their stereoisomers, their polymorphs, their pharmaceutically acceptable salts, their pharmaceutically acceptable solvates, novel intermediates described herein and pharmaceutically acceptable compositions containing them.
    Type: Application
    Filed: June 19, 2003
    Publication date: November 10, 2005
    Applicant: SUVEN LIFE SCIENCES LIMITED
    Inventors: Venkateswarlu Jasti, Venkata Satya Ramakrishna, Rama Kambhampati, Srinivasa Battula, Venkata Satya Veerabhadra Rao
  • Publication number: 20050203103
    Abstract: The present invention relates to novel tetracyclic arylalkyl indoles, their derivatives, their analogues, their tautomeric forms, their stereoisomers, their polymorphs, their pharmaceutically acceptable salts, their pharmaceutically acceptable solvates, novel intermediates described herein and pharmaceutically acceptable compositions containing them. This invention particularly relates to novel tetracyclic arylalkyl of the general formula (I), their derivatives, their analogues, their tautomeric forms, their stereoisomers, their polymorphs, their pharmaceutically acceptable salts, their pharmaceutically acceptable solvates, novel intermediates described herein and pharmaceutically acceptable compositions containing them. This invention also relates to process/es for preparing such compound/s of general formula (I), composition/s containing effective amount/s of such a compound and the use of such a compound/composition in therapy.
    Type: Application
    Filed: June 19, 2003
    Publication date: September 15, 2005
    Applicant: SUVEN LIFE SCIENCES LIMITED
    Inventors: Venkateswarlu Jasti, Venkata Ramakrishna, Rama Kambhampati, Srinivasa Battula, Venkata Satya Veerabhadra Rao