Patents by Inventor Ran Trifon

Ran Trifon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SYSTEM AND METHOD FOR TARGET CENTERING DETECTION IN OVERLAY METROLOGY
    Publication number: 20260064014
    Abstract: A system for target centering detection may be configured receive one or more acquisition images of a sample from an overlay metrology sub-system and determine, using a machine learning-based centering model, one or more stage correctables based on the received one or more acquisition images. The system may be configured to cause a sample stage of the overlay metrology sub-system to adjust a stage position based on the determined one or more stage correctables and receive one or more measurement images of the sample from the overlay metrology sub-system based on the adjusted stage position of the sample stage. The system may then be configured to determine one or more overlay measurements based on the received one or more measurement images.
    Type: Application
    Filed: September 4, 2024
    Publication date: March 5, 2026
    Inventors: Ofer Manos, Sveta Grechin, Ran Trifon, Yang Yu, Mohamed Hegaze, Avner Safrani, Ohad Bachar