Patents by Inventor Ramkishan Rao LINGAMPALLl

Ramkishan Rao LINGAMPALLl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE SUPPORTS WITH INTEGRATED RF FILTERS
    Publication number: 20220415625
    Abstract: A substrate support including a body, a heating element, a first radio frequency filter, and a second radio frequency filter. The body is configured to support a substrate. The heating element is at least partially implemented in a first portion of the body. The first radio frequency filter is connected to an input of the heating element and at least partially implemented in a second portion of the body and connected to the heating element by a first via. The second radio frequency filter is connected to an output of the heating element and at least partially implemented in the second portion or a third portion of the body.
    Type: Application
    Filed: November 2, 2020
    Publication date: December 29, 2022
    Inventors: Sunil KAPOOR, Dan MAROHL, Ramkishan Rao LINGAMPALLl, Eric MADSEN