Patents by Inventor Ramo OMEROVIC

Ramo OMEROVIC has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • FLUID PURGING SYSTEM
    Publication number: 20230314964
    Abstract: The present invention provides a fluid purging system (100) for an optical element (120), comprising a fluid guiding unit arranged to guide a fluid, provided by a fluid supply system, over at least a curved portion of an optical surface (122) of the optical element. The fluid guiding unit comprises a fluid inlet and a first nozzle unit (110) for providing a fluid to the optical surface. The fluid guiding unit being formed by at least a first wall portion (102) and at least a second wall portion (104), wherein the second wall portion being configured to face the optical surface and to follow a contour of the optical surface. The second wall portion comprises a second nozzle unit (112).
    Type: Application
    Filed: May 10, 2021
    Publication date: October 5, 2023
    Applicant: ASML Netherlands B.V.
    Inventors: José Nilton FONSECA JUNIOR, Zhuangxiong HUANG, Franciscus Johannes Leonardus HEUTZ, Ferdy MIGCHELBRINK, Henricus Anita Jozef Wilhelmus VAN DE VEN, Ramo OMEROVIC, Emericus Antoon Theodorus VAN DEN AKKER