Patents by Inventor Ramanathan Gandhi
Ramanathan Gandhi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12199183Abstract: A method of forming a device comprises forming dielectric structures over other dielectric structures overlying conductive contact structures, the dielectric structures separated from one another by trenches and laterally extending orthogonal to the other dielectric structures and the conductive contact structures. Conductive gate structures are formed on exposed side surfaces of the dielectric structures within the trenches. Dielectric oxide structures are formed on exposed side surfaces of the conductive gate structures within the trenches. Exposed portions of the other dielectric structures are removed to form isolation structures. Semiconductive pillars are formed on exposed side surfaces of the dielectric oxide structures and the isolation structures within the trenches. The semiconductive pillars are in electrical contact with the conductive contact structures. Additional conductive contact structures are formed on upper surfaces of the semiconductive pillars.Type: GrantFiled: August 25, 2022Date of Patent: January 14, 2025Assignee: Micron Technology, Inc.Inventors: Scott E. Sills, Ramanathan Gandhi, Durai Vishak Nirmal Ramaswamy
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Patent number: 12199182Abstract: A device comprises an array comprising rows and columns of elevationally-extending transistors. An access line interconnects multiple of the elevationally-extending transistors along individual of the rows. The transistors individually comprise an upper source/drain region, a lower source/drain region, and a channel region extending elevationally there-between. The channel region comprises an oxide semiconductor. A transistor gate is operatively laterally-proximate the channel region and comprises a portion of an individual of the access lines. Intra-row-insulating material is longitudinally between immediately-intra-row-adjacent of the elevationally-extending transistors. Inter-row-insulating material is laterally between immediately-adjacent of the rows of the elevationally-extending transistors. At least one of the intra-row-insulating material and the inter-row-insulating material comprises void space. Other embodiments, including method embodiments, are disclosed.Type: GrantFiled: September 13, 2021Date of Patent: January 14, 2025Assignee: Micron Technology, Inc.Inventors: Scott E. Sills, Kirk D. Prall, Durai Vishak Nirmal Ramaswamy, Ramanathan Gandhi
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Patent number: 12170324Abstract: A transistor comprises a channel region having a frontside and a backside. A gate is adjacent the frontside of the channel region with a gate insulator being between the gate and the channel region. Insulating material having net negative charge is adjacent the backside of the channel region. The insulating material comprises at least one of AlxFy, HfAlxFy, AlOxNy, and HfAlxOyNz, where “x”, “y”, and “z” are each greater than zero. Other embodiments and aspects are disclosed.Type: GrantFiled: November 15, 2022Date of Patent: December 17, 2024Inventors: Ramanathan Gandhi, Augusto Benvenuti, Giovanni Maria Paolucci
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Publication number: 20240413154Abstract: Some embodiments include an integrated assembly having a first semiconductor material between two regions of a second semiconductor material. The second semiconductor material is a different composition than the first semiconductor material. Hydrogen is diffused within the first and second semiconductor materials. The conductivity of the second semiconductor material increases in response to the hydrogen diffused therein to thereby create a structure having the second semiconductor material as source/drain regions, and having the first semiconductor material as a channel region between the source/drain regions. A transistor gate is adjacent the channel region and is configured to induce an electric field within the channel region. Some embodiments include methods of forming integrated assemblies.Type: ApplicationFiled: August 16, 2024Publication date: December 12, 2024Applicant: Micron Technology, Inc.Inventors: Kamal M. Karda, Yi Fang Lee, Haitao Liu, Durai Vishak Nirmal Ramaswamy, Ramanathan Gandhi, Karthik Sarpatwari, Scott E. Sills, Sameer Chhajed
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Publication number: 20240365546Abstract: Methods, systems, and devices for multiple metal word line gates in a three dimensional (3D) memory array are described. A multi-metal control gate may be formed and used to access the memory cells. The metals may be selected such that an electric field induced in the memory cell during access is relatively even across its area. For example, metals having different work functions or resistivities may induce different electric fields. Accordingly, metals may be selected to increase an electric field induced in a planar region in the memory cell relative to if a single metal control gate were implemented such that relatively even electric fields are induced throughout the memory cell. To support formation of the multi-metal control gate, a portion of the metal forming the control gate may be partially etched and replaced with one or more other metals to form the multi-metal control gate.Type: ApplicationFiled: April 18, 2024Publication date: October 31, 2024Inventor: Ramanathan Gandhi
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Patent number: 12133383Abstract: A memory cell comprises channel material, charge-passage material, programmable material, a charge-blocking region, and a control gate. The programmable material comprises at least two regions comprising SiNx having a region comprising SiOy therebetween, where “x” is 0.5 to 3.0 and “y” is 1.0 to 3.0. Methods are disclosed.Type: GrantFiled: November 10, 2023Date of Patent: October 29, 2024Assignee: Micron Technology, Inc.Inventors: Venkatakrishnan Sriraman, Dae Hong Eom, Ramanathan Gandhi, Donghua Li, Ashok Kumar Muthukumaran
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Patent number: 12101946Abstract: Some embodiments include an integrated assembly having a first semiconductor material between two regions of a second semiconductor material. The second semiconductor material is a different composition than the first semiconductor material. Hydrogen is diffused within the first and second semiconductor materials. The conductivity of the second semiconductor material increases in response to the hydrogen diffused therein to thereby create a structure having the second semiconductor material as source/drain regions, and having the first semiconductor material as a channel region between the source/drain regions. A transistor gate is adjacent the channel region and is configured to induce an electric field within the channel region. Some embodiments include methods of forming integrated assemblies.Type: GrantFiled: November 8, 2023Date of Patent: September 24, 2024Assignee: Micron Technology, Inc.Inventors: Kamal M. Karda, Yi Fang Lee, Haitao Liu, Durai Vishak Nirmal Ramaswamy, Ramanathan Gandhi, Karthik Sarpatwari, Scott E. Sills, Sameer Chhajed
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Publication number: 20240194264Abstract: Memory cells, and memories and memory array structures containing such memory cells, might include a control gate, a channel, a gate dielectric between the channel and the control gate, a charge-storage node between the gate dielectric and the control gate, a charge-blocking material between the charge-storage node and the control gate, a laminated dielectric between the charge-blocking material and the control gate, and a high-K dielectric between the laminated dielectric and the control gate, wherein the laminated dielectric comprises an instance of a first dielectric material between the charge-blocking material and the high-K dielectric and an instance of a second dielectric material between the instance of the first dielectric material and the high-K dielectric, and wherein the instance of the first dielectric material has a higher oxygen areal density than an oxygen areal density of the instance of the second dielectric material.Type: ApplicationFiled: November 21, 2023Publication date: June 13, 2024Applicant: MICRON TECHNOLOGY, INC.Inventors: Dmitry Mikulik, Leo Lukose, Ramanathan Gandhi
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Patent number: 11996456Abstract: Some embodiments include a memory cell having a conductive gate comprising ruthenium. A charge-blocking region is adjacent the conductive gate, a charge-storage region is adjacent the charge-blocking region, a tunneling material is adjacent the charge-storage region, and a channel material is adjacent the tunneling material. Some embodiments include an assembly having a vertical stack of alternating insulative levels and wordline levels. The wordline levels contain conductive wordline material which includes ruthenium. Semiconductor material extends through the stack as a channel structure. Charge-storage regions are between the conductive wordline material and the channel structure. Charge-blocking regions are between the charge-storage regions and the conductive wordline material. Some embodiments include methods of forming integrated assemblies.Type: GrantFiled: April 28, 2023Date of Patent: May 28, 2024Inventor: Ramanathan Gandhi
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Publication number: 20240081053Abstract: A memory cell comprises channel material, charge-passage material, programmable material, a charge-blocking region, and a control gate. The programmable material comprises at least two regions comprising SiNx having a region comprising SiOy therebetween, where “x” is 0.5 to 3.0 and “y” is 1.0 to 3.0. Methods are disclosed.Type: ApplicationFiled: November 10, 2023Publication date: March 7, 2024Applicant: Micron Technology, Inc.Inventors: Venkatakrishnan Sriraman, Dae Hong Eom, Ramanathan Gandhi, Donghua Li, Ashok Kumar Muthukumaran
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Publication number: 20240074216Abstract: Some embodiments include an integrated assembly having a first semiconductor material between two regions of a second semiconductor material. The second semiconductor material is a different composition than the first semiconductor material. Hydrogen is diffused within the first and second semiconductor materials. The conductivity of the second semiconductor material increases in response to the hydrogen diffused therein to thereby create a structure having the second semiconductor material as source/drain regions, and having the first semiconductor material as a channel region between the source/drain regions. A transistor gate is adjacent the channel region and is configured to induce an electric field within the channel region. Some embodiments include methods of forming integrated assemblies.Type: ApplicationFiled: November 8, 2023Publication date: February 29, 2024Applicant: Micron Technology, Inc.Inventors: Kamal M. Karda, Yi Fang Lee, Haitao Liu, Durai Vishak Nirmal Ramaswamy, Ramanathan Gandhi, Karthik Sarpatwari, Scott E. Sills, Sameer Chhajed
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Patent number: 11908913Abstract: A semiconductor device is disclosed. The semiconductor device includes a transistor including a source contact, a drain contact, and a channel region including an oxide semiconductor material as the channel material. At least one of the drain contact or the source contact includes a conductive material, such as ruthenium, to reduce the Schottky effects at the interface with the channel material.Type: GrantFiled: April 28, 2022Date of Patent: February 20, 2024Assignee: Micron Technology, Inc.Inventors: Durai Vishak Nirmal Ramaswamy, Ramanathan Gandhi, Scott E. Sills
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Patent number: 11856766Abstract: A memory cell comprises channel material, charge-passage material, programmable material, a charge-blocking region, and a control gate. The programmable material comprises at least two regions comprising SiNx having a region comprising SiOy therebetween, where “x” is 0.5 to 3.0 and “y” is 1.0 to 3.0. Methods are disclosed.Type: GrantFiled: August 2, 2021Date of Patent: December 26, 2023Assignee: Micron Technology, Inc.Inventors: Venkatakrishnan Sriraman, Dae Hong Eom, Ramanathan Gandhi, Donghua Li, Ashok Kumar Muthukumaran
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Patent number: 11832454Abstract: Some embodiments include an integrated assembly having a first semiconductor material between two regions of a second semiconductor material. The second semiconductor material is a different composition than the first semiconductor material. Hydrogen is diffused within the first and second semiconductor materials. The conductivity of the second semiconductor material increases in response to the hydrogen diffused therein to thereby create a structure having the second semiconductor material as source/drain regions, and having the first semiconductor material as a channel region between the source/drain regions. A transistor gate is adjacent the channel region and is configured to induce an electric field within the channel region. Some embodiments include methods of forming integrated assemblies.Type: GrantFiled: August 6, 2021Date of Patent: November 28, 2023Assignee: Micron Technology, Inc.Inventors: Kamal M. Karda, Yi Fang Lee, Haitao Liu, Durai Vishak Nirmal Ramaswamy, Ramanathan Gandhi, Karthik Sarpatwari, Scott E. Sills, Sameer Chhajed
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Publication number: 20230255625Abstract: Some embodiments include a memory cell having a conductive gate comprising ruthenium. A charge-blocking region is adjacent the conductive gate, a charge-storage region is adjacent the charge-blocking region, a tunneling material is adjacent the charge-storage region, and a channel material is adjacent the tunneling material. Some embodiments include an assembly having a vertical stack of alternating insulative levels and wordline levels. The wordline levels contain conductive wordline material which includes ruthenium. Semiconductor material extends through the stack as a channel structure. Charge-storage regions are between the conductive wordline material and the channel structure. Charge-blocking regions are between the charge-storage regions and the conductive wordline material. Some embodiments include methods of forming integrated assemblies.Type: ApplicationFiled: April 28, 2023Publication date: August 17, 2023Applicant: Micron Technology, Inc.Inventor: Ramanathan Gandhi
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Patent number: 11695050Abstract: Some embodiments include a memory cell having a conductive gate comprising ruthenium. A charge-blocking region is adjacent the conductive gate, a charge-storage region is adjacent the charge-blocking region, a tunneling material is adjacent the charge-storage region, and a channel material is adjacent the tunneling material. Some embodiments include an assembly having a vertical stack of alternating insulative levels and wordline levels. The wordline levels contain conductive wordline material which includes ruthenium. Semiconductor material extends through the stack as a channel structure. Charge-storage regions are between the conductive wordline material and the channel structure. Charge-blocking regions are between the charge-storage regions and the conductive wordline material. Some embodiments include methods of forming integrated assemblies.Type: GrantFiled: March 8, 2021Date of Patent: July 4, 2023Assignee: Micron Technology, Inc.Inventor: Ramanathan Gandhi
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Patent number: 11658246Abstract: A device comprises a vertical transistor. The vertical transistor comprises a pillar structure, at least one gate electrode, and a dielectric material. The pillar structure comprises a source region, a drain region, and a channel region. The source region and the drain region each individually comprise at least one electrically conductive material configured to inhibit hydrogen permeation therethrough. The channel region comprises a semiconductive material vertically between the source region and the drain region. The at least one gate electrode laterally neighbors the channel region of the semiconductive structure. The dielectric material is laterally between the semiconductive structure and the at least one gate electrode. Additional devices, and related electronic systems and methods are also disclosed.Type: GrantFiled: October 8, 2019Date of Patent: May 23, 2023Assignee: Micron Technology, Inc.Inventors: Kamal M. Karda, Ramanathan Gandhi, Yi Fang Lee, Haitao Liu, Durai Vishak Nirmal Ramaswamy, Scott E. Sills
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Publication number: 20230081634Abstract: A transistor comprises a first conductive contact, a heterogeneous channel comprising at least one oxide semiconductor material over the first conductive contact, a second conductive contact over the heterogeneous channel, and a gate electrode laterally neighboring the heterogeneous channel. A device, a method of forming a device, a memory device, and an electronic system are also described.Type: ApplicationFiled: October 27, 2022Publication date: March 16, 2023Inventors: Scott E. Sills, Ramanathan Gandhi, Durai Vishak Nirmal Ramaswamy, Yi Fang Lee, Kamal M. Karda
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Publication number: 20230075673Abstract: A transistor comprises a channel region having a frontside and a backside. A gate is adjacent the frontside of the channel region with a gate insulator being between the gate and the channel region. Insulating material having net negative charge is adjacent the backside of the channel region. The insulating material comprises at least one of AlxFy, HfAlxFy, AlOxNy, and HfAlxOyNz, where “x”, “y”, and “z” are each greater than zero. Other embodiments and aspects are disclosed.Type: ApplicationFiled: November 15, 2022Publication date: March 9, 2023Applicant: Micron Technology, Inc.Inventors: Ramanathan Gandhi, Augusto Benvenuti, Giovanni Maria Paolucci
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Publication number: 20230031891Abstract: A memory cell comprises channel material, charge-passage material, programmable material, a charge-blocking region, and a control gate. The programmable material comprises at least two regions comprising SiNx having a region comprising SiOy therebetween, where “x” is 0.5 to 3.0 and “y” is 1.0 to 3.0. Methods are disclosed.Type: ApplicationFiled: August 2, 2021Publication date: February 2, 2023Applicant: Micron Technology, Inc.Inventors: Venkatakrishnan Sriraman, Dae Hong Eom, Ramanathan Gandhi, Donghua Li, Ashok Kumar Muthukumaran