Abstract: A system for controlling a manufacturing process of a substrate, the system may include an illumination module that is arranged to illuminate multiple regions of a substrate with electromagnetic radiation; a detection module that is arranged to detect electromagnetic signals resulting from the illumination of the multiple regions; and a processor that is arranged to: determine dimensions of multiple vias that are deposited within a substrate of the substrate to provide first via measurement results; determine substrate thickness at multiple locations to provide first substrate thickness results; and provide information related to at least one out of (a) the first substrate thickness results and (b) the first via measurement results to at least one out of (i) a thinning device arranged to thin the substrate and (ii) a manufacturing device that differs from the thinning device and is arranged to participate in a manufacturing of the substrate.