Patents by Inventor Ramkumar Subramanion

Ramkumar Subramanion has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Anti-reflective coating layer for semiconductor device
    Patent number: 5986344
    Abstract: In a photo-lithographic step for providing contact points to lower layers of a semiconductor device, an anti-reflective coating (ARC) layer, such as FLARE 2.0.TM., is used to provide a good contact points to an underlayer. After the contact points are made, the anti-reflective coating layer is removed, with the removal being performed in a same step in which a photo-resist is removed from the semiconductor device. In an alternative configuration, the ARC layer remains in the semiconductor device after the fabrication process is competed, thereby acting as an interlayer dielectric during operation of the semiconductor device.
    Type: Grant
    Filed: April 14, 1998
    Date of Patent: November 16, 1999
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Ramkumar Subramanion, Suzette K. Pangrle, John G. Pellerin, Ernesto A. Gallardo