Patents by Inventor Raman Sudhakar

Raman Sudhakar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Laser system and method for single press micromachining of multilayer workpieces
    Patent number: 6407363
    Abstract: A single pass actuator (70, 200), such as a deformable mirror (70), quickly changes, preferably in less than 1 ms, the focus and hence the spot size of ultraviolet or visible wavelength laser pulses to change the fluence of the laser output (66) at the workpiece surface between at least two different fluence levels to facilitate processing top metallic layers (264) at higher fluences and underlying dielectric layers (266) at lower fluences to protect bottom metallic layers (268). The focus change is accomplished without requiring Z-axis movement of the laser positioning system (62). In addition, the spot size can be changed advantageously during trepanning operations to decrease via taper, reduce lip formation, increase throughput, and/or minimize damage.
    Type: Grant
    Filed: March 30, 2001
    Date of Patent: June 18, 2002
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Corey M. Dunsky, Ho W. Lo, Ken Whiteman, Donald R. Wilt, Spencer Barrett, Raman Sudhakar
  • Laser system and method for single pass micromachining of multilayer workpieces
    Publication number: 20010045419
    Abstract: A single pass actuator (70, 200), such as a deformable mirror (70), quickly changes, preferably in less than 1 ms, the focus and hence the spot size of ultraviolet or visible wavelength laser pulses to change the fluence of the laser output (66) at the workpiece surface between at least two different fluence levels to facilitate processing top metallic layers (264) at higher fluences and underlying dielectric layers (266) at lower fluences to protect bottom metallic layers (268). The focus change is accomplished without requiring Z-axis movement of the laser positioning system (62). In addition, the spot size can be changed advantageously during trepanning operations to decrease via taper, reduce lip formation, increase throughput, and/or minimize damage.
    Type: Application
    Filed: March 30, 2001
    Publication date: November 29, 2001
    Inventors: Corey M. Dunsky, Ho W. Lo, Ken Whiteman, Donald R. Wilt, Spencer Barrett, Raman Sudhakar