Patents by Inventor Ranald Stearns

Ranald Stearns has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Use of ozone in process effluent abatement
    Patent number: 6277347
    Abstract: A method and apparatus for abating a compound in a substrate processing system's effluent gases. The method of the present invention begins by introducing ozone and the effluent gases into an abatement device's combustion chamber. Energy is then applied to the effluent gas and ozone. The application of energy, such as thermal or radio frequency energy, then causes a reaction in and between the effluent gases and the ozone, thereby rendering the compound inert. The resultant gases produced are then exhausted out of the combustion chamber.
    Type: Grant
    Filed: February 24, 1997
    Date of Patent: August 21, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Ranald Stearns, Gary Sypherd, Stuardo Robles, Maria Galiano