Patents by Inventor Ramkumar Krishnaswamy

Ramkumar Krishnaswamy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Integrated process for etching and cleaning oxide surfaces during the manufacture of microelectronic devices
    Publication number: 20030087532
    Abstract: The present invention provides integrated systems and methods for carrying out manufacturing steps relating to etching, photoresist stripping and optionally, particle removal. More specifically, the present invention provides integrated systems and methods which may be utilized to etch oxide with subsequent removal of photoresist using BOE solutions that are desirably blended on-line. Advantageously, systems and methods embodying features of the present invention include a single process chamber so that cycle time and individual step processing time are reduced, further resulting in increased productivity of the systems and methods.
    Type: Application
    Filed: November 1, 2001
    Publication date: May 8, 2003
    Inventors: Biao Wu, Erik David Olson, Ramkumar Krishnaswamy, Eugene Smith