Patents by Inventor Ramachandran Balasubramanian

Ramachandran Balasubramanian has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER
    Publication number: 20180084610
    Abstract: Embodiments of the disclosure generally relate to a reflector for use in a thermal processing chamber. In one embodiment, the thermal processing chamber generally includes an upper dome, a lower dome opposing the upper dome, the upper dome and the lower dome defining an internal volume of the processing chamber, a substrate support disposed within the internal volume, and a reflector positioned above and proximate to the upper dome, wherein the reflector has a heat absorptive coating layer deposited on a side of the reflector facing the substrate support.
    Type: Application
    Filed: November 28, 2017
    Publication date: March 22, 2018
    Inventors: Kin Pong LO, Paul BRILLHART, Ramachandran BALASUBRAMANIAN, Satheesh KUPPURAO, Daniel REDFIELD, Joseph M. RANISH, James Francis MACK, Kailash Kiran PATALAY, Michael OLSEN, Eddie FEIGEL, Richard HALPIN, Brett VETORINO
  • Lamp array for thermal processing exhibiting improved radial uniformity
    Patent number: 7509035
    Abstract: A thermal processing chamber includes a substrate support rotating about a center axis and a lamphead of plural lamps in an array having a predetermined difference in radiance pattern between them. The radiance pattern includes a variation in diffuseness or collimation. In one embodiment, the center lines of all of the lamps are disposed away from the center axis. The array can be an hexagonal array, in which the center axis is located at a predetermined position between neighboring lamps.
    Type: Grant
    Filed: August 2, 2005
    Date of Patent: March 24, 2009
    Assignee: Applied Materials, Inc.
    Inventors: Joseph M. Ranish, Corina E. Tanasa, Sundar Ramamurthy, Claudia Lai, Ravi Jallepally, Ramachandran Balasubramanian, Aaron M. Hunter, Agus Tjandra, Norman Tam
  • Lamp array for thermal processing exhibiting improved radial uniformity
    Publication number: 20060066193
    Abstract: A thermal processing chamber includes a substrate support rotating about a center axis and a lamphead of plural lamps in an array having a predetermined difference in radiance pattern between them. The radiance pattern includes a variation in diffuseness or collimation. In one embodiment, the center lines of all of the lamps are disposed away from the center axis. The array can be an hexagonal array, in which the center axis is located at a predetermined position between neighboring lamps.
    Type: Application
    Filed: August 2, 2005
    Publication date: March 30, 2006
    Inventors: Joseph Ranish, Corina Tanasa, Sundar Ramamurthy, Claudia Lai, Ravi Jallepally, Ramachandran Balasubramanian, Aaron Hunter, Agus Tjandra, Norman Tam